• Title/Summary/Keyword: nano-pattern

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Effects of Growth Conditions on Properties of ZnO Nanostructures Grown by Hydrothermal Method (수열합성법으로 성장된 ZnO 나노구조의 성장조건에 따른 특성)

  • Cho, Min-Young;Kim, Min-Su;Kim, Ghun-Sik;Choi, Hyun-Young;Jeon, Su-Min;Yim, Kwang-Gug;Lee, Dong-Yul;Kim, Jin-Soo;Kim, Jong-Su;Lee, Joo-In;Leem, Jae-Young
    • Korean Journal of Materials Research
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    • v.20 no.5
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    • pp.262-266
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    • 2010
  • ZnO nanostructures were grown on an Au seed layer by a hydrothermal method. The Au seed layer was deposited by ion sputter on a Si (100) substrate, and then the ZnO nanostructures were grown with different precursor concentrations ranging from 0.01 M to 0.3M at $150^{\circ}C$ and different growth temperatures ranging from $100^{\circ}C$ to $250^{\circ}C$ with 0.3 M of precursor concentration. FE-SEM (field-emission scanning electron microscopy), XRD (X-ray diffraction), and PL (photoluminescence) were carried out to investigate the structural and optical properties of the ZnO nanostructures. The different morphologies are shown with different growth conditions by FE-SEM images. The density of the ZnO nanostructures changed significantly as the growth conditions changed. The density increased as the precursor concentration increased. The ZnO nanostructures are barely grown at $100^{\circ}C$ and the ZnO nanostructure grown at $150^{\circ}C$ has the highest density. The XRD pattern shows the ZnO (100), ZnO (002), ZnO (101) peaks, which indicated the ZnO structure has a wurtzite structure. The higher intensity and lower FWHM (full width at half maximum) of the ZnO peaks were observed at a growth temperature of $150^{\circ}C$, which indicated higher crystal quality. A near band edge emission (NBE) and a deep level emission (DLE) were observed at the PL spectra and the intensity of the DLE increased as the density of the ZnO nanostructures increased.

New transfer method of electrodeposited nano metal pattern by using nanowire embedded mold (나노선 임베드 몰드를 이용한 도금 패턴 전사방법)

  • Eom, Hyeon-Jin;Lee, Jae-Min;Lee, Jeong-Yong;Park, In-Gyu;Jeong, Jun-Ho
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2014.11a
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    • pp.153-154
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    • 2014
  • 전사 방식은 금속 패턴을 다른 기판에 전사시키는 방법으로, 대면적 디스플레이에 응용하기 위해 나노 사이즈 패턴을 반복적으로 전사하는 새로운 공정을 개발하였다. 나노선 임베드 구조체와 전해 도금 방식을 이용하여 나노선 네트워크 구조체를 반복적으로 이종 기판에 전사시키는데 성공하였으며, 기존의 전사 방식인 건식 방식에 비해 공정 속도를 높이고 전사되는 패턴의 사이즈를 효과적으로 낮추는 것을 확인하였다.

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나노위치제어용 선형 모터의 거동 분석

  • Seol Jin-Su;Lee U-Yeong;Im Gyeong-Hwa
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2005.05a
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    • pp.125-128
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    • 2005
  • The equipments in semi-conductor, display and measurement fields require high precision and resolution positioning technology. High positioning control can be carried out by using linear motors with little vibration, backlash and friction. In this paper, the acceleration patterns of the moving Part are analyzed to obtain the optimum pattern which leads to the less vibration reduction of equipment. In addition, the effect of friction force in guide rail on position control accuracy is investigated to identify possibility of using current bearing system for nano-positioning control.

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Fabrication of Moth-Eye Pattern on a Lens Using Nano Imprint lithography

  • Bae, Byeong-Ju;Hong, Seong-Hun;Hong, Eun-Ju;Lee, Heon
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2008.11a
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    • pp.128-128
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    • 2008
  • 본 연구에서는 나노 임프린트 리소그래피 래피 공정과 PVA(Poly-Vinyl-Alcohol), PDMS(Poly-Dimethyl-Siloxane) template 등의 flexible template를 사용하여 평면 기판 뿐만 아니라 곡면 렌즈 위에 moth-eye 구조를 성공적으로 형성시켰으며 처리 되지 않은 렌즈에 비해 투과율이 향상되는 것을 확인하였다.

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A study on the plastic parts with nano pattern using Injection molding process (사출성형공정을 이용한 미세패턴을 갖는 플라스틱 부품 제작에 관한 연구)

  • 김동학;김태완
    • Proceedings of the KAIS Fall Conference
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    • 2003.06a
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    • pp.356-358
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    • 2003
  • 본 연구에서는 일반사출과 MmSH방식 두 가지의 사출성형공정을 이용하여 나노 패턴 구조물을 제작하였다. 성형품에 나타난 나노패턴의 진사성은 MmSH방식을 이용한 PC 성형품에서 가장 우수했다. 일반사출공정에서 HIPS로 제작된 성형품은 나노패턴의 전사가 잘 형성되었고, PC의 경우 전사가 잘 이루어지지 않았다. 연구 결과 수지의 유동성이 좋고, 금형표면 온도가 높을수록 나노패턴의 전사성은 향상됨을 알 수 있었다.

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Pattern of polymer nanofibers produced by electrospinning (전기방사된 나노섬유의 Pattern 연구)

  • Kim, Kwan-Woo;Lee, Keun-Hyung;Lee, Douk-Rae;Kim, Hak-Yong;Kim, Sung-Ryong
    • Proceedings of the Korean Fiber Society Conference
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    • 2003.04a
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    • pp.171-172
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    • 2003
  • In recent years, interest in electrospinning has been quickly increased, because electrospinning is a process capable of making polymer fibers in the range of nano to a few microns diameters[1,2]. The electrospinning was patented by Formhals in 1934[2] and most of studies reported on the subject of electrospinning have been focused on its phenomena[3] and on processing parameters [4-5]. (omitted)

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A Study on Heat and Vibration of Nano Precision Linear Motors (나노 구동용 선형 모터의 열.진동에 관한 연구)

  • Kim H.Y.;LEE W.Y.;Rim K.H.;Seol J.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.254-259
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    • 2005
  • The heat and vibration effect is known to cause a serious deformation in linear motor system. The paper presents a heat and vibration characteristics that compare a advanced linear motor with developed linear motor through experiment and analyses. The heat in linear motor system is identified for experimental data and analytic data using the Finite Volume Method (FVM). Also, it shows that the optimum standard analyzed the acceleration patterns of the moving part cause the vibration source in linear motor. It presents the analyzed dynamics of linear motor in compliance with a deformation of the non-linear factor.

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Fabrication of Micropattern by Microcontact Printing (미세접촉인쇄기법을 이용한 미세패턴 제작)

  • 조정대;이응숙;최대근;양승만
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.1224-1226
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    • 2003
  • In this work, we developed a high resolution printing technique based on transferring a pattern from a PDMS stamp to a Pd and Au substrate by microcontact printing Also, we fabricated various 2D metallic and polymeric nano patterns with the feature resolution of sub-micrometer scale by using the method of microcontact printing (${\mu}$CP) based on soft lithography. Silicon masters for the micro molding were made by e-beam lithography. Composite poly(dimethylsiloxane) (PDMS) molds were composed of a thin, hard layer supported by soft PDMS layer. From this work, it is certificated that composite PDMS mold and undercutting technique play an important role in the generation of a clear SAM nanopattern on Pd and Au substrate.

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