• 한국세라믹학회지
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• 제54권1호
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• pp.38-42
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• 2017

Vanadium nitride (VN) coatings were deposited using inductively coupled plasma (ICP) assisted sputtering at different ICP powers. Microstructural, crystallographic and mechanical characterizations were performed by FE-SEM, AFM, XRD and nanoindentation. The results show that ICP has significant effects on coating's microstructure, structural and mechanical properties of VN coatings. With an increase in ICP power, coating microstructure evolved from a porous columnar structure to a highly dense one. Single- phase cubic (FCC) VN coatings with different preferential orientations and residual stresses were obtained as a function of ICP power. Average crystal grain sizes of single phase cubic (FCC) VN coatings were decreased from 10.1 nm to 4.0 nm with an increase in ICP power. The maximum hardness of 28.2 GPa was obtained for the coatings deposited at ICP power of 200 W. The smoothest surface morphology with Ra roughness of 1.7 nm was obtained in the VN coating sputtered at ICP power of 200 W.

• 한국세라믹학회지
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• 제37권6호
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• pp.596-603
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• 2000

The hardness and elastic modulus of three bulk materials are computed from the load and displacement data which are measured during basic nanoindentation test and compared with values determined by independent means to assess the accuracy of the method. The results show that with this technique, modulus and hardness and elastic modulus profile through depth of silicon nitride and silicon oxynitride films. The results show that for silicon nitride film deposited on silicon, hardness and elastic modulus increase as the volume ratio of NH3 : SiH4, which had been used for deposition, increases up to 20.0; and for silicon oxynitride film on silicon, the hardness and elastic modulus profile changes distinctly as the relative amount of oxygen in deposition gas mixture changes.

• 한국분말재료학회지
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• 제8권3호
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• pp.179-185
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• 2001

Through the observation of wear scar of two ceramic materials, microstructural wear mechanisms was investigated. As for the $Al_2O_3$-5 vol% SiC nanocomposite, the grain boundary fracture was suppressed by the presence of SiC nano-particles. The intragranular SiC particles have inhibited the extension of plastic deformation through the whole grain. Part of plastic deformation was accommodated around SiC particles, which made a cavity at the interface between SiC and matrix alumina. On the other hand, gas-pressure sintered silicon nitride showed extensive grain boundary fracture due to the thermal fatigue. The lamination of wear scar was initiated by the dissolution of grain boundary phase. These two extreme cases showed the importance of microstructures in wear behavior.

• Journal of Ceramic Processing Research
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• 제17권7호
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• pp.763-767
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• 2016

The structural characterization of cubic boron nitride (c-BN) thin films was performed using a B4C target in a radio-frequency magnetron sputtering system. The deposition processing conditions, including the substrate bias voltage, substrate temperature, and base pressure were varied. Fourier-transform infrared spectroscopy and X-ray photoelectron spectroscopy were used to analyze the crystal structures and chemical binding energy of the films. For the BN film deposited at room temperature, c-BN was formed in the substrate bias voltage range of -400 V to -600 V. Less c-BN fraction was observed as the deposition temperature increased, and more c-BN fraction was observed as the base pressure increased.

• The Korean Journal of Ceramics
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• 제6권3호
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• pp.193-200
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• 2000

Si$_3$N$_4$powder with 2 wt% $Al_2$O$_3$and 6 wt% $Y_2$O$_3$additives was sintered by the gas pressure sintering (GPS) technique. The unlubricated wear behavior depending on sintering conditions such as sintering temperature, pressure, and sintering time was investigated. When the sintering temperature and time increased, the larger elongated grains were formed and the microstructural heterogeneity increased. When sintering pressure increased, grain growth, however, was impeded. Also, the wear properties depended on microstructure and friction coefficient were related to grain size. Based on the experimental results, the wear properties were associated with initial friction coefficients as well as mechanical properties including fracture toughness and flexural strength.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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• pp.866-867
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• 2006

This work will report a highly textured ${\beta}-Si_3N_4$ ceramic by aqueous slip casting in a magnetic field and subsequent pressureless sintering, Effects of the sintering aids, polymer dispersant, pH and stirring time on the stability of the $Si_3N_4$ slurries were studied. The textured ${\beta}-Si_3N_4$ with 97 % relative density could be obtained by slip casting in a magnetic field of 12 T and subsequent sintering at $1800^{\circ}C$ for 1 h. The textured microstructure is featured by the alignment of c-axis of ${\beta}-Si_3N_4$ crystals perpendicular to the magnetic field, and the Lotgering orientation factor, f, is determined to be 0.8.

• 한국결정성장학회지
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• 제8권1호
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• pp.111-116
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• 1998

질화규소는 고경도, 고인성 세라믹 재료이기 때문에, 기계적 가공성은 매우 나쁘며, 또한 질화규소는 높은 전기 저항을 갖는다. 매우 높은 전기저항을 띠는 질화규소에 30wt% 이상의 TiN 분말이 첨가되었을 때 전도성 세라믹 복합체가 된다. 높은 전기 전도도를 가질 때 세라믹을 방전가공방법(EDM)을 이용하여 정밀한 가공을 할 수 있다. 높은 전기 전도도를 갖는 $Si_3N_4-TiN$ 세라믹 복합체는 EDM 방법을 이용하여 금속 가공 tool을 만드는데 이용되며, 이러한 tool 재료들은 산화뿐만 아니라 심각한 마모문제를 갖는다. 상압소결후 post HIP 소결방법으로 $Si_3N_4-TiN$ 복합체를 만들었으며, TiN의 양의 변화에 따른 $Si_3N_4$ 복합체의 마모특성을 상온의 대기중에서 조사하였다. 경도, 파괴인성, 강도값을 마모량과 비교하였다. 마모흔의 SEM 관찰로 $Si_3N_4-TiN$ 복합체의 마모기구를 설명하였다.

• 한국재료학회지
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• 제29권9호
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• pp.547-552
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• 2019

In the present study, the thermal conductivity of a silicon nitride($Si_3N_4$) thin-film is evaluated using the dual-wavelength pump-probe technique. A 100-nm thick $Si_3N_4$ film is deposited on a silicon (100) wafer using the radio frequency plasma enhanced chemical vapor deposition technique and film structural characteristics are observed using the X-ray reflectivity technique. The film's thermal conductivity is measured using a pump-probe setup powered by a femtosecond laser system of which pump-beam wavelength is frequency-doubled using a beta barium borate crystal. A multilayer transient heat conduction equation is numerically solved to quantify the film property. A finite difference method based on the Crank-Nicolson scheme is employed for the computation so that the experimental data can be curve-fitted. Results show that the thermal conductivity value of the film is lower than that of its bulk status by an order of magnitude. This investigation offers an effective way to evaluate thermophysical properties of nanoscale ceramic and dielectric materials with high temporal and spatial resolutions.

• 한국세라믹학회지
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• 제42권8호
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• pp.537-541
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• 2005

Silicon nitride is one of the most successful engineering ceramics, owing to a favorable combination of properties, including high strength, high hardness, low thermal expansion coefficient, and high fracture toughness. However, the impact damage behavior of $Si_3N_4$ ceramics has not been widely characterized. In this study, sphere and explosive indentations were used to characterize the static and dynamic damage behavior of $Si_3N_4$ ceramics with different microstructures. Three grades of $Si_3N_4$ with different grain size and shape, fine-equiaxed, medium, and coarse-elongated, were prepared. In order to observe the subsurface damaged zone, a bonded-interface technique was adopted. Subsurface damage evolution of the specimens was then characterized extensively using optical and electron microscopy. It was found that the damage response depends strongly on the microstructure of the ceramics, particularly on the glassy grain boundary phase. In the case of static indentation, examination of subsurface damage revealed competition between brittle and ductile damage modes. In contrast to static indentation results, dynamic indentation induces a massive subsurface yield zone that contains severe micro-failures. In this study, it is suggested that the weak glassy grain boundary phase plays an important role in the resistance to dynamic fracture.

• Tribology and Lubricants
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• 제15권2호
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• pp.150-155
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• 1999

The rolling fatigue lives (RFL) of five kinds of silicon nitride balls were investigated. Four kinds of Si$_3$N$_4$balls were fabricated using different raw materials, sintering aids and sintering conditions. Commercially available Si$_3$N$_4$ball was also studied for comparison. All the balls were finished up to the dimensional accuracy of Grade 10 defined in KS B 2001 (Steel Balls fer Ball Bearings) with a size of 9.525 mm. RFL tests were then conducted under the initial theoretical maximum contact stress 6.38 GPa and the spindle speed 10,000 rpm. Gear oil was provided by oiled race as lubricant. The results of RFL test indicated the prerequisitic conditions for the long rolling life of Si$_3$N$_4$ball : (1) the high density, (2) microstructures consisted of small uniformly distributed grains, (3) little glassy phase in grainboundary, and (4) little crystalline phase and secondary phase that induces residual thermal stress due to the differences of thermal expansion coefficient with Si$_3$N$_4$phase.