Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.07b
- /
- Pages.1050-1053
- /
- 2002
Fabrication of high aspect ratio metallic structures for optical devices using UV-LIGA Process
광소자 응용을 위한 UV-LIGA 공정 기반의 MEMS 소자 제작
Abstract
This paper presents metal structure that is fabricated using UV-LIGA process with PMER N-CA3000. In order to fabricate metal structure with high aspect ratio, the systematic optimization method was adopted and then the structure of