Sub 150nm Soft-Lithography using the monomer based thermally curable resin (Monomer based thermally curable resin을 이용한 150nm 급 Soft-Lithography)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 한국정밀공학회 2005년도 춘계학술대회 논문집
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- pp.676-679
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- 2005