• Journal of the Korean Ceramic Society
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• v.50 no.6
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• pp.545-550
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• 2013

Piezoelectric PMN-29PT single crystal multilayer actuators [100 $mm^2$ in cross section and 22 mm in length] are designed and fabricated by stacking square plates [$10{\times}10{\times}0.5(t)\;mm^3$] of PMN-29PT single crystals having a $d_{33}$ of about 1,500 pC/N. The characteristics of PMN-29PT multilayer actuators are compared with those of P-025.40P multilayer PZT ceramic actuators [490 $mm^2$ in cross section and 60 mm in length] produced by PI in Germany. Even though the total volume of the PMN-29PT single crystal multilayer actuator is only about 7.5% of that of the P-025.40P ceramic multilayer actuator, PMN-29PT single crystal multilayer actuators are expected to show very similar properties to P-025.40P ceramic actuators in terms of static stroke and blocking force. Therefore, on the basis of their smaller mass and volume compared to the conventional PZT ceramic multilayer actuators, piezoelectric PMN-29PT single crystal multilayer actuators have significant potential regarding the development of various high performance actuators for aerospace subsystems.

• Journal of the Korean Ceramic Society
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• v.34 no.4
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• pp.337-342
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• 1997

This paper describes the design and evaluation of new type piezoelectric bimorph actuator that shows much large mechanical response than those conventional types. The bimorph actuator has modified structure combined with the multilayer actuator(MLA) and the composite multilayer actuator called "Moonie". The design and performancean alysis of bimorph actuator are carried out with Finite Element Method (FEM). Theoretical calculation results show that the generating force and displacement of Moonie-modified bimorph actuator can be improved by about 130% and 150%, respectively. The overshooting and ringing phenomena of the bimorph can be effectively restrained by the pseudo step electric field having a rising time coincied with a period of the fundamental vibration mode of the bimorph.e bimorph.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.35-39
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• 2005

This paper presents a method to reduce hysteresis in multilayer ceramic actuator by connecting the actuator with a capacitor in a series circuit. The change in hysteresis with respect to the capacitor was examined. $0.2Pb(Mg_{1/3}Nb_{2/3})O_3-0.8Pb(Zr_{0.475}Ti_{0.525})O_3$ ceramic material was used as a piezoelectric material for the actuator. Displacement of the actuator was measured in a capacitive gap sensor measuring system. In case of inserting a capacitor in a total circuit, hysteresis became dramatically decreased, and then finally the hysteresis value can be reduced below $0.2\%$. It was found in this present study that reducing the hysteresis in the actuator is dependent upon the characteristics of the capacitor in total circuit and also operating frequency.

• Journal of the Korean Ceramic Society
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• v.40 no.3
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• pp.225-228
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• 2003

A Bender typed Multilayer Actuator(BMA) for decreasing the depolarization effect was designed and fabricated. Unlike bimorph and multimorph actuators in which depolarization occurred, the BMA did not generate depolarization because the polarization and the electric field directions are the same. The simulated results indicate that higher displacement of the BMA can be achieved by increasing input voltage. Compared with the multimorph actuator, the proposed actuator is expected to extend a life time as well as acceptable voltage range.

• Journal of Ceramic Processing Research
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• v.13 no.spc2
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• pp.282-285
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• 2012

Lead-free (Bi0.5Na0.41K0.09)TiO3 (BNKT) multilayer ceramic actuators were prepared using tape-casting and screen-printing techniques. Co-firing behavior of BNKT/AgPd laminates was examined as a function of sintering temperature. It was found that co-firing induced bending and electrical properties were very sensitive to sintering condition. By optimizing sintering conditions, lead-free electrostrictive multilayer actuators with normalized strain Smax/Emax of 266 pm/V have been successfully fabricated, which is promising for lead-free actuator applications.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.163-168
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• 2003

In the present study, the piezoelectricity and polarization of multilayer ceramic actuator, being designed to stack PMN-PZ-PT ceramic layers and Ag-Pd electrode layers alternatively, were investigated under a consideration of geometric factor, the volume ratio of the ceramic to the electrode layers. The actuators were fabricated by tape casting of $0.2Pb(Mg_{1/3}Nb_{2/3)O_3-0.38PbZrO_3-0,42PbTiO_3$ followed by lamination and burnout & co-firing processes. The actuators of $10\times10\times0.6~2\textrm{mm}^3$ in size were formed in a way that $60 ~ 200\mu\textrm{m}$ thick were stacked alternatively with $5\mu\textrm{m}$ thick electrode layer. Increases in polarization and electric field-induced displacement with thickness of the ceramic layer were attributed to change of $90^{\circ}$/$180^{\circ}$ domain ratio, which was affected by interlayer internal stress. The piezoelectricity and actuation behaviors were found to depend upon the volume ratio (or thickness ratio) of ceramic to electrode layers.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.390-391
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• 2006

This paper describes the design, fabrication and characteristics of a micromachined piezoelectric valve utilizing a multilayer ceramic actuator (MCA). The micromachined MCA valve, which uses a buckling effect, consists of three separate structures: the MCA, the valve actuator die and the seat die. The valve seat die with 6 trenches was made, and the actuator die, which is driven by the MCA under optimized conditions, was also fabricated. After Si wafer direct bonding between the seat die and the actuator die, the MCA was also anodically bonded to the seat/actuator die structure. A polydimethylsiloxane (PDMS) sealing pad was fabricated to minimize the leak rate. Finally, the PDMS sealing pad was also bonded to the seat die and the stainless steel package. The MCA valve shows a flow rate of 9.13 sccm at an applied DC voltage of 100 V with a 50% duty cycle and a maximum non-linearity of 2.24% FS. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, as a medical bio-system and in the automobile industry.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.615-618
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• 2004

The piezoelectricity and polarization of multilayer ceramic actuators, being designed to stack ceramic layer and electrode layer alternately, were investigated under a consideration of geometry, the thickness ratio of the ceramic layer to electrode layer The actuators were fabricated by tape-casting of $0.42PbTiO_3-0.38PbZrO_3-0.2Pb(Mn_{1/3}Nb_{2/3})O_3$ followed by laminating, burn-out and co-firing process. The actuators of $5\times5mm^2$ in area were formed in a way that $60{\sim}200{\mu}m$ thick ceramics were stacked 10 times alternately with $5{\mu}m$ thick electrode. Increase in polarization and electric field-displacement with increasing thickness ratio of the ceramic/electrode layer and thickness/cross section ratio were attributed to the change of $non-180^{\circ}/180^{\circ}$ domain ratio which was affected by the interlayer internal stress and Poisson ratio of ceramic layer. The piezoelectricity and actuation behaviors were found to be dependent upon the volume ratio (or thickness ratio) of ceramic layer relative to ceramic layer. Concerning with the existence of internal stress, the field-induced polarization and deformation were described in the multilayer actuator.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.478-481
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• 2004

This study presents the combined effect of electric Held application and mechanical compressive stress loading on deformation in a multilayer ceramic actuator, designed with stacking alternatively 0.2(PbMn$\_$1/3/Nb$\_$2/3/O$_3$)-0.8(PbZr$\_$0.475/Ti$\_$0.525/O$_3$) ceramics and Ag-Pd electrode. The deformation behaviors were thought to be attributed to relative 180$^{\circ}$domain quantities which is determined by pre-loaded stress and electric field. The non-linearity of piezoelectricity and strain are dependent upon the young's modulus resulting from the domain reorientation.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.594-597
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• 2003

In the present study, the piezoelectricity and polarization of multilayer ceramic actuator, being designed to stack PMN-PZ-PT ceramic layers and Ag-Pd electrode layers alternatively, were investigated under a consideration of geometric factor, the volume ratio of the ceramic to the electrode layers. The actuators were fabricated by tape casting of 0.2Pb(Mg1/3Nb2/3)O3-0.38PbZrO3-0.42PbTiO3 followed by lamination and burnout & co-firing processes. The actuators of 10 10 0.62 nm3 in size were formed in a way that 60 200 m thick ceramics were stacked alternatively with 5 m thick electrode layer. Increases in polarization and electric field-induced displacement with thickness of the ceramic layer were attributed to change of 90o/180o domain ratio, which was affected by interlayer internal stress. The piezoelectricity and actuation behaviors were found to depend upon the volume ratio (or thickness ratio) of ceramic to electrode layers.