• 제목/요약/키워드: multi-process

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다층 리지스트 및 화합물 반도체 기판 구조에서의 전자 빔 리소그래피 공정을 위한 몬테 카를로 시뮬레이션 모델 개발 (A Monte Carlo Simulation Model Development for Electron Beam Lithography Process in the Multi-Layer Resists and Compound Semiconductor Substrates)

  • 손명식
    • 한국진공학회지
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    • 제12권3호
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    • pp.182-192
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    • 2003
  • 밀리미터파 대역용 고속 PHEMT 소자 제작 및 개발을 위하여 다층 리지스트 및 다원자 기판 구조에서 전자빔 리소그래피 공정을 분석할 수 있는 새로운 몬테 카를로 시뮬레이션 모델을 개발하였다. 전자빔에 의해 다층 다원자 타겟 기판 구조에 전이되는 에너지를 정확하고 효율적으로 계산하기 위하여 다층 리지스트 및 다층 다원자 기판 구조에서 시뮬레이션 가능하도록 새로이 모델링하였다. 본 논문에서 제안 개발된 모델을 사용하여 PHEMT 소자의 전자빔 리소그래피에 의한 T-게이트 형성 공정을 시뮬레이션하고 SEM측정 결과와 비교 분석하여 타당성을 검증하였다.

다결정 실리콘 태양전지의 표면 텍스쳐링 및 반사방지막의 영향 (Surface Texturing and Anti-Reflection Coating of Multi-crystalline Silicon Solar Cell)

  • 전성욱;임경묵;최석환;홍영명;조경목
    • 한국표면공학회지
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    • 제40권3호
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    • pp.138-143
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    • 2007
  • The effects of texturing and anti-reflection coating on the reflection properties of multi-crystalline silicon solar cell have been investigated. The chemical solutions of alkaline and acidic etching solutions were used for texturing at the surface of multi-crystalline Si wafer. Experiments were performed with various temperature and time conditions in order to determine the optimized etching condition. Alkaline etching solution was found inadequate to the texturing of multi-crystalline Si due to its high reflectance of about 25%. The reflectance of Si wafer texturing with acidic etching solution showed a very low reflectance about 10%, which was attributed to the formation of homogeneous. Also, deposition of ITO anti-reflection coating reduced the reflectance of multi-crystalline si etched with acidic solution($HF+HNO_3$) to 2.6%.

균일한 고분자 나노섬유 매트 제작을 위한 다중 노즐 전기방사 공정 연구 (Multi-Nozzle Electrospinning Process to Fabricate Uniform Polymer Nanofiber Mats)

  • 이봉기;박재한;박건중;박광련
    • 한국기계가공학회지
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    • 제17권3호
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    • pp.120-126
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    • 2018
  • In the present study, the multi-nozzle electrospinning process is investigated for the fabrication of uniform polymer nanofiber mats. Electrospinning has been one of the simple and efficient methods to manufacture polymer nanofibers and their mats. Although a typical electrospinning has many advantages such as simple system and operation, various materials, and cost-effectiveness, a relatively low productivity prevents it from being used in practical applications. Thus, the multi-nozzle electrospinning system with the adjustable nozzle position and rotating drum collector is designed and produced in this study. In particular, the effects of the inter-nozzle distance and spatial arrangement of nozzles on the uniformity of the electrospun nanofibers are investigated. With this multi-nozzle electrospinning process, the maximum flow rate of the supplied polymer solution for a uniform electrospinning increases, which indicates the enhanced productivity.

다출력 유도 가열 시스템에 의한 반용융 소재의 재가열 (Reheating of Semi-Solid Material Using Multi-Capacity Induction Heating System)

  • 정홍규
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 1999년도 춘계학술대회논문집
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    • pp.199-202
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    • 1999
  • Many processing times for fabricating complex shaped parts by near net shape process such as thixoforming or semi-solid forming, are required due to the time for die design, induction heating and forming process. Therefore, for the thixoforming process, multi-capacity induction heating process is very important due to the reduction of the processing time and cost. It is indispensable to adopt a power-time heating pattern which manages to conciliate complete eutectic melting at the core with limited overheating at the periphery. The total reheating time is thus dependent on billet diameter; in inches$(pm20%)$. Typically, high frequency is used for the rapid reheating of the billet to the eutectic temperature range and low frequency for the remelting of the desired fraction of liquid and for the radial homogeneization of the liquid fraction. So in this study, the multi-capacity induction heating conditions of ALTHIX 86s alloy to reduce the processing time and cost would be proposed. The suitability of multi-capacity induction heating conditions would be verified through the comparison to Garat's data.

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등속조인트용 외륜의 다단 냉간 단조공정을 위한 공정개선 및 유한요소 해석 (Process Modification and Numerical Simulation for an Outer Race of a CV Joint using Multi-Stage Cold Forging)

  • 강범수;구태완
    • 소성∙가공
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    • 제23권4호
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    • pp.211-220
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    • 2014
  • The outer race of a constant velocity (CV) joint having six inner ball grooves has traditionally been manufactured by multi-stage warm forging, which includes forward extrusion, upsetting, backward extrusions, necking, ironing and sizing, and machining. In the current study, a multi-stage cold forging process is examined and an assessment for replacing and modifying the conventional multi-stage warm forging is made. The proposed procedure is simplified to the backward extrusion of the conventional process, and the sizing and necking are combined into a single sizing-necking step. Thus, the forging surface of the six ball grooves can be obtained without additional machining. To verify the suitability of the proposed process, a 3-dimensional numerical simulation on each operation was performed. The forging loads were also predicted. In addition, a structural integrity evaluation for the tools was carried out. Based on the results, it is shown that the dimensional requirements of the outer race can be well met.

다단계 기계가공공정의 최적검사계획에 관한 연구 (A Study on optimal Inspection plans in Multi-Stage Machining process)

  • 조재립;황의철
    • 산업경영시스템학회지
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    • 제10권15호
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    • pp.33-38
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    • 1987
  • In establishing Multi-Stage Machining process inspection procedures, however, where costs of inspection md defective products are often directly measurable, a better method for formulating inspection plans is available. If one of the primary interest of a manufacturing concern is to maximize profits, then optimal inspection plans ought to be selected so as to minimize costs. This paper is aimed to find a methodology of optimal inspection planning in Multi-stage Machining process and to develope a proper algorithm.

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원통형 용기의 다단계 딥드로잉 공정설계에 관한 사례 연구 (A Case Study on the Process Planning for Multi-Stepped Deep Drawing of Complex Circular Shells)

  • 김두환
    • 소성∙가공
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    • 제7권3호
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    • pp.225-232
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    • 1998
  • This article is aimed primarily at establishing a process planning method for complex circular shells. For the deep drawing of complex shaped shell, the optimum process design is required to reduce the trial cost improve the quality, increase the productivity and shorten the delivery. The present approach which is related to the optimum process planning is based on the empirical knowledge through trial and error in the industrial field. In order to check the validity and the effectiveness of proposed work a sample process design has been applied to the multi-stepped deep drawing of com-plex shell considering the process variables such as drawing rate radius and blank development. In particular the difference between the limiting drawing rate and to optimum drawing rate has been discussed and the usefulness of present suggestion has been shown.

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인공신경망을 이용한 다단 인발 공정 설계 (Process Design of Multi-Step Wire Drawing using Artificial Neural Network)

  • 김동환;김동진;김병민
    • 소성∙가공
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    • 제7권2호
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    • pp.127-138
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    • 1998
  • Process design of multi-step wire drawing process, conducted by means of finite element analysis and ANN(Artificial Neural Network) has been considered. The investigated problem involves the ade-quate selection of the drawing die angle and the correspondent reduction rate in the condition of desired initial and final diameter. Combinations of the process parameters which are used in finite ele-ment simulation are selected by using the orthogonal array. Also the orthogonal array. Also the orthogonal array and the results of finite element simulation which are related to the process energy are used as train data of ANN. In this study it is shown that the application of new technique using ANN and Othogonal array table to the process design of metal forming process is useful method.

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원통형 용기의 다단계 \ulcorner드로잉 공정설계에 관한 사례 연구 (A Case Study on the Process Planning for Multi-Stepped Deep Drawing of Complex Circular Shells)

  • 김두환
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 1998년도 춘계학술대회논문집
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    • pp.160-167
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    • 1998
  • This article is aimed primarily at establishing a process planning method for complex circular shells. For the deep drawing of complex shaped shell, the optimum process design is required to reduce the trial cost, improve the quality, increase the productivity and shorten the delivery. The present approach which is related to the optimum process planning is based on the empirical knowledge through trial and error in the industrial field. In order to check the validity and the effectiveness of proposed work, a sample process design has been applied to the multi-stepped deep drawing of complex shell considering the process variables such as drawing rate, radius and blank development. In particular, the difference between the limiting drawing rate and the optimum drawing rate has been discussed and has been shown the usefulness of present suggestion.

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조향장치용 스플라인 샤프트 이형인발 공정변수 최적화 (Optimization of Process Variables of Shape Drawing for Steering Spline Shaft)

  • 이상곤;김성민;이선봉;김병민
    • 소성∙가공
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    • 제19권2호
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    • pp.132-137
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    • 2010
  • In the multi-pass shape drawing process, the appropriate process design is very important to produce sound products. The reduction ratio, die angle, and the intermediate die shape are very important process variable of the multi-pass shape drawing. The aim of this study is the determination of the reduction ratio, die angle, and the intermediate die shape of the 2 pass shape drawing process for producing steering spline shaft. In this study, FE analysis, Taguchi method, and ANN(artificial neural network) were applied to determine the appropriate reduction ratio, die angle, and intermediate die shape. After the determination of the process variables, FE analysis and drawing experiment were performed to evaluate the effectiveness of the determined process variables. The dimensional accuracy of the final drawn spline shaft was evaluated by using 3D surface profiler and 3D laser digitizing system.