• 한국정밀공학회지
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• 제28권10호
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• pp.1217-1223
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• 2011

In this paper, the dielectric barrier discharge plasma generator has been studied for producing of the high concentration ozone gas. Proposed plasma generator has the structure of extremely narrow discharge air gap(0.15mm) in order to realize the high electric field discharge. We investigate the performance of the dielectric barrier discharge plasma generator experimentally and the results show that the generator has very high ozone concentration characteristics of 13.7[wt%/$O_2$] at the oxygen flow rate of 1[${\ell}$/min] of each discharge cell. So, we confirmed that the proposed plasma generator is suitable for the high concentration ozone production facility of the eco-friendly ozone functional water cleaning system in the electronic components cleaning process.

• Journal of Applied Biological Chemistry
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• 제54권3호
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• pp.190-196
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• 2011

Effectiveness of edible coatings containing soy protein isolate (SPI), in reducing oxidative browning and moisture loss during storage ($4^{\circ}C$) of cut apples, potatoes, carrots, and onions was investigated. The SPI coatings were shown to have antioxidative activity. Furthermore, addition of carboxymethyl cellulose (CMC) to the formulations significantly improved its antioxidative activity. Oxidative discoloration, as determined by Commission Internationale De I'Eclairage (CIE) lightness ($L^*$), redness ($a^*$), and yellowness ($b^*$) color scale, was significantly reduced (p <0.05) by SPI coating treatments over a storage time of 120 min. Loss of lightness was reduced by SPI coatings with and without CMC. These respectively showed 4.03 and 3.71% change of $L^*$ value compared to 8.56% for control. Browning of the control in cut potatoes was significantly increased by 106.6% in contrast to 34.3 and 35.2% for SPI coatings with and without CMC, respectively. The $b^*$ values also reflected effectiveness of SPI. Moisture barrier effect was significantly better for the treatments, compared to the control. SPI coatings reduced moisture loss in apples and potatoes, respectively, by 21.3 and 29.6% over the control. Cut onions did not show any treatment effect both in terms of browning and moisture loss. SPI coatings prove to be good moisture barrier and antioxidative property.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.196.2-196.2
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• 2015

There are various issues fabricating the successful and efficient solar cell structures. One of the most important issues is band alignment technique. The solar cells make the carrier in their active region over the p-n junction. Then, electrons and holes diffuse by minority carrier diffusion length. After they reach the edge of solar cells, there exist large energy barrier unless the good electrode are chosen. Many various conductor with different work functions can be selected to solve this energy barrier problem to efficiently extract carriers. Tungsten oxide has large band gap known as approximately 3.4 eV, and usually this material shows n-type property with reported work function of 6.65 eV. They are extremely high work function and trap level by oxygen vacancy cause them to become the hole extraction layer for optical devices like solar cells. In this study, we deposited tungsten oxide thin films by sputtering technique with various sputtering conditions. Their electrical contact properties were characterized with transmission line model pattern. The structure of tungsten oxide thin films were measured by x-ray diffraction. With x-ray photoelectron spectroscopy, the content of oxygen was investigated, and their defect states were examined by spectroscopic ellipsometry, UV-Vis spectrophotometer, and photoluminescence measurements.

• 멤브레인
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• 제19권1호
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• pp.19-24
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• 2009

졸-겔 공정은 비교적 간단하고 사용이 편리하며 저렴한 설비투자비가 소요되면서도 우수한 물성 및 차단특성을 갖는 코팅 박막을 얻을 수 있다는 장점이 있다. 졸-겔 공정으로 코팅된 필름은 산소 등의 영향에 의해 부패되기 쉬운 식품, 음료, 약품, 의약품 등의 포장재나 단열제로 응용 가능하다. 본 연구에서는 aluminum isopropoxide를 출발물질로 하여 alumina sol을 제조한 후 실란 커플링제를 첨가하여 코팅 용액을 제조하였다. 또한, 제조된 alumina sol 용액을 이축연신 폴리프로필렌(BOPP)에 코팅하여 복합 필름을 만들고 산소 투과 특성을 측정한 결과 순수한 BOPP에 비해서 산소 투과도가 약 85% 정도 감소되는 효과를 보였다.

• 방사성폐기물학회지
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• 제18권spc호
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• pp.51-62
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• 2020

In this paper, an approach developed by the Finnish nuclear waste management organization, Posiva, for the construction license of a geological repository was reviewed. Furthermore, a computer program based on the approach was developed. By using the computer program, the lifetime of a copper disposal canister, which was a key engineered barrier of the geological repository, was predicted under the KAERI Underground Research Tunnel (KURT) geologic conditions. The computer program was developed considering the mass transport of corroding agents, such as oxygen and sulfide, through the buffer and backfill. Shortly after the closure of the repository, the corrosion depths of a copper canister due to oxygen in the pores of the buffer and backfill were calculated. Additionally, the long-term corrosion of a copper canister due to sulfide was analyzed in two cases: intact buffer and eroded buffer. Under various conditions of the engineered barrier, the corrosion lifetimes of the copper canister due to sulfide significantly exceeded one million years. Finally, this study shows that it is necessary to carefully characterize the transmissivity of rock and sulfide concentration during site characterization to accurately predict the canister lifetime.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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• pp.14-19
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• 2002

In this study, as Cu diffusion barrier, tantalum nitrides were successfully deposited on Si(100) substrate and SiO2 by plasma assisted atomic layer deposition(PAALD) and thermal ALD, using pentakis (ethylmethlyamino) tantalum (PEMAT) and $NH_3$ as precursors. The TaN films were deposited on $250^{\circ}$C by both method. The growth rates of TaN films were $0.8{\AA}$/cycle for PAALD and $0.75{\AA}$/cycle for thermal ALD. TaN films by PAALD showed good surface morphology and excellent step coverage for the trench with an aspect ratio of h/w - $1.8 : 0.12 \mu\textrm{m}$ but TaN films by thermal ALD showed bad step coverage for the same trench. The density for PAALD TaN was $11g/\textrm{cm}^3$ and one for thermal ALD TaN was $8.3g/\textrm{cm}^3$. TaN films had 3 atomic % carbon impurity and 4 atomic % oxygen impurity for PAALD and 12 atomic % carbon impurity and 9 atomic % oxygen impurity for thermal ALD. The barrier failure for Cu(200nm)/TaN(l0nm)/$SiO_2(85nm)$/Si structure was shown at temperature above $700^{\circ}$C by XRD, Cu etch pit analysis.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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• pp.152-155
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• 2003

Ashing of photoresist was investigated in dielectric barrier discharges in atmospheric pressure by changing applied voltage, frequency, flow rate. we analyzed the plasma by Optical Emission Spectroscopy(OES) to monitor the variation of active oxygen species. Another new peaks of oxygen radical is observed by addition of argon gas. This may explain the increase in ashing rate with argon addition. With the results of Optical Emission Spectroscopy(OES), we can find the optimized ashing conditions. MIS capacitor for monitoring charging damage by the plasma was also studied. The results suggest the dielectric barrier discharges(DBD) can be an efficient, alternative Plasma source for general surface processing.

• Journal of Ceramic Processing Research
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• 제13권spc1호
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• pp.140-144
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• 2012

Ga-doped ZnO (GZO) was a limit of application on the photovoltaic devices such as CIGS, CdTe and DSSC requiring high process temperature, because it's electrical resistivity is unstable above 300 ℃ at atmosphere. Therefore, ZTO (zinc tin oxide) was introduced in order to improve permeability and thermal stability of GZO film. The resistivity of GZO (300 nm) single layer increased remarkably from 1.8 × 10-3Ωcm to 5.5 × 10-1Ωcm, when GZO was post-annealed at 400 ℃ in air atmosphere. In the case of the ZTO (150 nm)/GZO (150 nm) double layer, resistivity showed relatively small change from 3.1 × 10-3Ωcm (RT) to 1.2 × 10-2Ωcm (400 ℃), which showed good agreement with change of carrier density. This result means that ZTO upper layer act as a barrier for oxygen at high temperature. Also ZTO (150 nm)/GZO (150 nm) double layer showed lower WVTR compared to GZO (300 nm) single layer. Because ZTO has lower WVTR compared to GZO, ZTO thin film acts as a barrier by preventing oxygen and water molecules to penetrate on top of GZO thin film.

• 멤브레인
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• 제27권2호
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• pp.154-166
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• 2017

식품 포장, 전자 기기 등에 활용되고 있는 고분자 기반 기체 차단성 필름은 경량성, 낮은 제조 원가, 높은 가공성으로 인하여 많은 주목을 받고 있다. 특히 전자기기에 활용되기 위하여, 기체 차단 필름은 매우 높은 수준의 기체 차단성을 요구받고 있다. 하지만 현재 수준의 고분자 기반 기체 차단 필름은 다른 소재와 비교하여 상대적으로 높은 수준의 기체 투과유량을 보이고 있다. 따라서 기존의 고분자 필름이 가지고 있는 장점을 유지하면서 더 높은 수준의 기체 차단성을 부여하기 위한 요구가 증대되고 있다. 최근 그래핀 소재는 기체 차단을 위한 2차원 소재로서 각광받고 있다. 그러나 그래핀 소재의 낮은 가공성과 어려운 대면적화 문제 때문에 산화그래핀이 그 대안으로서 떠오르고 있다. 산화그래핀은 높은 종횡비를 가지는 2차원 층상구조의 그래핀에 산소관능기를 함유한 형태로서, 수용성 혹은 극성 용매에 잘 분산되는 성질을 가지며, 따라서 대량 생산에 용이한 특성을 가지고 있다. 본 연구에서는, 산화그래핀이 함유된 폴리이미드 나노복합막을 제조하였다. 폴리이미드는 현재 널리 이용되고 있는 기체 차단성 고분자 중의 하나로서 높은 기계적 강도, 열적 안정성 및 내화학성을 가지고 있다. 본 연구를 통하여 산화그래핀이 함유된 폴리이미드 나노복합막이 기체 차단성을 가지고 있음을 확인하였다. 더 나아가, Triton X-100이나 sodium deoxycholate (SDC) 등의 계면활성제를 나노복합막에 도입함으로써 산화그래핀의 고분자 매트릭스 내에서의 분산성을 향상시켜 기체 차단성을 높이고자 하였다. 그 결과로서, Triton X-100이 도입된 나노복합막이 예상치와 유사한, 향상된 기체 차단성을 보임을 확인하였다. 본 연구를 기반으로 고분자 기반 나노복합막의 기체 차단성 분야로의 활용성이 증대될 것으로 기대한다.

• 한국재료학회지
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• 제18권12호
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• pp.673-677
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• 2008

Calcia (CaO) stabilized cubic-$HfO_2$ is studied by density functional theory (DFT) with generalized gradient approximation (GGA). When a Ca atom is substituted for a Hf atom, an oxygen vacancy is produced to satisfy the charge neutrality. The lattice parameter of a $2{\times}2{\times}2$ cubic $HfO_2$ supercell then increases by $0.02\;{\AA}$. The oxygen atoms closest to the oxygen vacancy are attracted to the vacancy as the vacancy is positive compared to the oxygen ion. When the oxygen vacancy is located at the site closest to the Ca atom, the total energy of $HfO_2$ reaches its minimum. The energy barriers for the migration of the oxygen vacancy were calculated. The energy barriers between the first and the second nearest sites, the second and the third nearest sites, and the third and fourth nearest sites are 0.2, 0.5, and 0.24 eV, respectively. The oxygen vacancies at the third and fourth nearest sites relative to the Ca atom represent the oxygen vacancies in undoped $HfO_2$. Therefore, the energy barrier for oxygen migration in the $HfO_2$ gate dielectric is 0.24 eV, which can explain the origin of gate dielectric leakage.