• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.103-104
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• 2007

Nanometer-scaled polymer beads, such as polystyrene beads, were used as nanometer fabrication materials due to their some advantages such as self-assembled monolayer, nanometer scaled size and excellent compatibility with silicon based devices. Thus, the investigation on these properties of polymer beads was required. It is difficult to control the array of polystyrene beads on silicon substrate. In this study, we investigated the condition of selective array of polystyrene beads on nanometer-scaled hydrophilic surface which was obtained by APS coating. A tilting method was used to array the polystyrene beads selectively on the substrate. The polystyrene beads could be arrayed selectively by this method. From these results, we verified that there are possibilities to fabricate unique tools for the nanometer-scaled electrical devices.

• Environmental Analysis Health and Toxicology
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• v.22 no.3
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• pp.189-196
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• 2007

[ $TiO_2$ ] is widely used because it is non-toxic. Recently, however, nanometer size $TiO_2$ particles (P-25) have been produced and used to increase the photo catalysis efficiency. Nanometer-sized $TiO_2$ is efficient, but due to its small size ($20{\sim}30\;nm$), it can flow into ecosystems and into cells. Thus, it may affect human health. Additionally, $TiO_2$ can produce a second contaminant, OH-radical, which is a health risk for all living organisms during photo degradation reaction. Hence, when nanometer-sized $TiO_2$ flows into natural streams and attaches to living organisms, it will create health risks. We investigated the biological toxicity of this condition in zebrafish embryos. We observed abnormal morphology, hatching rate, and measured the catalase activity to determine anti-oxidation at 100 post fertilization hours. Zebrafish were somewhat affected by $TiO_2$ nanometer sized particles under UV-A (a condition similar to sunlight). Powdered $TiO_2$ is toxic to the zebrafish fly. Even without light, $TiO_2$ particles attached to embryos and flies, having an effect on both.

• Proceedings of the Polymer Society of Korea Conference
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• 2006.10a
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• pp.285-285
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• 2006

The ionic layer-by-layer (LBL) assembled films can be formed by sequentially dipping of substrates to oppositely charged polyions solution in the multilayer, called polyelectrolytes multilayer (PEM) films. Easy way of these assemblies of charged polymers offer the ability to adjust important parameters such as controllability of thickness in the nanometer-scale level and functionality of most top layer of PEM films. Nevertheless, we do not know of any trials to fabricate PEM organic films into nanometer size. Herein, we show the integration of the LBL technique with DPN in fabricating nanometer size patterns of multilayered polyelectrolyte structures. Through the use of single and multiple cantilever AFM probes, we demonstrate the parallel writing capabilities of DPN.

• Proceedings of the Korean Vacuum Society Conference
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• 2002.02a
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• pp.208-208
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• 2002

• Bulletin of the Korean Chemical Society
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• v.32 no.6
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• pp.2027-2031
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• 2011

Molecular dynamics simulation is used to study the binary collisions of nanometer-sized droplets of argon in the presence of a surrounding gas. By systematically varying the droplet size, the impact parameter and the velocity of collision, the outcome of such collisions were examined and they can be classified into coalescence, separation and shattering. If one of the colliding droplets is half or less than the other in diameter, a shattering is not possible to occur. The threshold of impact parameter for a given separation was studied by adjusting the Weber number. Overall nanoscale droplets were more likely to coalesce than the macroscopic sized ones due to their high surface-to-volume ratio.

• Journal of Information Display
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• v.6 no.4
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• pp.40-44
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• 2005

Nanometer-sized bismuth oxide with a diameter of about 80 nm was used as a new electron reflection material in a 29" Real Flat CPT. This bismuth oxide was well dispersed over pH8 in slurry. Spray coating was performed clearly and uniformly and was ensured that there was no clogging of shadow mask hole. Coating thickness was expressed to the brightness of chromaticity for the sprayed layer and was also well controlled during the spraying process. Doming was improved by about 10% in spite of the similar coating weight in comparison with the average 3.5 ${\mu}m$ of the conventional bismuth oxide.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.5 no.3
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• pp.197-203
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• 2004

New lithography techniques are employed for the patterning of arbitrary shapes in nanometer scale. When, in the photolithography, the electromagnetic waves such as UV and X-ray are incident on the mask patterned in nanometer scale, the diffraction effect is unavoidable and degrades images of the mask imprinted on wafer. Only a convex lens is well-known Fourier transformer. It is possible to make the mask Fourier-transformed with the convex lens, even though the size of pattern on the mask is very large compared to the wavelength of electromagnetic wave. If the mask, modified according to new technique described in this paper, was placed at the front of the lens and was illuminated with laser beam, the nanometer-size patterns are only formed on the plane called Fourier transform plane. The new method presented here is quite simple setup and comparable with present and next generation lithographies such as UV/EUV photolithograpy and electron projection lithography when compared in attainable minimum linewidth. In this paper, we showed our theoretical research work in the field of Fourier optics, . In the near future, we are going to verify this theoretical work by experiments.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.1 s.244
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• pp.41-47
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• 2006

High resolution dopant profiling in semiconductor devices has been an intense research topic because of its practical importance in semiconductor industry. Although several techniques have already been developed. it still requires very expensive tools to achieve nanometer scale resolution. In this study we demonstrated a novel dopant profiling technique with nanometer resolution using very simple setup. The newly developed technique measures the thermoelectric voltage generated in the contact point of the SPM probe tip and MOSFET surface instead of electrical signals widely adopted in previous techniques like Scanning Capacitance Microscopy. The spatial resolution of our measurement technique is limited by the size of contact size between SPM probe tip and MOSFET surface and is estimated to be about 10 nm in this experiment.

• International Journal of Precision Engineering and Manufacturing
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• v.7 no.4
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• pp.18-22
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• 2006

Although many efforts have been made in making nanometer-sized holes, there is still a major challenge in fabricating individual single-digit nanometer holes in a more controllable way for different materials, size distribution and hole shapes. In this paper we describe our efforts to use a top down approach in nanofabrication method to make single-digit nanoholes. There are three major steps towards the fabrication of a single-digit nanohole. 1) Preparing the freestanding thin film by epitaxial deposition and electrochemical etching. 2) Making sub-micro holes ($0.2{\mu}\;to\;0.02{\mu}$) by focused ion beam (FIB), electron beam (EB), atomic force microscope (AFM), and others methods. 3) Reducing the hole size to less than 10 nm by epitaxial deposition, FIB or EB induced deposition and micro coating. Preliminary work has been done on thin films (30 nm in thickness) preparation, sub-micron hole fabrication, and E-beam induced deposition. The results are very promising.

• Proceedings of the Korean Vacuum Society Conference
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• 2009.02a
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• pp.103.2-103.2
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• 2009