• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.731-732
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• 2008

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.263-267
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• 2004

This study presents the combined effect of electric field application and mechanical compressive stress loading on deformation in a multilayer ceramic actuator, designed with stacking 0.2($PbMn_{1/3}Nb_{2/3}O_{3}$)-0.8($PbZr_{0.475}Ti_{0.525}O_{3}$) ceramics and Ag-Pd electrode, alternately. The deformation behaviors were attributed to relative $180^{\circ}$domain, determined by pre-loaded compressive stress and electric field. The non-linearity of piezoelectricity and strain are dependent upon the young's modulus resulting from the domain reorientation.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.5
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• pp.417-421
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• 2006

In this study, in order to develop low temperature sintering piezoelectric ceramics for LTCC (Low-Temperature Cofired Ceramic) multilayer piezoelectric actuator, PMW-PMN-PZT ceramics using $0.2wt%\; Li_2CO_3$ and $0.25wt%\;CaCO_3$ as sintering aids were investigated according to the varation of PMW substution. Composition ceramics could be sintered at $900^{\circ}C$ by adding sintering aids. As the amount of PMW substitution increased, the crystal structure of PMW-PMN-PZT ceramics moved from tetragonal phase to rhombohedral phase gradually, and MPB(Morphotrophic Phase Boundary) region appeared at 2 mol% PMW substitution. At the sintering temperature of $900^{\circ}C$, the density, electromechanical coupling factor(kp), mechanical quality factor(Qm), dielectric constant(${\epsilon}r$), piezoelectric constant(d33) and Curie temperature(Tc) of 2 mol% PMW substituted PMW-PMN-PZT ceramics showed the optimal values of $7.88g/cm^3$, 0.58, 1002, 1264, 352 pC/N and $336^{\circ}C$, respectively, for LTCC multilayer piezoelectric actuator application.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.10
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• pp.896-901
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• 2002

The polarization and strain behavior of multilayer ceramic actuators fabricated by tape casting using a PNN-PZT ceramics were investigated in association with electrode size and internal layer number. Spontaneous polarization and strain decreased with increasing electrode size. In addition, the increase of internal layer number brought reduced spontaneous polarization and increased the field-induced strain. Because the actuators structure is designed to stack ceramic layer and electrode layer alternatively, the ceramic-electrode interfaces may act as a resistance to motion of domain wall. To analyze the effect of ceramic-electrode interface, the diffraction intensity ratio of (002) to (200) planes was calculated from X-ray diffraction patterns of samples subjected to a voltage of 200 V. The diffraction intensity ratio of (002) to (200) planes was decreased with increasing electrode size and internal layer number. The diffraction intensity ratio and straining behavior analyses indicate that the Polarization and strain were affected by the amount of 90°domain decreasing with increasing electrode size and internal layer number. Consequently, the change of polarization and displacement with respect to electrode size and layer number is likely to be caused by readiness of the domain wall movement around the interface.

• Transactions on Electrical and Electronic Materials
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• v.12 no.6
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• pp.249-252
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• 2011

We investigated the low firing of $Li_2CO_3$ added $0.2Pb(Mg_{1/3}Nb_{2/3})O_3$ - 0.3Pb($Fe_{1/2}Nb_{1/2}$) - $0.5Pb(Zr_{0.475}Ti_{0.525})O_3$ (PMN-PFN-PZT) ceramics and multilayer actuators (MLAs) using Ag inner electrodes. It was found that 0.1 wt% $Li_2CO_3$ was quite effective in lowering the sintering temperature of PMN-PFN-PZT ceramics from $1,100^{\circ}C$ down to $900^{\circ}C$ without deteriorating their piezoelectric ceramics ($d_{33}$ = 425 pC/N and $k_p$ = 61.9%). However, excess $Li_2CO_3$ up to 0.3 wt% brings about unwanted problems such as the formation of a $LiPbO_2$ secondary phase and subsequent degradation in the piezoelectric properties. Using 0.1 wt% $Li_2CO_3$ added PMN-PFN-PZT ceramics, MLAs with Ag inner electrodes were successfully fabricated, resulting in a normalized strain of 580 pm/V at an electric field of 1.5 kV/mm.

• Transactions of the Korean Society of Automotive Engineers
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• v.15 no.2
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• pp.101-108
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• 2007

This paper presents an efficient meshless method for analyzing cracked piezoelectric structures subjected to mechanical and electrical loading. The method employs an element free Galerkin (EFG) formulation and an enriched basic function as well as special shape functions that contain discontinuous derivatives. Based on the moving least squares (MLS) interpolation approach, The EFG method is one of the promising methods for dealing with problems involving progressive crack growth. Since the method is meshless and no element connectivity data are needed, the burdensome remeshing procedure required in the conventional finite element method (FEM) is avoided. The numerical results show that the proposed method yields an accurate near-tip stress field in an infinite piezoelectric plate containing an interior hole. Another example is to study a ceramic multilayer actuator. The proposed model was found to be accurate in the simulation of stress and electric field concentrations due to the abrupt end of an internal electrode.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.735-738
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• 2003

Downsizing electronics requires precision position control with an accuracy of sub-micron order, which demands development of ultra-fine displacive devices. Piezoelectric transducer is one of devices transferring electric field energy into mechanical energy and being capable for fine displacement control. The transducer has been widely used as fine Position control device Multilayer piezoelectric actuator, one of typical piezo-transducer, is fabricated by stacking alternatively ceramic and electrode layers several hundred times followed by cofiring process. Electrode material should be tolerable in the firing process maintaining at ceramic-sintering temperatures up to $1100{\sim}1300^{\circ}C$. Ag-Pd can be used as stable electrode material in heat treatment above $960^{\circ}C$. Besides, adding small quantity ceramic powder allow the actuator to be fabricated in a good shape by diminishing shrinkage difference between ceramic and electrode layers, resulting in avoidance of crack and delamination at and/or nearby interface between ceramic an electrode layers. This study presents synthesis of nano-oxide-added Ag/Pd powders and its feasibility to candidate material tolerable at high temperature. The powders were formed in a co-precipitation process of Ag and Pd in nano-oxide-dispersed solution where Ag and Pd precursors are melted in $HNO_3$ acid.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.2
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• pp.184-189
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• 2004

The effects of $Y_2$ $O_3$-substitution on the piezoelectric properties of Pb[(N $i_{1}$3/N $b_{2}$3/)$_{0.15}$(Z $r_{1}$2/ $Ti_{1}$2/)$_{0.85}$] $O_3$ceramics were investigated. It was found that $Y^{3+}$ ions incorporate into Pb-sites of the ceramics, resulting in a increased lattice anisotropy and formation of Pb-vacancies. As a result, an orthorhombic-tetragonal phase transition was induced when $\chi$>0.005. At the morphotropic phase boundary of x=0.005, piezoelectric constants( $k_{p}$, $k_{33}$, and $d_{33}$) showed maximum values of 0.53, 0.58, and 350pC/N, respectively. A 30-layer actuator fabricated with the above material showed a maximum strain of 0.12％ under 100V DC bias.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.317-321
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• 2002

Piezoelectric properties of $(Pb_{1-x}Y_x)[(Ni_{1/3}Nb_{2/3})_{0.15}(Zr_{1/2}Ti_{1/2)})_{0.85}]O_{3}$ (x=0~0.05) ceramics were investigated, The stoichiometric PNN-PZT ceramics required the sintering temperature above $1100^{\circ}C$, but the addition of $Y_{2}O_{3}$ in the PNN-PZT ceramic lowered the sintering temperature down to $1000^{\circ}C$. In case of x=0.005, the electro-mechanical coupling $factor(K_p)$, the piezoelectric $constant(d_{33})$, and the maximum strain ratio of PNN-PZT ceramics sintered at $1000^{\circ}C$ were 53.1%, 395pC/N, and $2200{\times}10^{-6}$ respectively, A 30-layer piezoelectric actuator$(10{\times}10{\times}1.7mm)$ fabricated with the above material showed the maximum strain of $2.09{\mu}m$ under 100V DC bias.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.203-204
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• 2008

In this study, in order to develop the multilayer piezoelectric actuator and ultrasonic resonator, PMN-PNN-PZT ceramics were fabricated by the variations of ball size at sintering temperature of $900^{\circ}C$ and their piezoelectric and dielectric characteristics were investigated as a function of the variations of ball size. When the ball size was 3mm$\phi$, density, dielectric constant$({\varepsilon}r)$, electromechanical coupling factor(kp) and piezoelectric d constant$(d_{33})$ were increased. At the ball size of 3mm$\phi$, the specimen showed the optimum values of density=7.909g/$cm^3$, kp=0.592, Qm=1292, $d_{33}$=368pC/N, $\varepsioln_r$=1502, respectively.