• 제목/요약/키워드: oxidation barrier

검색결과 202건 처리시간 0.03초

Fabrication of Alumina Membrane Using Anodic Oxidation Process (양극산화를 이용한 알루미나 나노세공 멤브레인의 제조)

  • Im, W.S.;Cho, K.C.;Cho, Y.S.;Choi, G.S.;Kim, D.J.
    • Korean Journal of Materials Research
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    • 제13권9호
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    • pp.593-597
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    • 2003
  • Anodic aluminum oxide (AAO) membrane was made of aluminum sheet (99.6%, 0.2 mm thickness). The regular array of hexagonal nano pores or channels were prepared by two step anodization process. A detail description of the AAO fabrication is presented. After the 1st anodization in oxalic acid (0.3 M) at 45 V, The formed AAO was removed by etching in a solution of 6 wt% $H_3$$PO_4$+1.8 wt% $H_2$$CrO_4$. The regular arrangement of the pores was obtained by the 2nd anodization, which was carried out in the same condition as the 1st anodization. Subsequently, the alumina barrier layer at the bottom of the channel layer was removed in phosphoric acid (1M) after removing of aluminum. Pore diameter, density, and thickness could be controlled by the anodization process parameters such as applied voltage, anodizing time, pore widening time, etc. The pore diameter is proportional to the applied voltage and pore widening time. The pore density and thickness can be controlled by anodization temperature and voltage.

Measurement and Verification of Thermal Conductivity of Multilayer Thin Dielectric Film via Differential 3$\omega$ Method (차등 3$\omega$ 기법을 이용한 다층 유전체 박막의 열전도도 측정 및 검증)

  • Shin Sang-Woo;Cho Han-Na;Cho Hyung-Hee
    • 정보저장시스템학회:학술대회논문집
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    • 정보저장시스템학회 2005년도 추계학술대회 논문집
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    • pp.254-259
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    • 2005
  • In this study, measurement of thermal conductivity of multilayer thin dielectric film has been conducted via differential 3$\omega$ method. Also, verification of differential 3$\omega$ method has been accomplished with various proposed criteria. The target film for measurement is 300 nm silicon dioxide and this thin film is covered with various thicknesses of upper protective layer. The upper protective layer is inserted between the target film and the heater line for purpose of electrical insulator or anti-oxidation barrier since the target film may be a good electrical conductor or a well-oxidizing material. However, the verification of differential 3$\omega$ method has not been conducted. Thus we have shown that the measurement of thermal conductivity of thin films with upper protective layer via differential 3$\omega$ method is verified to be reliable as long as the proposed preconditions are satisfied. Experimental results show that the experimental errors tend to increase with aspect ratio between upper protective layer thickness and width of the heater line due to heat spreading effect.

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Stabilization of Tyrosinase for Catechol Production (Catechol생산을 위한 Tyrosinase의 안정화)

  • 박종현;김용환유영제이윤식
    • KSBB Journal
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    • 제9권5호
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    • pp.525-531
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    • 1994
  • Tyrosinase has two types of enzymatic activities, cresolase catalyzing the hydroxylation of monophenol and catecholase catalyzing the oxidation of o-phenol. Gradual inactivation of the enzyme during the reaction is a barrier to be overcome for the commercial application of the enzyme. Tyrosinase was stabilized by modifying the lysine residue of the enzyme using glutaraldehyde. In addition to that, tyrosinase was also stabilized by adapting the continuous reactor system. In packed bed reactor quinone could be easily removed, so the stability of tyrosinase increased. Borate buffer retarded the reaction rate of catechol to quinone and consequently decreased the tyroslnase inactivation. Tyrosinase immobilizer on controlled pore glass showed significantly enhanced stability in a packed-bed reactor.

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The Optical Properties of Si3N4/SnZnO/AZO/Ag/Ti/ITO Multi-layer Thin Films with Laminating Times (Si3N4/SnZnO/AZO/Ag/Ti/ITO 다층 박막의 적층 횟수에 따른 광학적 특성)

  • Lee, Sang-Yun;Jang, Gun-Eik
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • 제28권1호
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    • pp.7-11
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    • 2015
  • In this study, $Si_3N_4$/SnZnO/AZO/Ag/Ti/ITO multi-layer film were prepared on glass substrate by DC/RF magnetron sputtering method. To prevent interfacial reaction between Ag and ITO layer, Ti buffer layer was inserted. Optical properties and sheet resistance were studied depending on laminating times of each multi-layered film especially in visible ray. The simulation program, EMP (essential macleod program), was adopted and compared with experimental data to expect the experimental result. It was found out that the transmittance of the first stacked $Si_3N_4$/SnZnO/AZO/Ag/Ti/ITO multi-layer film was more than 90%. However, with increasing stacking times, the optical properties of $Si_3N_4$/SnZnO/AZO/Ag/Ti/ITO multi-layer film get worse. Consequently, Ti layer is good for oxidation barrier, but too many uses of this layer may have an adverse effect to optical properties of TCO film.

Physicochemical Characteristics Based on Hydrothermal Aging of Prepared DOC

  • Seo, Choong-Kil
    • Journal of Power System Engineering
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    • 제17권5호
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    • pp.13-22
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    • 2013
  • This paper reports the investigation of the physical and chemical characteristics of the prepared 3Pt-2MgO-$3ZrO_2$-$2CeO_2/Al_2O_3$ DOC, based on its hydrothermal aging. As a result of impregnating and reducing the $H_2PtCl_6$ $6H_2O$ precursor on a ${\gamma}-Al_2O_3$ basis, it was well dispersed into small particles with the range 2-3nm. This was because the $Al_2O_3$ acted as a barrier to prevent movement of the catalyst particles. For a hydrothermally aged catalyst for 9h at $700^{\circ}C$, its performance when purifying harmful gases decreased compared to a fresh catalyst, but its specific surface area was at the same level. This was because the performance of the catalyst was reduced by the sintering of the precious metal Pt, rather than by washcoat sintering and pore clogging. For an excessively hydrothermally aged catalyst for 9h at $850^{\circ}C$, Pt grew into an approximately 50nm class, formed a cluster compared to a fresh catalyst. The $CeO_2$ promoters also formed clusters among components of the same type, reducing their specific surface area to $114m^2/g$, which was 14% less than a fresh catalyst.

Influence of Wax Molecular Weights on Wax Migration and Evaporation of Rubber Vulcanizates at Room Temperature (상온 노화 후 고무가황물에서 왁스의 이동과 증발에 미치는 왁스의 분자량 분포)

  • Im, Song-Hee;Choi, Sung-Seen
    • Elastomers and Composites
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    • 제44권4호
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    • pp.397-400
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    • 2009
  • Ozone caused the crack on the surface of a rubber article by oxidation of double bond at room temperature. Wax migrates to the surface of a rubber article and makes a physical barrier to prevent process of ozonation. We investigated change of molecular weight distribution of waxes in unfilled NR, SBR, and BR vulcanizates before and after aging at room temperature for 6 months. Migration and evaporation behaviors of wax in a rubber article at ambient conditions help understand a role of wax as an antidegradant and appearance contamination of a rubber article. The relative intensity distribution of n-alkanes of the NR specimen after the aging was shifted to higher molecular weight compared with the relative intensity distribution before the aging, while those of the SBR specimen before and after the aging did not show a big difference.

Change of Hydroponic Components by Plasma Treatment (플라즈마 처리에 의한 양액 성분 변화)

  • Kim, Dong-Seog;Park, Young-Seek
    • Journal of Environmental Science International
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    • 제21권3호
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    • pp.363-368
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    • 2012
  • The influence of plasma discharge on the nutrient components ($NO_3$-N, $NH_4$-N, $PO_4$-P, K, Ca, and Mg) and water quality [pH, ORP (oxidation-reduction potential) and electric conductivity] of hydroponic water were investigated. It was observed that the $NH_4$-N, $PO_4$-P, K, Ca, and Mg were kept at the constant concentrations for plasma discharging of 90 min. On the other hand, $NO_3$-N concentration was increased with proceeding of the plasma discharge. The increase of $NO_3$-N concentration was considered with the fact that nitric acid was created from nitrogen among supplying air for the insulation of inside of dielectric barrier. ORP and electric conductivity was increased with plasma discharging time. However, pH was decrease with what because of the generation of the nitric acid. When adjusting the hydroponic ingredients, pH and conductivity must to be considered because of the change of pH and conductivitiy with the discharging.

Effects of Heterostructure Electrodes on the Reliability of Ferroelectric PZT Thin Films

  • Kim, Seung-Hyun;Woo, Hyun-Jung;Koo, Chang-Young;Yang, Jeong-Seung;Ha, Su-Min;Park, Dong-Yeon;Lee, Dong-Su;Ha, Jo-Woong
    • Journal of the Korean Ceramic Society
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    • 제39권4호
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    • pp.341-345
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    • 2002
  • The effect of the Pt electrode and the $Pt-IrO_2$ hybrid electrode on the performance of ferroelectric device was investigated. The modified Pt thin films with non-columnar structure significantly reduced the oxidation of TiN diffusion barrier layer, which rendered it possible to incorporate the simple stacked structure of Pt/TiN/poly-Si plug. When a $Pt-IrO_2$ hybrid electrode is applied, PZT thin film properties are influenced by the thickness and the partial coverage of the electrode layers. The optimized $Pt-IrO_2$ hybrid electrode significantly enhanced the fatigue properties with minimal leakage current.

Treatment of Red Tide in Ocean Using Hydroxyl Radical

  • Zhitao Zhang;Mindong Bai;Xiyao Bai;Xue, Xiao-Hong
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 한국해양정보통신학회 2004년도 SMICS 2004 International Symposium on Maritime and Communication Sciences
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    • pp.38-42
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    • 2004
  • A pilot-scale experiment for the treatment of red tide in the enclosure was done in sea area of Shandong Province, P. R. China on Aug. 25, 2002. With the method of strong dielectric barrier discharge in microgap, $O_2$in air and $H_2O$ in seawater are ionized and dissociated into large numbers of OHㆍradicals, and then dissolved into a part of seawater to form OHㆍsolution of high concentration. With OH' concentration of 0.68mg/L, the kill efficiencies of 29 kinds of red tide organisms such as Chaetoceros lorenzianus and so on reached 99.89%, in which the kill efficiencies of bacterium and vibrio were 100%, and that of Gonyaulax cysts and Prei. Cysts were up to 100%. At the same time, the content of chlorophyll-a was decreased into the lowest limit of test. DO saturation of seawater was greatly increased to 100% because the residual OHㆍradical was decomposed into $H_2O$ and $O_2$after 20 minutes, Therefore the treatment of red tide using OHㆍradicals is a kind of advanced oxidation technology, which realizes zero pollution, zero emission and zero residual in the process of the production of OHㆍradicals and the treatment of red tide.

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Effect of chemical in post Ru CMP Cleaning solutions on abrasive particle adhesion and removal (Post Ru CMP Cleaning에서 연마입자의 흡착과 제거에 대한 chemical의 첨가제에 따른 영향)

  • Kim, In-Kwon;Kim, Tae-Gon;Cho, Byung-Gwun;Son, Il-Ryong;Park, Jin-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.529-529
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    • 2007
  • Ruthenium (Ru) is a white metal and belongs to platinum group which is very stable chemically and has a high work function. It has been widely studied to apply Ru as an electrode material in memory devices and a Cu diffusion barrier metal for Cu interconnection due to good electrical conductivity and adhesion property to Cu layer. To planarize deposited Ru layer, chemical mechanical planarization(CMP) was suggested. However, abrasive particle can induce particle contamination on the Ru layer surface during CMP process. In this study, zeta potentials of Ru and interaction force of alumina particles with Ru substrate were measured as a function of pH. The etch rate and oxidation behavior were measured as a function of chemical concentration of several organic acids and other acidic and alkaline chemicals. PRE (particle removal efficiency) was also evaluated in cleaning chemical.

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