• 한국정밀공학회지
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• 제22권6호
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• pp.76-82
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• 2005

In this paper, the pole placement controller based on the Robust Internal-loop Compensator (RIC) structure, which has inherent structural equivalence to disturbance observer, is proposed to control a linear positioning system. This controller has the advantage to easily select controller gains by using pole placement without loss of that of original RIC structure. The principal is to construct the pole placement controller for a nominal internal model instead of unknown real plant. Using linear motion experiment showed the effectiveness of the proposed controller.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.434-437
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• 2003

Evaluation or the patterning accuracy of e-beam lithography machines requires a high precision inspection system that is capable of measuring the true xy-locations of fiducial marks generated by the e-beam machine under test. Fiducial marks are fabricated on a single photo mask over the entire working area in the form of equally spaced two-dimensional grids. In performing the evaluation, the principles of self-calibration enable to determine the deviations of fiducial marks from their nominal xy-locations precisely, not being affected by the motion errors of the inspection system itself. It is. however, the fact that only repeatable motion errors can be eliminated, while random motion errors encountered in probing the locations of fiducial marks are not removed. Even worse, a random error occurring from the measurement of a single mark propagates and affects in determining locations of other marks, which phenomenon in fact limits the ultimate calibration accuracy of e-beam machines. In this paper, we describe an uncertainty analysis that has been made to investigate how random errors affect the final result of self-calibration of e-beam machines when one uses an optical inspection system equipped with high-resolution microscope objectives and a precision xy-stages. The guide of uncertainty analysis recommended by the International Organization for Standardization is faithfully followed along with necessary sensitivity analysis. The uncertainty analysis reveals that among the dominant components of the patterning accuracy of e-beam lithography, the rotationally symmetrical component is most significantly affected by random errors, whose propagation becomes more severe in a cascading manner as the number of fiducial marks increases

• 한국정밀공학회지
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• 제32권5호
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• pp.423-429
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• 2015

Linear motion (LM) ball guides have good accuracy and high efficiency. They are widely applied for precision machinery such as machine tools, semiconductor fabrication machines and robots. However, friction force incurs heat between the balls and grooves. Thermal expansion due to the heat deteriorates stiffness and accuracy of the LM ball guides. For accurate estimation of stiffness and accuracy during the linear motion, friction models of LM ball guides are required. To formulate accurate frictional models of LM ball guides according to load and preload conditions, rolling and viscous frictional analyses have been performed in this paper. Contact loads between balls and grooves are derived from Hertzian contact analysis. Contact angle variation is incorporated for the precision modeling. Viscous friction model is formulated from the shear stress of lubricant and the contact area between balls and grooves. Experiments confirm validity of the developed friction model for various external load and feedrate conditions.

• 한국공작기계학회논문집
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• 제15권4호
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• pp.44-48
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• 2006

Recently, demand the ultra precision product which is increasing rapidly is used extensively frontier industry field such as semi-conductor, computer, aerospace, precision machine. Ultra precision processing is the portion that is very needed to NT in the field of mechanical engineering. The latest date, together with radical advancement of electronic and photonics industry, necessity of ultra precision processing is on the increase for the manufacture of various kernel parts those are connected with these industrial fields. Specially, require motion accuracy of high resolution of nm order in stroke of hundreds millimeters according as diameter of processing object great and processing accuracy rises. In this case ,the response speed absolute delay because inertial mass of moving part is very large. Therefore, real time motion error compensation becomes very hardly. In this paper, we used ultra precision cutting unit(UPCU) to cope such problem. a UPCU is designed and tested to obtain sub-micrometer from accuracy in diamond turning of flat surfaces. The thermal growth spindle error is compensated for real time using a UPCU driven by piezoelectric actuator along with a laser encoder displacement sensor.

• 한국군사과학기술학회지
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• 제13권4호
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• pp.708-715
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• 2010

In Strapdown Inertial Navigation System, alignment accuracy is the most important factor to determine the performance of navigation. However by an existing self-alignment method, it takes a long time to acquire the alignment accuracy that we want. So, to attain the desired alignment accuracy in as little as $\bigcirc$ minutes, we have developed the precise multi-position alignment method. In this paper, it is proposed a inertial measurement matching transfer alignment method among alignment methods to minimize the alignment error in a short time. It is based on a mixed velocity-DCM matching method be suitable to the operating environment of vertical launching system. The compensation methods to reduce misalign error, especially azimuth angle error incurred by measurement time-delay error and body flexure error are analyzed and evaluated with simulation. This simulation results are finally confirmed by experimentations using FMS(Flight Motion Simulator) in Lab and the integration test to follow the fire control mission.

• 한국정보통신학회논문지
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• 제12권12호
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• pp.2159-2164
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• 2008

유비쿼터스 헬스케어 시스템은 사용자의 건강 정보를 감독하고 관리하는 시스템이며, 이 헬스케어 시스템에서 가장 중요한 점은 측정된 건강 데이터의 정확성이다. 그러나 실생활에서는 사용자의 움직임 에 따라 그 정확성이 현저하게 달라진다. 따라서 건강 정보 정확성을 향상시키기 위해 본 연구에서는 심박수 추출에 있어 새로운 맥파 최대점 검출 알고리즘을 제안하였고, 제안된 알고리즘은 다중 하위 대역 필터와 퍼지 추론기를 이용하여 동잡음이 포함된 PPG 신호에서 맥파의 최대점을 검출하기 위한 것이다. 제안된 알고리즘에 대한 성능평가 실험에서 복잡한 동잡음에서도 맥파 최대점 추출이 가능함을 보였다.

• 한국정밀공학회지
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• 제28권3호
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• pp.265-274
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• 2011

This paper presents current state of the prediction simulator of structural characteristics of machinery equipment accuracy. Developed accuracy prediction simulator proceeds and estimates the structural analysis between the designer and simulator through the internet for convenience of designer. 3D CAD model which is input to the accuracy prediction simulator would simplified by the process of removing the small hole, fillet and chamfer. And the structural surface joints would be presented as the spring elements and damping elements for the structural analysis. The structural analysis of machinery equipment joints, containing rotary motion unit, linear motion unit, mounting device and bolted joint, are presented using Finite Element Method and their experiment. Finally, a general method is presented to tune the static stiffness at a rotation joint considering the whole machinery equipment system by interactive use of Finite Element Method and static load experiment.

• 한국통신학회논문지
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• 제24권9B호
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• pp.1697-1703
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• 1999

본 논문에서는 반화소 위치에서의 평균 절대 오차 (mean absolute difference; MAD)의 최소 범위를 이용한 고속 반화소 단위의 블록 정합 알고리듬을 제안한다. 제안한 방법에서는 반화소 단위의 MAD의 최소 범위를 화소 단위의 움직임 추정으로 얻어진 MAD들을 이용하여 구한 후, 반화소 단위의 MAD의 최소 범위가 화소 단위의 움직임 추정으로 구한 기준 MAD보다 작은 탐색점에 대해서만 블록 정합을 행하였다. 제안한 방법의 성능을 평가하기 위한 컴퓨터 모의 실험결과로부터 제안한 방법이 기존의 방법과 동일한 성능을 유지하면서도 많은 계산량을 줄일 수 있음을 확인할 수 있었다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2000년도 하계종합학술대회 논문집(4)
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• pp.43-46
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• 2000

In this paper, we propose a fast adaptive diamond search algorithm(FADS) for block matching motion estimation. Fast motion estimation algorithms reduce the computational complexity by using the UESA (Unimodal Error Search Assumption) that the matching error monotonically increases as the search moves away from the global minimum error. Recently many fast BMAs(Block Matching Algorithms) make use of the fact that the global minimum points in real world video sequences are centered at the position of zero motion. But these BMAs, especially in large motion, are easily trapped into the local minima and result in poor matching accuracy. So, we propose a new motion estimation algorithm using the spatial correlation among the adjacent blocks. We change the origin of search window according to the spatially adjacent motion vectors and their MAE(Mean Absolute Error). The computer simulation shows that the proposed algorithm has almost the same computational complexity with UCBDS(Unrestricted Center-Biased Diamond Search)〔1〕, but enhance PSNR. Moreover, the proposed algorithm gives almost the same PSNR as that of FS(Full Search), even for the large motion case, with half the computational load.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2005년도 추계종합학술대회
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• pp.339-342
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• 2005

We present an efficient block-based motion estimation algorithm with motion analysis. The motion analysis determines a size of search pattern and a maximum repeated count of search pattern. In case of large movement in large image, we reduce search points and the local minimum which caused by low performance. The proposed algorithm employs with searching step of 2. The first step determines an initial search point with neighbor block vector and a size of initial search pattern. The second step determines a size of search pattern and a maximum repeated count with motion analysis. We improve motion prediction accuracy while reducing required computational complexity compared to other fast block-based motion estimation algorithms.