• Journal of the Korean Vacuum Society
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• v.8 no.1
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• pp.13-19
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• 1999

Total reflection X-ray fluorescence spectroscopy using synchrotron radiation source called as TRSFA was explored to achieve high sensitivities to impurity metals on Si wafer surface. It consists of monochromating part to select a specific wavelength, slit part to shield direct beam and to control monochromated beam, and main chamber to dectect fluorescent X-ray counts of impurities on si wafer. Monochromated X-ray of 10.90 KeV was selected and the optimum total reflection condition on silicon wafer was obtained through tuning the dead time and fluorescent X-ray count of Si and Fe. TRSFA system could increase the sensitivity as high as 50 times in comparision with TRXFA using normal X-ray source. But the trend was varied since the surface conditions of Si wafers and, therefore, the reflectivities were different. Furthemore, there seems to be a promising path to reaching a detection limit useful to the next generation metal impurities control, because Fe impurity below to the $5\times10^{9}\textrm{atomas/cm}^2$ can be detectable through the developed TRSFA system.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.22 no.2
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• pp.162-172
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• 2011

In this paper, a design and fabrication of 4 W power amplifier for the WiMAX frequency band(2.3~2.7 GHz) are presented. The adopted active device is a commercially available GaN HEMT chip of Triquint Company, which is recently released. The optimum input and output impedances are extracted for power amplifier design using a specially self-designed tuning jig. Using the adopted impedances value, class-F power amplifier was designed based on EM simulation. For integration and matching in the small package module, spiral inductors and interdigital capacitors are used. The fabricated power amplifier with $4.4{\times}4.4\;mm^2$ shows the efficiency above 50 % and harmonic suppression above 40 dBc for second(2nd) and third(3rd) harmonic at the output power of 36 dBm.

• Journal of IKEEE
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• v.7 no.2 s.13
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• pp.223-229
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• 2003

In this thesis, the characteristics of an inverted-F antenna for the 2.4GHz and 5.8GHz zwirless local area network(WLAN) have been analysed in terms of the variation of design parameters. The antenna can be integrated on WLAN for notebook printed circuit board, and the characteristics in terms of the variation of the gap between feed line and shorting stub, gap between antenna's leg and ground plane, antenna leg's width, substrate's height and dielectric constant are analysed. By using these characterization plot of design parameter, the tuning techniques are proposed to design optimum antenna. The designed antenna has 170MHz, 500MHz frequency bandwidth ,VSWR is 1.6, 1.14 and 3.5dBi gain.

• Industrial Engineering and Management Systems
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• v.4 no.1
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• pp.54-67
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• 2005

This paper provides an evaluation of an optimization-based, multiple-input double-output (MIDO) run-to-run (R2R) control scheme for general semiconductor manufacturing processes. The controller in this research, termed adaptive dual response optimizing controller (ADROC), can serve as a process optimizer as well as a recipe regulator between consecutive runs of wafer fabrication. In evaluation, it is assumed that the equipment model could be appropriately described by a pair of second-order polynomial functions in terms of a set of controllable variables. Of practical relevance is to consider a drifting effect in the equipment model since in common semiconductor practice the process tends to drift due to machine aging and tool wearing. We select a typical application of R2R control to chemical mechanical planarization (CMP) in semiconductor manufacturing in this evaluation, and there are five different CMP process scenarios demonstrated, including mean shift, variance increase, and IMA disturbances. For the controller, ADROC, an on-line estimation technique is implemented in a self-tuning (ST) control manner for the adaptation purpose. Subsequently, an ad hoc global optimization algorithm based on the dual response approach, arising from the response surface methodology (RSM) literature, is used to seek the optimum recipe within the acceptability region for the execution of next run. The main components of ADROC are described and its control performance is assessed. It reveals from the evaluation that ADROC can provide excellent control actions for the MIDO R2R situations even though the process exhibits complicated, nonlinear interaction effects between control variables, and the drifting disturbances.

• Journal of Advanced Navigation Technology
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• v.17 no.6
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• pp.646-651
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• 2013

In this paper, a small inverted-F antenna with adjustable characteristics is proposed with use of lumped elements, capacitor and resistor. Capacitor is inserted between end of the antenna and ground for size reduction and tuning of resonant frequency. On the other hand, $0{\Omega}$ resistor is replaced as the short line connected to ground. The movement of short point due to use of $0{\Omega}$ resistor results in providing variation of input impedance. Therefore optimum characteristics can be obtained only by proper choice of capacitor and short point without redesign of it's geometry. In order to check the validity, the proposed antenna is designed and fabricated for 2.4 GHz frequency band, and then is applied to a product of Zigbee wireless remote controller. As a result, the size of applied antenna is $8.5{\times}4.5mm^2$ and it is observed that the measured bandwidth and antenna gain are 150 MHz and 2 dBi respectively without redesign of the antenna.

• Journal of Drive and Control
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• v.12 no.3
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• pp.52-59
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• 2015

An electro hydraulic poppet valve (EHPV) and a variable orifice poppet are assembled in a single block, which is referred to as a RHINO but is also generally called a pilot-operated flow control valve. In this study, we analyzed the structure and the operating principle for a RHINO applied in a 21-ton electric excavator system. The RHINO was experimentally tested to measure the dynamic responses and the pressure energy loss. In this test, we investigated the variation in the conductance coefficient according to the increase in the supply pressure under a constant current and a variation in the flow rate according to the increase in the current. Then, the geometrical shapes and the spring stiffness of the RHINO were considered to develop an analysis model. The characteristics (current-force and hysteresis) for the solenoid based on the experimental data were reflected in the analysis model that was developed, and the reliability of the analysis model was also verified by comparing the experimental and analytical results. The developed model is thus considered to be reliable for use in a wide range of applications, including optimum design, sensitivity analysis, parameter tuning, etc.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.22 no.12
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• pp.1069-1077
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• 2011

In this paper, a design and fabrication of a miniaturized 2.5 GHz 8 W power amplifier using selectively anodized aluminum oxide(SAAO) substrate are presented. The process of SAAO substrate is recently proposed and patented by Wavenics Inc. which uses aluminum as wafer. The selected active device is a commercially available GaN HEMT chip of TriQuint company, which is recently released. The optimum impedances for power amplifier design were extracted using the custom tuning jig composed of tunable passive components. The class-F power amplifier are designed based on EM co-simulation of impedance matching circuit. The matching circuit is realized in SAAO substrate. For integration and matching in the small package module, spiral inductors and single layer capacitors are used. The fabricated power amplifier with $4.4{\times}4.4\;mm^2$ shows the efficiency above 40 % and harmonic suppression above 30 dBc for the second(2nd) and the third(3rd) harmonic at the output power of 8 W.

• Korean Journal of Radiology
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• v.24 no.4
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• pp.294-304
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• 2023

Objective: We aimed to investigate whether image standardization using deep learning-based computed tomography (CT) image conversion would improve the performance of deep learning-based automated hepatic segmentation across various reconstruction methods. Materials and Methods: We collected contrast-enhanced dual-energy CT of the abdomen that was obtained using various reconstruction methods, including filtered back projection, iterative reconstruction, optimum contrast, and monoenergetic images with 40, 60, and 80 keV. A deep learning based image conversion algorithm was developed to standardize the CT images using 142 CT examinations (128 for training and 14 for tuning). A separate set of 43 CT examinations from 42 patients (mean age, 10.1 years) was used as the test data. A commercial software program (MEDIP PRO v2.0.0.0, MEDICALIP Co. Ltd.) based on 2D U-NET was used to create liver segmentation masks with liver volume. The original 80 keV images were used as the ground truth. We used the paired t-test to compare the segmentation performance in the Dice similarity coefficient (DSC) and difference ratio of the liver volume relative to the ground truth volume before and after image standardization. The concordance correlation coefficient (CCC) was used to assess the agreement between the segmented liver volume and ground-truth volume. Results: The original CT images showed variable and poor segmentation performances. The standardized images achieved significantly higher DSCs for liver segmentation than the original images (DSC [original, 5.40%-91.27%] vs. [standardized, 93.16%-96.74%], all P < 0.001). The difference ratio of liver volume also decreased significantly after image conversion (original, 9.84%-91.37% vs. standardized, 1.99%-4.41%). In all protocols, CCCs improved after image conversion (original, -0.006-0.964 vs. standardized, 0.990-0.998). Conclusion: Deep learning-based CT image standardization can improve the performance of automated hepatic segmentation using CT images reconstructed using various methods. Deep learning-based CT image conversion may have the potential to improve the generalizability of the segmentation network.