• Journal of Sensor Science and Technology
• /
• v.24 no.1
• /
• pp.10-14
• /
• 2015

This paper reports the results of a study on the optimization of the etching profile, which is an important factor in deep-reactive-ion etching (DRIE), i.e., dry etching. Dry etching is the key processing step necessary for the development of the Internet of Things (IoT) and various microelectromechanical sensors (MEMS). Large-area etching (open area > 20%) under a high-frequency (HF) condition with nonoptimized processing parameters results in damage to the etched sidewall. Therefore, in this study, optimization was performed under a low-frequency (LF) condition. The HF method, which is typically used for through-silicon via (TSV) technology, applies a high etch rate and cannot be easily adapted to processes sensitive to sidewall damage. The optimal etching profile was determined by controlling various parameters for the DRIE of a large Si wafer area (open area > 20%). The optimal processing condition was derived after establishing the correlations of etch rate, uniformity, and sidewall damage on a 6-in Si wafer to the parameters of coil power, run pressure, platen power for passivation etching, and $SF_6$ gas flow rate. The processing-parameter-dependent results of the experiments performed for optimization of the etching profile in terms of etch rate, uniformity, and sidewall damage in the case of large Si area etching can be summarized as follows. When LF is applied, the platen power, coil power, and $SF_6$ should be low, whereas the run pressure has little effect on the etching performance. Under the optimal LF condition of 380 Hz, the platen power, coil power, and $SF_6$ were set at 115W, 3500W, and 700 sccm, respectively. In addition, the aforementioned standard recipe was applied as follows: run pressure of 4 Pa, $C_4F_8$ content of 400 sccm, and a gas exchange interval of $SF_6/C_4F_8=2s/3s$.

• International Journal of Automotive Technology
• /
• v.6 no.4
• /
• pp.367-374
• /
• 2005

This paper proposes a sound quality index to evaluate the vehicle interior noise. The index was developed using a correlation analysis of an objective measurement and a subjective evaluation data. First, the objective set of measurements was obtained at two specified driving conditions. One is from a wide-open test condition and the other is from a constant-speed test condition. At the same time, subjective evaluation was carried out using a score of ten scale where 17 test engineers participated in the experiment. The correlation analysis between the psycho-acoustic parameters derived from the objective measurement and the subjective evaluation was performed. The most critical factors at both test conditions were determined, and the corresponding equations for the sound quality were obtained from the multiple factor regression method. Finally, a comparative work between previous index and present index was performed to validate the effectiveness of the proposed index.

• Journal of the korean society of oceanography
• /
• v.33 no.4
• /
• pp.212-218
• /
• 1998

Three different outflow boundary conditions are considered in modeling the East Sea circulation. The first one is that of the conventional constant volume transport (CT). The second one is the Orlanski radiation boundary condition (OR). The third one is that of the constant sea level just outside the outflow boundary (SL). In the third condition, the outflow current is set to be driven by the sea level differences across the outflow open-boundary lines, based on the recent knowledge that the Tsushima Current is driven by the sea level differences across the inflow and outflow boundaries. In case of OR it takes too much time to reach the steady state, resulting in a large increase of Tsushima Current Water in the basin and low level of kinetic energy. Both CT and SL reach the steady state in a relatively short time. However, SL is more recommendable, because it is based on physical background and generates less numerical noises than CT.

• Journal of the Korean School Mathematics Society
• /
• v.17 no.1
• /
• pp.73-92
• /
• 2014

This study was performed in part with the task to find measures to improve the defining characteristics of feelings, value, interest, self-efficacy, and others aspects in regards to learning math among elementary and middle school students. For this study, it was essential to understand the appropriate questions that are needed to be asked during a consultation at a math clinic, for students that are having a hard time learning math. As a method for performing this study, the content of scheduled counseling over 2 years from a math clinic were collected and the questions that were given and taken were analyzed in order to figure out the types of questions needed in order to effectively examine students that are facing difficulty with learning math. The analysis was performed using Grounded theory analysis by Strauss & Corbin(1998) and went through the process of open coding, axial coding, and selective coding. For the paradigm in the categorical analysis stage, 'attitude towards learning math' was set as the casual condition, 'feelings towards learning math' was set as the contextual condition, 'confidence in one's ability to learn math' was set as the phenomenon, 'individual tendencies when learning math' was set as the intervening condition, 'self-management of learning math' was set as the action/interaction strategy, and 'method of learning' was set as the consequence. Through this, the questions that appeared during counseling were linked into categories and subcategories. Through this process, 81 concepts were deducted, which were grouped into 31 categories. I believe that this data can be used as grounded theory for standardization of consultation in clinics.

• Tunnel and Underground Space
• /
• v.24 no.1
• /
• pp.11-20
• /
• 2014

This study analyzed the optimal routes of auxiliary vehicles in an open-pit mine that need to traverse the entire mine through many working points. Unlike previous studies which usually used the Dijkstra's algorithm, this study utilized a heuristic algorithm for the Traveling Salesman Problem(TSP). Thus, the optimal routes of auxiliary vehicles could be determined by considering the visiting order of multiple working points. A case study at the Pasir open-pit coal mine, Indonesia was conducted to analyze the travel route of an auxiliary vehicle that monitors the working condition by traversing the entire mine without stopping. As a result, we could know that the heuristic TSP algorithm is more efficient than intuitive judgment in determining the optimal travel route; 20 minutes can be shortened when the auxiliary vehicle traverses the entire mine through 25 working points according to the route determined by the heuristic TSP algorithm. It is expected that the results of this study can be utilized as a basis to set the direction of future research for the system optimization of auxiliary vehicles in open-pit mines.

• Journal of Bio-Environment Control
• /
• v.23 no.3
• /
• pp.256-261
• /
• 2014

This study was carried out to determine the effect of the artificial pollination on fruit set, seed formation and fruit quality in kiwifruit and to confirm the effective pollination time for optimal fruit set in the shelter greenhouse cultivation. Also, the effect of artificial pollination practice by the pollen diluent solution was tested. By artificial pollination, fruit set, seed formation, and fruit quality was improved both in the open field condition and in the shelter greenhouse cultivation. In order to find the effective pollination period (EPP), artificial pollination was carried out every day until 7 days after full bloom. Number of seeds and fruit set rate and fruit growth of kiwifruit were no significantly different until 4 days after full bloom (DAFB), but, those of kiwifruit from 5 DAFB significantly decreased. Consequently, the effective pollination period of kiwifruit in the shelter greenhouse was 4 days after full bloom. Also, artificial pollination by the pollen diluent solution was showed the similar fruit set and fruit quality compare to that by lycopodium powder. Accordingly, artificial pollination by the pollen diluent solution should be very effective practice for labor saving in kiwifruit cultivation.

• Journal of the Society of Disaster Information
• /
• v.16 no.4
• /
• pp.627-637
• /
• 2020

Purpose: This experimental study was conducted to find out whether a water-mist fire suppression system can be applied to C.E.P., a representative combustible material of a rack storage. Method: First, it was confirmed whether the water-mist fire-extinguishing system used in this experiment was capable of extinguishing oil fires. After that, the C.E.P. boxes were loaded in the same small space as used in the oil fire experiment, and then the experiment was conducted on three scenarios; door opening, door closing, and door closing and increasing the internal load. The scenario was set considering the opening and space size conditions, which are important factors for the water-mist fire suppression. Result: Oil fire suppression tests have shown that fires are well extinguished in both the door open and closed conditions. In case of a fire of C.E.P. boxes in the same space condition as an oil fire, the fire was not extinguished in the door open condition. Fires were extinguished in the case with the door closed condition, but the afterglow was confirmed. Conclusion: In the oil fire suppression test, a water-mist fire suppression system extinguished a fire in both the door open and closed conditions. However, for the C.E.P fire, it was possible to extinguish only under the door closed condition, and there was a possibility of re-ignition.

• Journal of the Korean Society of Propulsion Engineers
• /
• v.23 no.1
• /
• pp.33-45
• /
• 2019

In this study, numerical simulations were performed to investigate the steady-state characteristics of a symmetric pintle nozzle by varying the position of the pintle and the altitude. The pintle nozzle shape was used in a linear pintle nozzle that had been analyzed prior to the study, and the boundary conditions of the chamber were considered to be according to the propellant burn-back characteristics. A software was used to perform a verification analysis of the square nozzle, pintle nozzle, and high-altitude conditions with an appropriate analytical technique. The pintle position had three different nozzle throat area conditions-: fully closed, half open, and fully open, and the altitude was set at 0, 5, and 20 km. The study compared the thrust, pintle drive load, and static stability at each condition.

• Journal of Korean Society of Water and Wastewater
• /
• v.25 no.6
• /
• pp.869-875
• /
• 2011

Ministry of Environment has been promoting BTL business of the sewer rehabilitation which continues from 2005 up to now. Sewer rehabilitation is classified into three parts : wastewater pipe rehabilitation, rainwater pipe rehabilitation and drainage equipment rehabilitation. Drainage equipment rehabilitation is that drainage pipe connects wastewater pipe directly without water-purifier. In the drainage equipment construction, it is inevitable to have the damage of ground structures(wall, gate and U drain, etc) when an open excavation method is used. Therefore it is necessary to develop non-excavation method to connect drainage pipe and wastewater pipe like jacking method to avoid the damage of ground structure. This paper has conducted an analysis of the non-excavation method using a boring machine attached to backhoe, which is issued the verification certificate of environmental technology according to the Development of and Support for Environmental Technology Act, article.7. The index set in this analysis was sectionalized to the condition of construction, the grade of drainage pipe, the size of excavated hole, the amount of waste cement concrete and asphalt concrete and the benefit effect compared to open excavation method.

• Steel and Composite Structures
• /
• v.7 no.1
• /
• pp.53-70
• /
• 2007

This paper presents a analysis of the problem of optimal design of the beams with two I-type cross section shapes. These types of beams are simply supported and subject to pure bending. The strength and stability conditions were formulated and analytically solved in the form of mathematical equations. Both global and selected types of local stability forms were taken into account. The optimization problem was defined as bicriteria. The cross section area of the beam is the first objective function, while the deflection of the beam is the second. The geometric parameters of cross section were selected as the design variables. The set of constraints includes global and local stability conditions, the strength condition, and technological and constructional requirements in the form of geometric relations. The optimization problem was formulated and solved with the help of the Pareto concept of optimality. During the numerical calculations a set of optimal compromise solutions was generated. The numerical procedures include discrete and continuous sets of the design variables. Results of numerical analysis are presented in the form of tables, cross section outlines and diagrams. Results are discussed at the end of the work. These results may be useful for designers in optimal designing of thin-walled beams, increasing information required in the decision-making procedure.