• Title/Summary/Keyword: nano beam

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Fabrication of carbon nanotube fibers with nanoscale tips and their field emission properties

  • Shin, Dong-Hoon;Song, Ye-Nan;Sun, Yu-Ning;Shin, Ji-Hong;Lee, Cheol-Jin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.468-468
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    • 2011
  • Carbon nanotubes (CNTs) have been considered as one of the promising candidate for next-generation field emitters because of their unique properties, such as high field enhancement factor, good mechanical strength, and excellent chemical stability. So far, a lot of researchers have been interested in field emission properties of CNT itself. However, it is necessary to study proper field emitter shapes, as well as the fundamental properties of CNTs, to apply CNTs to real devices. For example, specific applications, such as x-ray sources, e-beam sources, and microwave amplifiers, need to get a focused electron beam from the field emitters. If we use planar-typed CNT emitters, it will need several focal lenses to reduce a size of electron beam. On the other hand, the point-typed CNT emitters can be an effective way to get a focused electron beam using a simple technique. Here, we introduce a fabrication of CNT fibers with nanoscale point tips which can be used as a point-typed emitter. The emitter made by the CNT fibers showed very low turn-on electric field, high current density, and large enhancement factor. In addition, it showed stable emission current during long operation period. The high performance of CNT point emitter indicated the potential e-beam source candidate for the applications requiring small electron beam size.

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Development of Micro Plasma Electrode using Focused Ion Beam (FIB를 이용한 마이크로 플라즈마 전극 개발)

  • Choi Hon-Zong;Kang Eun-Goo;Lee Seok-Woo;Hong Won-Pyo
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.5 s.170
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    • pp.175-180
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    • 2005
  • The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. In this research, fabrication of micro plasma electrode was carried out using FIB. The one of problems of FIB-sputtering is the redeposition of material including Ga+ ion source during sputtering process. Therefore the effect of the redeposition was verified by EDX. And the micro plasma electrode of copper was fabricated by FIB.

Ion Beam Induced Micro/Nano Fabrication: Modeling (이온빔을 이용한 마이크로/나노 가공: 모델링)

  • Kim, Heung-Bae;Hobler, Gerhard
    • Journal of the Korean Society for Precision Engineering
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    • v.24 no.8 s.197
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    • pp.108-115
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    • 2007
  • 3D nano-scale manufacturing is an important aspect of advanced manufacturing technology. A key element in ability to view, fabricate, and in some cases operate micro-devices is the availability of tightly focused particle beams, particularly of photons, electrons, and ions. The use of ions is the only way to fabricate directly micro-/ nano-scale structures. It has been utilized as a direct-write method for lithography, implantation, and milling of functional devices. The simulation of ion beam induced physical and chemical phenomena based on sound mathematical models associated with simulation methods is presented for 3D micro-/nanofabrication. The results obtained from experimental investigation and characteristics of ion beam induced direct fabrication will be discussed.

Design of a Bar-type TIR Lens Having a Freeform Surface for Forming a Line Beam Using an LED Light Source (LED 광원 사용 시 line beam 형성을 위한 자유 곡면 bar type의 TIR lens 설계)

  • Seo, Jin-Hee;Lee, Jeong-Su;Kim, Seo-Young;Jeong, You-Jin;Park, Hye-Jin;Nam, Deuk-Young;Jung, Mee-Suk
    • Korean Journal of Optics and Photonics
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    • v.28 no.6
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    • pp.295-303
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    • 2017
  • In this paper, we have studied a method of forming a line beam using a UV LED. The existing linear-type UV LED curing optical system is composed of several cylindrical lenses, but problems such as optical system alignment, enlargement of the module, efficiency, etc. may arise in the future. As an alternative to these problems, a bar-type TIR lens having a freeform surface only in the y-axis direction is designed, to verify that it shows advantages in maximum illuminance, uniformity of illuminance, and flux efficiency.

Fabrication of Solid Oxide Fuel Cells via Physical Vapor Deposition with Electron Beam: II. Unit Cell Performance (전자빔 물리증착을 이용한 고체 산화물 연료전지의 제조: II. 단전지 성능)

  • Kim, Hyoung-Chul;Park, Jong-Ku;Jung, Hwa-Young;Son, Ji-Won;Kim, Joo-Sun;Lee, Hae-Weon;Lee, Jong-Ho
    • Journal of the Korean Ceramic Society
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    • v.43 no.5 s.288
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    • pp.299-303
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    • 2006
  • In this paper, anode supported SOFC with columnar structured YSZ electrolyte was fabricated via Electron Beam Physical Vapor Deposition (EBPVD) method. Liquid condensation process was employed for the preparation of NiO-YSZ substrate and the high power electron beam deposition method was used for the deposition of YSZ electrolyte film. Double layered cathode with LSM-YSZ and LSM was printed on electrolyte via screen-printing method and fired at $1150^{\circ}C$ in air atmosphere for 3 h. The electrochemical performance and the long-term stability of $5{\times}5cm^2$ single cell were investigated with DC current-voltage characteristics and AC-impedance spectroscopy. According to the investigation, $5{\times}5cm^2$ sized unit cell showed the maximum power density of around $0.76W/cm^2$ at $800^{\circ}C$ and maintained the stable performance over 400 h.