• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.51.2-51.2
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• 2015

Understanding interfacial phenomena has been one of the main research issues not only in semiconductors but only in life sciences. I have been trying to meet the atomic scale surface and interface analysis challenges from semiconductor industries and furthermore to extend the application scope to biomedical areas. Optical imaing has been most widely and successfully used for biomedical imaging but complementary ion beam imaging techniques based on mass spectrometry and ion scattering can provide more detailed molecular specific and nanoscale information In this presentation, I will review the 27 years history of medium energy ion scattering (MEIS) development at KRISS and DGIST for nanoanalysis. A electrostatic MEIS system constructed at KRISS after the FOM, Netherland design had been successfully applied for the gate oxide analysis and quantitative surface analysis. Recenlty, we developed time-of-flight (TOF) MEIS system, for the first time in the world. With TOF-MEIS, we reported quantitative compositional profiling with single atomic layer resolution for 0.5~3 nm CdSe/ZnS conjugated QDs and ultra shallow junctions and FINFET's of As implanted Si. With this new TOF-MEIS nano analysis technique, details of nano-structured materials could be measured quantitatively. Progresses in TOF-MEIS analysis in various nano & bio technology will be discussed. For last 10 years, I have been trying to develop multimodal nanobio imaging techniques for cardiovascular and brain tissues. Firstly, in atherosclerotic plaque imaging, using, coherent anti-stokes raman scattering (CARS) and time-of-flight secondary ion mass spectrometry (TOF-SIMS) multimodal analysis showed that increased cholesterol palmitate may contribute to the formation of a necrotic core by increasing cell death. Secondly, surface plasmon resonance imaging ellipsometry (SPRIE) was developed for cell biointerface imaging of cell adhesion, migration, and infiltration dynamics for HUVEC, CASMC, and T cells. Thirdly, we developed an ambient mass spectrometric imaging system for live cells and tissues. Preliminary results on mouse brain hippocampus and hypotahlamus will be presented. In conclusions, multimodal optical and mass spectrometric imaging privides overall structural and morphological information with complementary molecular specific information, which can be a useful methodology for biomedical studies. Future challenges in optical and mass spectrometric imaging for new biomedical applications will be discussed.

• Journal of the Korean Ceramic Society
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• v.46 no.2
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• pp.131-136
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• 2009

Radio frequency (RF) plasma treatment is studied for the size reduction and the spheroidization of coarse particles to change them into nano-sized powders of spherical shape in MLCC fields. The uni-nanoadditives manufactured by RF plasma processing for high dispersion have been investigated for the effect on core-shell structure in dielectrics of MLCC. Microstructures have been characterized using scanning electron microscope (SEM), transmission electron microscope (TEM) and Electron Probe Micro Analyzer (EPMA). We compared the distribution of core-shell grains between specimens manufactured using uni-nanoadditive and using mixed additive. In addition, the uniformity of rare earth elements in the core-shell structured grains was analyzed. It was shown, from TEM observations, that the sintered specimen manufactured using uni-nanoadditives had more dense small grains with well-developed core-shell structure than the specimen using mixed additives, which had a homogeneous microstructure without abnormal grain growth and shows broad temperature coefficient of capacitance (TCC) curves in all temperature ranges because of well dispersed additives.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.1
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• pp.168-172
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• 2013

In 3D wafer-stacking technology, one of the major issues is wafer warpage. Especially, The important reason of warpage has been known due to CTE(Coefficient of Thermal Expansion) mismatch between materials. It was too hard to choose how to make the FE model for blanket structured wafer level 3D packaging, because the thickness of each layer in wafer level 3D packaging was too small (micro meter or nano meter scale) comparing with diameter of wafer (6 or 8 inches). In this study, the FE model using the shell element was selected and simulated by the ANSYS WorkBench to investigate effects of the CTE on the warpage. To verify the FE model, it was compared by experimental results.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.393-394
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• 2008

Carbon nanotubes are attractive nano-structured materials because of their remarkable electronic, physical, chemical properties. Due to these reasons, application researches of CNTs are actively processed on the display, the electronic element, the nano-diode fields and the semiconductor element. Today, The major issue of semiconductor technique are via and interconnects. CNTs are used to make via and interconnects because of high electric currents density and high heat transfer. Control of the orientation of grown CNTs is very important thing for making via and interconnects. Via are horizontal growth of CNTs and interconnects are vertical growth of CNTs. This research is based on the experiment using control of gas flow directions and DC bias. Scanning Electron Microscope (SEM) was used to check this experiment.

• Korean Journal of Metals and Materials
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• v.46 no.4
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• pp.223-226
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• 2008

The comparison of sintering behavior and mechanical properties of ultra-fine WC-10wt.%Co and WC-10wt.%Fe hard materials produced by high-frequency induction heated sintering (HFIHS) was accomplished using ultra fine powder of WC and binders(Co, Fe). The advantage of this process allows very quick densification to near theoretical density and prohibition of grain growth in nano-structured materials. Highly dense WC-10Co and WC-10Fe with a relative density of up to 99% could be obtained with simultaneous application of 60 MPa pressure and induced current within 1 minute without significant change in grain size. The hardness and fracture toughness of the dense WC-10Co and WC-10Fe composites produced by HFIHS were investigated.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2014.11a
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• pp.17-18
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• 2014

최근 자동차 성능 및 연비향상을 위해서 엔진의 고출력화 및 소형화 경향이 뚜렷해지고 있으며, 이로 인해 엔진내부의 부품이 받는 환경은 더욱 가혹해 지고 있다. 즉, 자동차 엔진 구동부품은 금속간의 접촉가능성이 매우 높은 경계윤활조건에 놓이게 되며, 또한 배기가스 규제로 인한 첨가제를 최소화 하려는 경향에 따라 경계윤활 환경에서 더욱 심한 마모문제에 직면할 것으로 예상되어 내구성 및 내마모성이 높은 코팅기술에 대한 요구가 더욱 증가하고 있다. 본 연구에서는 Zr기지의 비정질 형성능을 갖는 합금계를 이용하여 아르곤 및 질소분위기에서 스퍼터링 함으로써 고경도의 ZrN상과 엔진오일과 반응하여 저마찰 트라이보 필름을 형성시킬 수 있는 금소계 원소가 Tissue phase로 존재하는 질화물 나노박막합성기술을 개발한 후 자동차 구동부품인 벨브트레인계 및 피스톤링/라이너 부품에 적용하여 마찰특성을 평가하였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.11a
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• pp.66-67
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• 2012

As polymer coatings of nano-structured surface become significant to obtain functionalized materials, catechol derived from a mussel protein has attracted increasing attention for its universal adhesiveness. In addition to the unique adhesion property, its reducing ability of metal ions during oxidative polymerization to polydopamine (pD) widely expands the application of catechol molecules in the field of surface modification. In this study, we present the catechol conjugated smart polymer coatings for regulating surface properties such as wettability and anti-fouling effects. In additino, the in situ silver coating of electrospun polymer nanofibers using a silver-catechol redox reaction is presented as a simple method to produce metal nanostructures.

• Journal of the Korean Ceramic Society
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• v.54 no.3
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• pp.257-260
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• 2017

In this work, we present a facile one-pot synthesis of a multilayer-structured platy alumina/few-layer graphene nanocomposite by planetary milling and hot pressing. The sintered composites have electrical conductivity exhibiting percolation behavior (threshold ~ 0.75 vol.%), which is much lower than graphene oxide/ceramic composites (> 3.0 vol.%). The conductivity data are well-described by the percolation theory, and the fitted exponent values are estimated to be 1.65 and 0.93 for t and q, respectively. The t and q values show conduction mechanisms intermediate between 2D- and 3D, which originates from quantum tunneling between nearest neighbored graphenes.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.6
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• pp.502-507
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• 2010

In order to design nano structured materials with enhanced thermoelectric properties, the alloys in the pseudo-binary $Bi_2Te_3$-PbTe system are investigated for their micro structure properties. For this synthesis, the liquid alloys are cooled by the water quenching method. Micro structure images are obtained by using an electron probe micro analyzer(EPMA). Dendritic and lamellar structures are clearly observed with the variation in the composition ratio between $Bi_2Te_3$ and PbTe. The increase in the $Bi_2Te_3$ composition ratio causes to change of the structure from dendritic to lamellar. The Seebeck coefficient of sample 5, in which the mixture rate of $Bi_2Te_3$ is 83%, is measured as the highest value. In contrast, the others decrease with the increase of the $Bi_2Te_3$ composition ratio. Meanwhile, p-type characteristics are observed in sample 6, at 91%-$Bi_2Te_3$ mixture rate. The power factors of the all samples are calculated with the Seebeck coefficient and resistivity.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.251-252
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• 2012

Recently, the growing interest in organic microelectronic devices including OLEDs has led to an increasing amount of research into their many potential applications in the area of flexible electronic devices based on plastic substrates. However, these organic devices require a gas barrier coating to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency OLEDs require an extremely low Water Vapor Transition Rate (WVTR) of $1{\times}10^{-6}g/m^2$/day. The Key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required ($1{\times}10^{-6}g/m^2$/day) is the suppression of defect sites and gas diffusion pathways between grain boundaries. In this study, we developed an $Al_2O_3$ nano-crystal structure single gas barrier layer using a Neutral Beam Assisted Sputtering (NBAS) process. The NBAS system is based on the conventional RF magnetron sputtering and neutral beam source. The neutral beam source consists of an electron cyclotron Resonance (ECR) plasma source and metal reflector. The Ar+ ions in the ECR plasma are accelerated in the plasma sheath between the plasma and reflector, which are then neutralized by Auger neutralization. The neutral beam energies were possible to estimate indirectly through previous experiments and binary collision model. The accelerating potential is the sum of the plasma potential and reflector bias. In previous experiments, while adjusting the reflector bias, changes in the plasma density and the plasma potential were not observed. The neutral beam energy is controlled by the metal reflector bias. The NBAS process can continuously change crystalline structures from an amorphous phase to nano-crystal phase of various grain sizes within a single inorganic thin film. These NBAS process effects can lead to the formation of a nano-crystal structure barrier layer which effectively limits gas diffusion through the pathways between grain boundaries. Our results verify the nano-crystal structure of the NBAS processed $Al_2O_3$ single gas barrier layer through dielectric constant measurement, break down field measurement, and TEM analysis. Finally, the WVTR of $Al_2O_3$ nano-crystal structure single gas barrier layer was measured to be under $5{\times}10^{-6}g/m^2$/day therefore we can confirm that NBAS processed $Al_2O_3$ nano-crystal structure single gas barrier layer is suitable for OLED application.