• The Transactions of The Korean Institute of Electrical Engineers
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• v.61 no.1
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• pp.94-98
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• 2012

The behavior of ozone micro bubble cleaning system was investigated to evaluate the solution as a new method of solar cell wafer cleaning in comparison with former conventional RCA cleaning. We have developed the ozone dissolution system in the ozonated water for more efficient cleaning conditions. The optimized cleaning conditions for solar cell wafer process were 10 ppm of ozone concentration and 12 minutes in cleaning periods, respectively. We have confirmed the cleaning reliability and cell efficiencies after ozone micro bubble cleaning. Using this new cleaning technology, it was possible to obtain higher efficiency, higher productivity, and fast tact time for applying cleaning in the fields on bare ingot wafer, LED wafers as well as the solar cell wafer.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.36 no.1
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• pp.61-66
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• 2004

Bleached chemithermomechanical pulp (BCTMP) was produced from CTMP of Betula maximowicziana Regel by two staged ozone-hydrogen peroxide bleaching in order to improve the optical properties of high yield pulp. This pulp was used for the evaluation of optical properties improvement, chemical characteristics of lignin in fiber and the relationship between lignin and optical properties in fiber cell wall. Hydrogen peroxide treatment improved the brightness, but the post color number (PC No.). There was little improvement on optical properties by ozone treatment, but this could be improved more by using two staged ozone-hydrogen peroxide bleaching. The hydrogen peroxide treatment did not make any change on chemical characteristics of lignin in cell wall, but by ozone treatment, it was found that the non-aromatic conjugated structure was existed in the surface of cell wall, but this could be removed by hydrogen peroxide treatment in two staged ozone-hydrogen peroxide treatment. Therefore, the optical properties was significantly improved, due to the removal of non-aromatic conjugated structure.

• Journal of Electrical Engineering and Technology
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• v.10 no.1
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• pp.295-298
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• 2015

Ozone micro-bubble cleaning system was designed, and made to develop a unique technique to clean wafers by using ozone micro-bubbles. The ozone micro-bubble cleaning system consisted of loading, cleaning, rinsing, drying and un-loading zones, respectively. In case of the cleaning the silicon wafers of a solar cell, more than 99 % of cleaning efficiency was obtained by dipping the wafers at 10 ppm of ozone for 10 minutes. Both of long cleaning time and high ozone concentration in the wet-solution with ozone micro-bubbles reduced cleaning efficiency because of the re-sorption of debris. The cleaning technique by ozone micro-bubbles can be also applied to various wafers for an ingot and LED as an eco-friendly method.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.2
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• pp.121-126
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• 2004

In this paper, the effects of the ozone oxidation of the landing polycrystalline silicon on the cell contact resistance of the DRAM device were studied. For this study, the ozone oxidation of the landing polycrystalline silicon layer was performed under various conditions, which was followed by the normal DRAM processes. Then, the cell contact resistance and $t_{WR}$ (write recovery time) of the devices were measured and analyzed. The experimental results showed that the cell contact resistance was more significantly increased for higher temperature of oxidation, longer time of oxidation, and higher concentration of ozone in the oxidation furnace. In addition, the TEM cross-sectional micrographs clearly showed that the oxide layer at the interface between the landing polycrystalline silicon layer and the plug polycrystalline silicon layer was increased by the ozone oxidation. Furthermore, the rate of the device failure due to too large write recovery time was also found to be well correlated with the increase of the cell contact resistance.

• Journal of Microbiology and Biotechnology
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• v.28 no.8
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• pp.1233-1246
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• 2018

Vibrio parahaemolyticus contamination causes serious foodborne illness and has become a global health problem. As a disinfectant, aqueous ozone can effectively kill a number of bacteria, viruses, parasites, and other microorganisms. In this study, three factors, namely, the aqueous ozone concentration, the exposure time, and the bacterial density, were analyzed by response surface methodology, and the aqueous ozone concentration was the most influential factor in the sterilization ratio. Under low aqueous ozone concentrations (less than 0.125 mg/l), the bacterial cell membranes remained intact, and the ozone was detoxified by intracellular antioxidant enzymes (e.g., superoxide dismutase and catalase). Under high aqueous ozone concentrations (more than 1 mg/l), cell membranes were damaged by the degree of peripheral electronegativity at the cell surface and the concentration of lactate dehydrogenase released into the extracellular space, and the ultrastructures of the cells were confirmed by transmission electron microscopy. Aqueous ozone penetrated the cells through leaking membranes, inactivated the enzymes, inhibited almost all the genes, and degraded the genetic materials of gDNA and total RNA, which eventually led to cell death.

• Proceedings of the Korea Technical Association of the Pulp and Paper Industry Conference
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• 1999.04b
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• pp.375-380
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• 1999

In order to improve the optical properties of high yield pulp, bleached chemi-thermo-mechanical pulp (BCTMP) was produced from CTMP of Betula maximowicziana Regel by two staged ozone-hydrogen peroxide bleaching. This pulp was used for the evaluation of the improvement of optical properties, chemical characteristics of lignin in fiber, and the relationship between lignin and optical properties in fiber cell wall. By hydrogen peroxide treatment, the brightness was improved, but the post color number (PC No.) was not. There was little improvement on optical properties by ozone treatment, but his could be solved by using two staged ozone-hydrogen peroxide bleaching. The hydrogen peroxide treatment did not make nay change on chemical characteristics of lignin in cell wall, but by ozone treatment, it was found that the non-aromatic conjugated structure was existed in the surface of cell wall, but this could be removed by hydrogen peroxide treatment in two staged ozone-hydrogen peroxide treatment. Therefore, the optical properties was significantly improved due to the removal of non-aromatic conjugated structure.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.34 no.4
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• pp.22-29
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• 2002

This research was conducted to investigate the morphological characteristics of fine fibers produced during beating process of high yield pulp treated with ozone and the distribution of lignin in the produced fine fibers. Thermomechanical(TMP) pulp and chemithermomechanical(CTMP) pulp of spruce and CTMP of white birch were beaten to reach 200$m\ell$ CSF, and then the fine fibers were observed using ultraviolet microscope. The fine fibers produced from TMP and CTMP of spruce using treated with ozone for 15 minutes were fragments of fiber surfaces or cell corners, and most of them contained lignin. However, lignin was not observed in the fibers after 15 minutes of ozone treatment. The fine fibers produced from CTMP of white birch were broken pieces or fragments of fiber surfaces or cell corners. The lignin was observed in the fibers until 5min of ozone treatment but no lignin was observed after 5 minutes of ozone treatment. Different morphological characteristics of TMP and CTMP explained both the different morphological characteristics and the distribution of lignin observed in the fine fibers produced from the beating process of TMP and CTMP treated with ozone.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.43 no.1
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• pp.29-35
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• 2011

Since the role of lignin in the wood cell wall is to keep integrity and structure rigidity of lignocellulosic substrate, lignin of the cell wall has to be destroyed before enzymatic hydrolysis of wood polysaccharides. The aspen wood meals were delignified with ozone in acidic condition. The chemical characteristics of wood meal were investigated. The 60% of lignin and almost zero % of polysaccharides in aspen wood meal was degraded with 10min. ozone treatment. The phenolic hydroxyl groups of lignin in ozonated wood meal were increased with ozonation time. The sugar composition of ozonated wood meal showed that the hemicellulose was more susceptible to ozonation than cellulose. The yield of aldehyde was increased in some degree with 10min. ozone treatment and decreased with longer ozone treatment.

• Journal of Life Science
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• v.11 no.5
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• pp.489-495
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• 2001

The effect of ozone-water treatment on the morphological change of endosperm cells and the activity of acid phosphatase during Glycine max germination was investigated with electron microscope. Acid phosphatase showed the activity in the cell organelles of germinating endosperm of seed. it's activity occurrs in 12 hrs cultivation after 0.5 ppm ozone-water treatment. As the differentiation of endosperm, reaction products of the acid phosphatase appear to be accumulated invacuole after treatment of ozone-water. This result confirm that acid phosphatase is inveolved in the decomposition and translation of the intracellular storage materials. The characteristics of grganelle in the endosperm cell during germination were discussed.

• Korean Journal of Microbiology
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• v.26 no.2
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• pp.113-121
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• 1988

Ozone, an atmospheric pollutant, can damage similar UV and X-rays DNA and its components. It is possible then that the KNA damage produced by this gas are similar, to some extent, to those of radiations and that they could be repaired by the same DNA repair mechanisms. It has been observed in Escherichia coli that radiosensitive strains such as lex A, rec A and pol A, all deficient to some extent for DNA repair, are more sensitive to ozone than a wild type strain. We have thendetermined the ozone resistance and host-cell reactivation of ozone-damaged T3 phages for the E. coli double mutants pol A, lex A, uvr B, lex A, uvr A, rec A and rec A lox A. According to the results, the DNA polymerase 1 plays a key role in ozone resistance and Type 11 mechanism and/or shory patch excision repair are the most important for it. The interactions between the different DNA repair mechanisms are secondary. There is a strong correlation between ozone resistance and the capacity to reactivate T3 phages damaged by ozone.