• Journal of information and communication convergence engineering
• /
• 제10권3호
• /
• pp.295-299
• /
• 2012

Defect generation during organic bottom anti-reflective coating (BARC) in the photo lithography process is closely related to humidity control in the BARC coating unit. Defects are related to the water component due to the humidity and act as a blocking material for the etching process, resulting in an extreme pattern bridging in the subsequent BARC etching process of the poly etch step. In this paper, the lower limit for the humidity that should be stringently controlled for to prevent defect generation during BARC coating is proposed. Various images of defects are inspected using various inspection tools utilizing optical and electron beams. The mechanism for defect generation only in the specific BARC coating step is analyzed and explained. The BARC defect-induced gate pattern bridging mechanism in the lithography process is also well explained in this paper.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 추계학술대회 논문집
• /
• pp.188-191
• /
• 2005

A common feature in various methods of optical interferometry for absolute distance measurements is the use of multiple monochromatic light components either in sequence or in parallel at the same time. Two or multiple wavelength synthesis has been studied though its performance is vulnerable to the frequency instability of the light source. Recently continuous frequency modulation is considered a promising method with availability of wide band tunable diode lasers, which also have frequency instability errors. We can lock frequencies of these third-party light sources to the modes of the femtosecond laser which is stabilized to the precision of the standard radio frequency. To this end, we have stabilized all the modes of the femtosecond laser to the atomic frequency standard by using powerful tools of frequency-domain laser stabilization.

• 통합자연과학논문집
• /
• 제6권4호
• /
• pp.211-214
• /
• 2013

In this study, in order to investigate how consecutive treatments of glass surface with HF acid and water vapor/Ar plasma affect the quality of 3-aminopropyltriethoxysilane self-assembled monolayer (APS-SAM), poly(3,4-ethylenedioxythiophene) (PEDOT) thin films were vapor phase-polymerized immediately after spin coating of FeCl3 and poly-urethane diol-mixed oxidant solution on the monolayer surfaces prepared at various treatment conditions. For the film characterization, various poweful tools were used, e.g., FE-SEM, an optical microscope, four point probe, and a contact angle analyzer. The characterization revealed that HF treatment is not desirable for the synthesis of a high quality PEDOT thin film via vapor phase polymerization method. Rather, sole treatment with plasma noticeably improved the quality of APS-SAM on glass surface. As a result, a highly dense and smooth PEDOT thin film was grown on uniform oxidant film-coated APS monolayer surface.

• 한국철도학회:학술대회논문집
• /
• 한국철도학회 2008년도 추계학술대회 논문집
• /
• pp.1090-1095
• /
• 2008

Track geometry changes by traffic loads. The bigger the changes are, the worse the riding comfort and running stability of train. This is so-called track irregularity and is the most important quality parameters of ballasted track. To objectively assess track irregularity, track geometry should be able to be measured. Practically, railway companies use moving chord method, which determine versine values via a chord. The versine is the vertical distance to curve measured in the middle of the chord. This type of method measures only versine of track irregularity curve by transfer function from the characteristics of measuring device. In this report, review the characteristics of two types of measuring tools by comparing the measurements. The one is GRP-1000 system, optical surveying system with Total station and lazar prism trolley. This calculates track geometry by surveying absolute coordinates of two points each on both rail heads. The other is EM-120, measures versine with 10m of symmetrical chord length.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2002년도 춘계학술대회 논문집
• /
• pp.46-51
• /
• 2002

A grinding technology is very essential to finish the surface of IT and BT industrial application parts such as wafer, optical connection part and lenses etc. However the finding machine has bead depended on imports. Especially, it is completely imported for machining high precision part relevant to domestic electric and communicational industries. The amount to import grinding machine is about $110milions. It takes about 35% of total import amount of all the machine tools. A domestic finder manufacturer is a very small-scaled bussinessman and research facilities is poor. Recently, it is increasing to demand high speed and precision grinding technology because it brings cost down and value added up. Its further study will be something related to inteligent grinding system fur value added and high precision part. It will make domestic grinding technology to its advanced country level.

• Journal of the Korean Physical Society
• /
• 제80권
• /
• pp.1035-1041
• /
• 2022

Nondestructive nano-characterization methods were reviewed with respect to technical aspect and practicability. Micro-photoluminescence, cathodoluminscence and Raman spectroscopy with mapping modes were investigated as optical characterization tools, while electron backscatter diffraction and piezoresponse force microscopy were introduced as monitoring techniques for the crystallographic and electromechanical properties. Especially, the spatial resolution of the data acquisition and analysis was carefully inspected in the representative semiconducting nanomaterial systems. Some of efforts to overcome the limit of these characterizations were also taken into consideration.

• 한국위성정보통신학회논문지
• /
• 제1권2호
• /
• pp.1-7
• /
• 2006

현재 항공우주연구원은 2008년에 발사 운용 예정인 통신-해양-기상위성의 주요 탑재체들 중의 하나로 한반도 주변 해역의 환경 상태를 정밀 측정하려는 정지궤도 해색센서(GOCI)를 개발하고 있다. 본 논문에서는 해색센서의 궤도상 임무성능 검증을 원할이 수행하기 위해 통합적 광선 추적 기법을 이용한 임무성능 검증 수치모사 모델을 개발 제시한다. 수치모사 모델 내에서 태양은 지구 방향으로 복사에너지를 방사하는 구형 광원으로 입력되었고, 구면인 지구 표면 중 한반도를 중심으로 한 2500km x 2500km 넓이의 곡면 관측 영역은 지표와 해수면으로 구분하여 서로 다른 특성의 람버트 산란 면들로 정의되었다. 수치모사 모델 내에서 해색센서 광학시스템은 태양을 출발하여, 지표 및 해수면의 환경적 특성 변화를 반영하는 반사도의 변화에 따라 산란 후 입사되어오는 광선들의 경로를 추적하여 초점면 광소자에 맺히게 하여준다. 이러한 통합적 광선 추적 기법을 이용하여 개발 중인 해색센서가 궤도상에서 한반도 동남부 연해 상에서 가상적으로 발생된 반사율 감소 0.014에 해당하는 적조현상을 탐지해낼 수 있음을 수치모사 입증하였다. 이 같은 결과는 본 논문에 기술된 통합적 광선 추적 기법을 이용한 과학임무 성능 검증 수치모사 모형은 해색센서 뿐만 아니라, 다른 과학적 측정 목적의 위성 탑재체의 임무성능 검증에도 활용 할 수 있는 기반 기술을 확립하였다는 의의를 제공한다.

• 한국레이저가공학회:학술대회논문집
• /
• 한국레이저가공학회 1998년도 추계학술발표대회 초록개요집
• /
• pp.0-0
• /
• 1998

-Part I- As market needs become more various, the production of smaller quantities of a wider variety of products becomes increasingly important. In addition, in order to meet demands for more efficient production, long-term unmanned factory operation is prevailing at a remarkable pace. Within this context, laser machines are gaining increasing popularity for use in applications such as cutting and welding metallic and ceramic materials. FANUC supplies four models of $CO_2$ laser oscillators with laser power ranging from 1.5㎾ to 6㎾ on an OEM basis to machine tool builders. However, FANUC has been requested to produce laser oscillators that allow more compact and lower-cost laser machines to be built. To meet such demands, FANUC has developed six models of Slab type YAG laser oscillators with output power ranging from 150W to 2㎾. These oscillators are designed mainly fur cutting and welding sheet metals. The oscillator has an exceptionally superior laser beam quality compared to conventional YAG laser oscillators, thus providing significantly improved machining capability. In addition, the laser beam of the oscillator can be efficiently transmitted through quartz optical fibers, enabling laser machines to be simplified and made more compact. This paper introduces the features of FANUC’s developed Slab type YAG laser oscillators and their applications. - Part II - All-solid-state lasers employing laser diodes (LD) as a source of pumping solid-state laser feature high efficiency, compactness, and high reliability. Thus, they are expected to provide a new generation of processing tools in various fields, especially in automobile and aircraft industries where great hopes are being placed on laser welding technology for steel plates and aluminum materials for which a significant growth in demand is expected. Also, in power plants, it is hoped that reliability and safety will be improved by using the laser welding technology. As in the above, the advent of high-power all-solid-state lasers may not only bring a great technological innovation to existing industry, but also create new industry. This is the background for this project, which has set its sights on the development of high-power, all-solid-state lasers with an average output of over 10㎾, an oscillation efficiency of over 20%, and a laser head volume of below 0.05㎥. FANUC Ltd. is responsible for the research and development of slab type lasers, and TOSHIBA Corp. far rod type lasers. By pumping slab type Nd: YAG crystal and by using quasi-continuous wave (QCW) type LD stacks, FANUC has already obtained an average output power of 1.7㎾, an optical conversion efficiency of 42%, and an electro-optical conversion efficiency of 16%. These conversion efficiencies are the best results the world has ever seen in the field of high-power all-solid-state lasers. TOSHIBA Corp. has also obtained an output power of 1.2㎾, an optical conversion efficiency of 30％, and an electro-optical conversion efficiency of 12%, by pumping the rod type Nd: YAG crystal by continuous wave (CW) type LD stacks. The laser power achieved by TOSHIBA Corp. is also a new world record in the field of rod type all-solid-state lasers. This report provides details of the above results and some information on future development plans.

• 대한기계학회논문집A
• /
• 제38권9호
• /
• pp.953-958
• /
• 2014

형상적응형 냉각회로를 구비한 사출금형 및 히트 싱크를 가지는 절삭공구 (혹은 냉각 장치) 등과 같은 많은 응용 분야에서 기능성 경사 복합재(FGM)를 사용하여 필요한 강성을 약화시키지 않으면서 열전도 특성을 향상 시킬 수 있을 것으로 기대된다. 본 논문에서는 M2 공구강과 Cu 간의 FGM 히트 싱크를 가지는 절삭 공구 제작을 위한 기초연구로, M2 와 Cu 를 각각 100:0, 80:20, 60:40, 40:60, 20:80, 0:100 wt% 비율로 사전에 혼합한 금속분말을 분말야금법으로 가압성형 및 소결 제작 하였다. 각 시편의 단면을 광학현미경으로 관찰하여 소결 상태를 분석하였으며, 열전도도, 비열 및 열팽창계수 등 열전달 관련물성을 측정하고 분석하였다.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.30-33
• /
• 2003

In this paper the advantage of web technology applied to Rapid Prototyping is discussed. Two fabrication processes are chosen to be web-enabled. One, a post-process of FDM is developed to provide translucent plastic parts made of medical grade ABS material. The other, a system to fabricate laser machined Light Guide Panel is developed. In order to show the timesaving characteristics of the web-based tools, two websites are implemented (http://nano.gsnu.ac.kr/fdm ＆ http://nano.gsnu.ac.kr/laser). The 3-tier architecture is applied for the Internet communication between designers and manufacturing sites, The integrated design tools and physical manufacturing processes enable designers to submit a new design and to receive the fabricated parts in an expedited manner. Example parts are fabricated using the web-based system to prove the concept of the web-based design and Rapid Prototyping.