• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 추계학술대회 논문집
• /
• pp.698-701
• /
• 2005

We have investigated experimentally a nano patterning using electron beam lithography for the nickel stamper fabrication. Recently, DVD and Blu-ray disk(BD) have nano-scale patterns in order to increase the storage density. Specially, BD has 100nm-scale patterns which are generally fabricated by electron beam lithography. In this paper, we found optimum condition of electron-beam lithography for 100nm-scale patterning. We controlled various conditions of EHP(acceleration voltage), beam current, dose and aperture size in order to obtain optimum conditions. We used 100nm-thick PMMA layer on a silicon wafer as photoresist. We found that EHP was the most dominant factor in electron-beam lithography.

• 한국소성가공학회:학술대회논문집
• /
• 한국소성가공학회 2003년도 춘계학술대회논문집
• /
• pp.481-484
• /
• 2003

In this study, we fabricated the master metallic nano-stamper with nano pillar patterns to apply replication processes which is adequate for mass production. Master nano patterns with various hole diameters between 300 nm and 1000 nm was fabricated by e-beam lithography. After the seed layer was deposited on the master nano patterns using e-beam evaporation, the nickel was electroformed. In each step, the shape and surface roughness of their patterns were analyzed using SEM and AFM.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1531-1534
• /
• 2005

Nano pattern is being utilized to produce micro optical components, sensors, and information storage devices. In this study, a study on nano pattern fabrication using raster-scan type Focused Ion Beam (FIB) milling is introduced. Because the intensity of ion beam has Gaussian distribution, the overlapping of the Gaussian beam results in a 3D pattern, and the shape of the pattern can be adjusted by variation of FIB milling parameters, such as overlap, ion dose, and dwell time. The Gaussian shape of single beam intensity has been investigated by experiment, and 3D nano patterns with pitch of 200nm generated by FIB is demonstrated.

• Steel and Composite Structures
• /
• 제33권5호
• /
• pp.653-661
• /
• 2019

In this paper aeroelastic behavior of 3-phase nano-composite beam-plate with double delaminations is investigated. It is tried to study the effect of carbon nano-tubes (CNTs) on critical flutter pressure of reinforced damaged nano-composite structures. In this case, the CNTs are appending to the polymer matrix uniformly. The Eshelby-Mori-Tanaka model is used to obtain the effective material properties of 3-phase nano-composite beam-plate. To investigate the aeroelastic behavior of delaminated beam-plate subjected to supersonic flow, it is assumed that the damaged segments are forced to vibrate together. The boundary conditions and auxiliary conditions at edges of delaminated segments are used to predict critical flutter pressure. The influence of CNTs and different delamination parameters such as delamination length, axial position and its position through thickness are investigated on critical flutter pressure.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1501-1506
• /
• 2005

This paper presents the design of a multiple beam optical tweezers instrument used for manipulating micro/nano-sized components. The basic equations used in designing the optical tweezers are derived and the stable and time-sharing multiple beam optical tweezers are constructed with scanning mirrors. The laser beam passes through a series of optical components such as lenses, mirrors, and scanning mirrors, and overfills the entrance aperture of microscope objective, which gives a stable trap. By rotating the laser beam with the scanning mirror, the focal positions are translated in the specimen plane and multiple micro/nano-sized objects can be moved. The constructed optical tweezers is used to manipulate cells and liposomes simultaneously and to trap multiple nano-wires. The experiments prove that the developed optical tweezers can be a very versatile manipulation tool for studying gene therapy and nano device fabrication.

• Structural Engineering and Mechanics
• /
• 제78권1호
• /
• pp.15-22
• /
• 2021

An investigation of the nonlinear thermal buckling behavior of a nano-sized beam constructed from intelligent materials called piezo-magnetic materials has been presented in this article. The nano-sized beam geometry has been considered based on two assumptions: an ideal straight beam and an imperfect beam. For incorporating nano-size impacts, the nano-sized beam formulation has been presented according to nonlocal elasticity. After establishing the governing equations based on classic beam theory and nonlocal elasticity, the nonlinear buckling path has been obtained via Galerkin's method together with an analytical trend. The dependency of buckling path to piezo-magnetic material composition, electro-magnetic fields and geometry imperfectness has been studied in detail.

• 한국정밀공학회지
• /
• 제25권6호
• /
• pp.150-158
• /
• 2008

This research considered that the significance of the NT(Nano Technology) which gradually increased the importance of it and investigated the technology development current situation of the Korea, U.S.A, Japanese, Europe. Therefore, in domestic and foreign, this research was widely used. It includes the tendency of the technology about processing methods using the ion beam and electron beam among the In-line system related technique field for the high efficiency energy beam application nano scale manufacturing components. The technique level of Korea, the international trend of technology and cooperation research present condition are dealt in. The information about the checked out of business of research and development of the country consistency and policy establishment try to be provided.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 1998년도 제14회 학술발표회 논문개요집
• /
• pp.68-69
• /
• 1998

Nano-crystalline silicon(nc-Si) thin films were directly depposited by ion beam assisted electron beam depposition (IBAED) method. The visibe luminescence in IBAED sampples were originated from not an oxygen bond but Si nano-crystallites. And we can conclude that the ion beam would be contribute to the suppression of the Si-O bond formation.

• Structural Engineering and Mechanics
• /
• 제73권3호
• /
• pp.287-302
• /
• 2020

This investigation deals with a size-dependent coupled thermoelasticity analysis based on Green-Naghdi (GN) theory in nano scale using a new modified nonlocal model of heat conduction, which is based on the GN theory and nonlocal Eringen theory of elasticity. In the analysis based on the proposed model, the nonlocality is taken into account in both heat conduction and elasticity. The governing equations including the equations of motion and the energy balance equation are derived using the proposed model in a nano beam resonator. An analytical solution is proposed for the problem using the Laplace transform technique and Talbot technique for inversion to time domain. It is assumed that the nano beam is subjected to sinusoidal thermal shock loading, which is applied on the one of beam ends. The transient behaviors of fields' quantities such as lateral deflection and temperature are studied in detail. Also, the effects of small scale parameter on the dynamic behaviors of lateral deflection and temperature are obtained and assessed for the problem. The proposed GN-based model, analytical solution and data are verified and also compared with reported data obtained from GN coupled thermoelasticity analysis without considering the nonlocality in heat conduction in a nano beam.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 추계학술대회 논문집
• /
• pp.322-325
• /
• 2005

The shrinking critical dimensions of modern technology place a heavy requirement on optimizing feature shapes at the micro- and nano scale. In addition, the use of ion beams in the nano-scale world is greatly increased by technology development. Especially, Focused ion Beam (FIB) has a great potential to fabricate the device in nano-scale. Nevertheless, FIB has several limitations, surface swelling in low ion dose regime, precipitation of incident ions, and the re-deposition effect due to the sputtered atoms. In recent years, many approaches and research results show that the re-deposition effect is the most outstanding effect to overcome or reduce in fabrication of micro and nano devices. A 2D string based simulation software AMADEUS-2D $(\underline{A}dvanced\;\underline{M}odeling\;and\;\underline{D}esign\;\underline{E}nvironment\;for\;\underline{S}putter\;Processes)$ for ion milling and FIB direct fabrication has been developed. It is capable of simulating ion beam sputtering and re-deposition. In this paper, the 2D FIB simulation is demonstrated and the characteristics of ion beam induced direct fabrication is analyzed according to various parameters. Several examples, single pixel, multi scan box region, and re-deposited sidewall formation, are given.