• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.497-498
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.193-194
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• 2007

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.38-39
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• 2005

A new C-aperture is needed in the Ag film because general metal films don't alternate with the PEC film. In this paper, using FDTD method and the Drude-Lorentz metal model, a new C-aperture is designed in the Ag film and the 40nm-beam size and the $7\%$ near-field transmission efficiency are obtained at 28nm distance from the aperture. Its near-field transmission is about 1000 times larger than that of a 54 nm${\times}$54 nm square aperture.

• Proceedings of the Korean Ceranic Society Conference
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• 2003.10a
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• pp.210.2-210
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• 2003

• Proceedings of the Korean Nuclear Society Conference
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• 2005.10a
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• pp.737-738
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• 2005

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2007.04a
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• pp.24-25
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• 2007

Nano-sized metal patterns were successfully fabricated on flexible PET substrate using nanoimprint lithography. 70nm line and space PMMA resist pattern was formed on PET substrate without residual layer by "partial filling effect' and 20nm thin Cr metal layer was deposited by e-beam evaporation. Then, PMMA resist was selectively removed by acetone and 70nm narrow Cr pattern was formed.

• Journal of Energy Engineering
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• v.25 no.1
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• pp.192-197
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• 2016

We have surveyed on technical method of fault analysis of semiconductor device. Fault analysis of semiconductor should first be found the places of fault spots. For this process they are generally used the testers; EB(emission beam tester), EM(emission microscope), OBIRCH(optical beam induced resistance change method) and LVP(laser voltage probing) etc. Therefore we have described about physical interpretation and technical method in using scanning electron microscope, transmission electron microscope, focused ion beam tester and Nano prober.

• Journal of the Korean Ceramic Society
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• v.55 no.6
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• pp.581-589
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• 2018

This work concentrated on the effect of different laser beams on the microstructure and dielectric properties of $BaTiO_3$ nanoparticles at different calcinations times during the gelling preparation step. The nanoparticles were prepared by the sol-gel method. A green (1000 mW, 532 nm) and red laser beam (500 mW, 808 nm), were applied vertically at the center of stirring raw materials. The samples were sintered at $1000^{\circ}C$ for 2, 4, and 6 h. X-ray diffraction (XRD) analysis showed that samples prepared under the green laser have the highest purity. The FT-IR spectra showed that the stretching and bending vibrations of TiO bond without any other bonds, which are compatible to the X-ray diffraction (XRD) results. Samples were characterized by transmission electron microscopy (TEM), Scan electron microscopy (SEM), and UV-Visible spectrophotometer. Characterization showed the samples prepared under the green laser to have the highest particle size (~ 50 nm) and transparency for all sintering durations. Laser beam effects on electrical characterization were studied. BT nanoparticles prepared under the green laser show the higher dielectric constant, which was found to increase with sintering temperature.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.636-639
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• 2003

It is difficult to machine below 10 micrometers by conventional machining methods, such as micro-EDM. However, ultra micro machining using focused ion beam(FIB) is able to machine to 50 nanometers. In addition, 3 dimensional structures can be made by a combination of FIB and CVD to the level of 10 nanometers. Die ＆ moulds techniques are better than one-to-one machining techniques in the mass production of ultra size structures, in regards to production costs. In this case, the machining precision of die ＆ moulds affects produced parts. Also, it is advantageous to machine die ＆ moulds to the 10 micrometer level by FIB technique rather than other techniques. In this paper, the grooving characteristics for die ＆ mould materials by FIB were carried out experimentally in order to compare the machining characteristics of FIB with conventional machining methods. The results showed that the machining parameters and the scanning path of FIB affects the precision. The machined width and depth of the groove varied depending on the required depth due to the redeposition of the sputtered ion material accumulating on both the bottom and the side of the wall.

• Coupled systems mechanics
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• v.7 no.4
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• pp.373-393
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• 2018

This paper is concerned with the wave propagation behavior of rotating functionally graded temperature-dependent nanoscale beams subjected to thermal loading based on nonlocal strain gradient stress field. Uniform, linear and nonlinear temperature distributions across the thickness are investigated. Thermo-elastic properties of FG beam change gradually according to the Mori-Tanaka distribution model in the spatial coordinate. The nanobeam is modeled via a higher-order shear deformable refined beam theory which has a trigonometric shear stress function. The governing equations are derived by Hamilton's principle as a function of axial force due to centrifugal stiffening and displacement. By applying an analytical solution and solving an eigenvalue problem, the dispersion relations of rotating FG nanobeam are obtained. Numerical results illustrate that various parameters including temperature change, angular velocity, nonlocality parameter, wave number and gradient index have significant effect on the wave dispersion characteristics of the understudy nanobeam. The outcome of this study can provide beneficial information for the next generation researches and exact design of nano-machines including nanoscale molecular bearings and nanogears, etc.