• Journal of the Optical Society of Korea
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• 제19권1호
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• pp.63-68
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• 2015

A one-step fabrication of a photonic crystal (PC) with functional defects is demonstrated. Using multi-beam phase-controlled holographic lithography with a diffracting optical element, large area one dimensional (1D) and two dimensional (2D) PCs with periodic defects were fabricated. The uniform area is up to $2mm^2$, and tens of defect channels have been introduced in the 1D and 2D PC structure. This technique gives rise to substantial reduction in the fabrication complexity and significant improvement in the spatial accuracy of introducing functional defects in photonic crystals. This method can also be used to design and fabricate three dimensional (3D) PCs with periodic defects.

• 대한전자공학회논문지SD
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• 제37권4호
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• pp.38-44
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• 2000

본 논문에서는 리튬나오베이트 기판 상에 벤젠산으로 양자 교환 후 습식 식각하는 방법을 이용하여 청색레이저 다이오드를 광원으로 사용하고자 하는 광 픽업을 위한 λ/2 파장판을 제작하였으며 소자의 기능과 제작과정에 대해서 상세히 서술하였다. 그리고, 소자제작을 위한 최적의 조건을 실험을 통하여 확립하였다. 제작된 소자의 위상 특성은 광학계로 마하젠더 간섭계를 구성하여 파장이 632.8nm인 헬륨-네온 레이저로 측정하였다. 측정 결과 위상오차는 ＋5°∼6°(3% 이내)로 측정되었다. 본 연구에서 제작한 파장판은 청색 레이저 다이오드를 광원으로 사용하는 광 픽업 시스템의 해상도와 안정도를 향상시키는 유용한 소자로 응용될수 있다.

• 한국정밀공학회지
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• 제19권11호
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• pp.211-220
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• 2002

Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. A coupled simulation of gas flow and structural displacement of the micro mirror using the Finite-Element-Method is applied to this. The mirror was fabricated by using MEMS technology. Especially, the process using the lapping and polishing step after the bonding of the mirror and electrode plates was employed for the Process reliability. The mirror size was 2.5mm${\times}$3mm and it needed about 35V for displacement of 3.2 ${\mu}$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.1050-1053
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• 2002

This paper presents metal structure that is fabricated using UV-LIGA process with PMER N-CA3000. In order to fabricate metal structure with high aspect ratio, the systematic optimization method was adopted and then the structure of $36{\mu}m$ thick mold with aspect ratio 7:1 (trench) and $32{\mu}m$ thick nickel structure was obtained. This structure is applied to the fabrication of optical switch.

• 전자공학회논문지A
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• 제32A권1호
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• pp.159-165
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• 1995

A double-heterostructure mesa-stripe-geometry laser diode integrated with thermoelectric Peltier cooler has been designed and fabricated. Epi-layers have been grown by metal organic chemical vapor deposition(MOCVD) method. Peltier cooling effect has been measured for devices with a mesa width of 14$\mu$m and a cavity length of 380$\mu$m. The effects of thermoelectric cooling could be shown by measuring the optical output of the laser with the increase of the current in the thermoelectric cooler. While the input courrent of the laser was maintained at 250mA, the optical output was decreased from 4.8mW to 3.8mW due to heating, but with the thermoelectric cooler on the optical output power was recovered by more than 40%. The results show that the complicated cooling device is not needed since the cooling can be achevied by the developement of the fabrication processing.

• 천문학회보
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• 제42권1호
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• pp.57.3-58
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• 2017

Single Point Diamond Turning (SPDT) is a cost-effective technique to fabricate metallic mirrors. In particular, the servo-assisted diamond turning option is highly useful for the fabrication of freeform surfaces. However, the SPDT process leaves periodic tool marks on machined mirror surfaces, leading to undesirable diffraction effect, as well as the deviation of input beam. In order to solve this problem, we propose new SPDT machining conditions to minimize tool marks. We will also show the results from optical measurement and Power Spectral Density (PSD) analysis to evaluate the expectable performance for applications in wide field infrared telescopes.

• JSTS:Journal of Semiconductor Technology and Science
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• 제6권2호
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• pp.119-123
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• 2006

This work presents the fabrication and characteristics of $Bi_2O_3/Si$ heterojunction prepared by rapid thermal oxidation technique without any postdeposition annealing condition. The bismuth trioxide film was deposited onto monocrystalline Si and glass substrates by rapid thermal oxidation of bismuth film with aid of halogen lamp at $500^{\circ}C/\;45$ s in static air. The structural, optical and electrical properties of $Bi_2O_3$ film were investigated and compared with other published results. The structural investigation showed that the grown films are polycrystalline and multiphase (${\alpha}-Bi_2O_3$ and ${\beta}-Bi_2O_3$). Optical properties revealed that these films having direct optical band gap of 2.55 eV at 300 K with high transparency in visible and NIR regions. Dark and illuminated I-V, CV, and spectral responsivity of $Bi_2O_3/Si$ heterojunction were investigated and discussed.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권5호
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• pp.249-252
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• 2001

The paper represents the design and fabrication of an electrostatic micro actuator with $p^+$,/TEX> Si cantilevers. The micro actuator consists of a plate suspended by four $p^+$,/TEX> silicon cantilevers and an electrode on a glass substrate. The $p^+$,/TEX> Si structure is fabricated by the boron diffusion process and the anisotropic wet etch process. The cantilevers of the micro actuator curl down because of the residual stress gradient in $p^+$,/TEX> silicon. When the electrostatic forec is applied to the $p^+$,/TEX> cantilevers, the vertical displacement of the plate can be achieved. The deflection of the cantilever due to the residual stress gradient and the vertical displacement by electrostatic force were calculated. The displacement of the plate was measured with a laser displacement meter for various input voltages and frequencies. The feasibility of the proposed micro actuator for the applications to optical pickup devices or optical communication devices was confirmed by the experiments.

• 한국기계가공학회지
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• 제20권10호
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• pp.38-43
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• 2021

Photocurable hydrogels are widely used as 3D printing materials in tissue engineering (e.g., scaffold fabrication) as well as optical fibers (or optical sensors) materials. Photocurable hydrogels can control optical and mechanical properties such as chemical or fabrication conditions. In previous research, we introduced a new 3D printing method to fabricate a freestanding overhanging hydrogel structure without supporting structure. This study was measured and analyzed the difference of the mechanical properties of the photocurable hydrogel according to the light intensity using a micro tensile tester. In practically, it was difficult to perform a direct tensile test on a micro (less than 1 mm) size fiber. In this study, the tensile test of the hydrogel fibers could be measured simply and repeatedly using a paper carrier.

• 한국광학회지
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• 제17권4호
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• pp.354-358
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• 2006

적층으로 구성되는 초소형 전자렌즈의 실리콘 렌즈와 절연체인 파이렉스는 접합과 정렬을 동시에 수행하여야 한다. 이를 위한 방법으로 회절을 이용한 정렬과 레이저 접합을 이용하였으며, source 렌즈와 Einzel 렌즈의 정렬오차는 가장 큰 개구를 기준으로 최대 $\pm$4% 이내에서 이루어졌다. 정렬 조건과 레이저 접합 조건을 제시하였으며, 접합을 견고히 하기 위한 양극 접합 방식을 기술하였다. 전류영상화를 통해 선폭이 9 $\mu$m인 Cu grid를 시험한 결과 완성된 전자렌즈는 감속모드보다 가속모드에서 분해능이 좋았으며, 작은 개구를 가진 렌즈의 정밀한 정렬과 조합으로 높은 분해능을 믿을 수 있었다.