• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.103-104
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• 2007

Nanometer-scaled polymer beads, such as polystyrene beads, were used as nanometer fabrication materials due to their some advantages such as self-assembled monolayer, nanometer scaled size and excellent compatibility with silicon based devices. Thus, the investigation on these properties of polymer beads was required. It is difficult to control the array of polystyrene beads on silicon substrate. In this study, we investigated the condition of selective array of polystyrene beads on nanometer-scaled hydrophilic surface which was obtained by APS coating. A tilting method was used to array the polystyrene beads selectively on the substrate. The polystyrene beads could be arrayed selectively by this method. From these results, we verified that there are possibilities to fabricate unique tools for the nanometer-scaled electrical devices.

• Environmental Analysis Health and Toxicology
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• 제22권3호
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• pp.189-196
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• 2007

[ $TiO_2$ ] is widely used because it is non-toxic. Recently, however, nanometer size $TiO_2$ particles (P-25) have been produced and used to increase the photo catalysis efficiency. Nanometer-sized $TiO_2$ is efficient, but due to its small size ($20{\sim}30\;nm$), it can flow into ecosystems and into cells. Thus, it may affect human health. Additionally, $TiO_2$ can produce a second contaminant, OH-radical, which is a health risk for all living organisms during photo degradation reaction. Hence, when nanometer-sized $TiO_2$ flows into natural streams and attaches to living organisms, it will create health risks. We investigated the biological toxicity of this condition in zebrafish embryos. We observed abnormal morphology, hatching rate, and measured the catalase activity to determine anti-oxidation at 100 post fertilization hours. Zebrafish were somewhat affected by $TiO_2$ nanometer sized particles under UV-A (a condition similar to sunlight). Powdered $TiO_2$ is toxic to the zebrafish fly. Even without light, $TiO_2$ particles attached to embryos and flies, having an effect on both.

• 한국고분자학회:학술대회논문집
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• 한국고분자학회 2006년도 IUPAC International Symposium on Advanced Polymers for Emerging Technologies
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• pp.285-285
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• 2006

The ionic layer-by-layer (LBL) assembled films can be formed by sequentially dipping of substrates to oppositely charged polyions solution in the multilayer, called polyelectrolytes multilayer (PEM) films. Easy way of these assemblies of charged polymers offer the ability to adjust important parameters such as controllability of thickness in the nanometer-scale level and functionality of most top layer of PEM films. Nevertheless, we do not know of any trials to fabricate PEM organic films into nanometer size. Herein, we show the integration of the LBL technique with DPN in fabricating nanometer size patterns of multilayered polyelectrolyte structures. Through the use of single and multiple cantilever AFM probes, we demonstrate the parallel writing capabilities of DPN.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2002년도 제22회 학술발표회 초록집
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• pp.208-208
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• 2002

• Bulletin of the Korean Chemical Society
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• 제32권6호
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• pp.2027-2031
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• 2011

Molecular dynamics simulation is used to study the binary collisions of nanometer-sized droplets of argon in the presence of a surrounding gas. By systematically varying the droplet size, the impact parameter and the velocity of collision, the outcome of such collisions were examined and they can be classified into coalescence, separation and shattering. If one of the colliding droplets is half or less than the other in diameter, a shattering is not possible to occur. The threshold of impact parameter for a given separation was studied by adjusting the Weber number. Overall nanoscale droplets were more likely to coalesce than the macroscopic sized ones due to their high surface-to-volume ratio.

• Journal of Information Display
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• 제6권4호
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• pp.40-44
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• 2005

Nanometer-sized bismuth oxide with a diameter of about 80 nm was used as a new electron reflection material in a 29" Real Flat CPT. This bismuth oxide was well dispersed over pH8 in slurry. Spray coating was performed clearly and uniformly and was ensured that there was no clogging of shadow mask hole. Coating thickness was expressed to the brightness of chromaticity for the sprayed layer and was also well controlled during the spraying process. Doming was improved by about 10% in spite of the similar coating weight in comparison with the average 3.5 ${\mu}m$ of the conventional bismuth oxide.

• 한국산학기술학회논문지
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• 제5권3호
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• pp.197-203
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• 2004

나노미터 크기의 임의형상 패턴을 새기기 위하여 노광기술이 사용된다. 광노광에서 자외선과 엑스레이 같은 전자기파가 나노미터 크기로 형상을 새긴 마스크 위에 조사되면 회절현상은 필연적으로 발생하며 마스크의 상이 불명확하게 웨이퍼 위에 맺히도록 한다. 볼록렌즈만이 프리어변환기 역할을 한다고 알려져 있으며 마스크 위에 패턴의 크기가 전자기파의 파장에 비교하여 매우 클 때에도 볼록렌즈를 사용하면 프리어변환시키는 것이 가능하다. 본 논문에서 설명하는 방법으로 마스크를 준비하여 렌즈 앞에 놓고 레이저 빔으로 조사하면 프리어 평면이라 알려진 평면 위에서만 나노미터 크기의 패턴이 형성된다. 이 방법은 매우 단순한 장치로 구성되어 있고, 현재 혹은 차세대 노광인 자외선/극자외선 및 전자투사노광으로 제작한 최소선폭과 비교해 볼 때 손색이 없다. 여기서는 프리어광학을 이용하여 이론적인 연구결과를 보이고 있지만 가까운 장래에 실험결과로 이론적인 접근을 증명할 수 있을 것이다.

• 대한기계학회논문집B
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• 제30권1호
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• pp.41-47
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• 2006

High resolution dopant profiling in semiconductor devices has been an intense research topic because of its practical importance in semiconductor industry. Although several techniques have already been developed. it still requires very expensive tools to achieve nanometer scale resolution. In this study we demonstrated a novel dopant profiling technique with nanometer resolution using very simple setup. The newly developed technique measures the thermoelectric voltage generated in the contact point of the SPM probe tip and MOSFET surface instead of electrical signals widely adopted in previous techniques like Scanning Capacitance Microscopy. The spatial resolution of our measurement technique is limited by the size of contact size between SPM probe tip and MOSFET surface and is estimated to be about 10 nm in this experiment.

• International Journal of Precision Engineering and Manufacturing
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• 제7권4호
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• pp.18-22
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• 2006

Although many efforts have been made in making nanometer-sized holes, there is still a major challenge in fabricating individual single-digit nanometer holes in a more controllable way for different materials, size distribution and hole shapes. In this paper we describe our efforts to use a top down approach in nanofabrication method to make single-digit nanoholes. There are three major steps towards the fabrication of a single-digit nanohole. 1) Preparing the freestanding thin film by epitaxial deposition and electrochemical etching. 2) Making sub-micro holes ($0.2{\mu}\;to\;0.02{\mu}$) by focused ion beam (FIB), electron beam (EB), atomic force microscope (AFM), and others methods. 3) Reducing the hole size to less than 10 nm by epitaxial deposition, FIB or EB induced deposition and micro coating. Preliminary work has been done on thin films (30 nm in thickness) preparation, sub-micron hole fabrication, and E-beam induced deposition. The results are very promising.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제36회 동계학술대회 초록집
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• pp.103.2-103.2
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• 2009