Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.11a
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- Pages.103-104
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- 2007
Selective Array of Polystyrene Beads by Using Nanometer-Scaled Hydrophilic Thin Film Patterning
나노미터 규격의 친수성 박막 패터닝을 이용한 선택적 폴리스티렌 입자 배열
- Kang, Jung-Hwa (Sungkyunkwan Univ.) ;
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Kim, Kyoung-Soeb
(Sungkyunkwan Univ.) ;
- Kim, Nam-Hoon (Sungkyunkwan Univ.) ;
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Roh, Yong-Han
(Sungkyunkwan Univ.)
- Published : 2007.11.01
Abstract
Nanometer-scaled polymer beads, such as polystyrene beads, were used as nanometer fabrication materials due to their some advantages such as self-assembled monolayer, nanometer scaled size and excellent compatibility with silicon based devices. Thus, the investigation on these properties of polymer beads was required. It is difficult to control the array of polystyrene beads on silicon substrate. In this study, we investigated the condition of selective array of polystyrene beads on nanometer-scaled hydrophilic surface which was obtained by APS coating. A tilting method was used to array the polystyrene beads selectively on the substrate. The polystyrene beads could be arrayed selectively by this method. From these results, we verified that there are possibilities to fabricate unique tools for the nanometer-scaled electrical devices.