A Study on the Reduction of Pattern Deformation by Optimized FIB during the TEM Sample Preparation (Nano 급 반도체 TEM 시료 제작 시, 미세 Pattern 변형에 대한 연구)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2013.05a
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- pp.647-648
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- 2013