• Title/Summary/Keyword: molybdenum(Mo)

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Diffusion barrier characteristics of molybdenum nitride films for ultra-large-scale-integrated Cu metallization(II); Effect of deposition conditions on diffusion barrier behavior of molybdenum nitride

  • Lee, Jeong-Joub;Lee, You-Kee;Jeon, Seok-Ryong;Kim, dong-Joon
    • Journal of Korean Vacuum Science & Technology
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    • v.1 no.1
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    • pp.30-37
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    • 1997
  • Interactions of Cu films with Si substrates separated by thin layers of molybdenum and molybdenum nitride were investigated in the viewpoint of diffusion barrier to copper. the diffusion barrier behavior of the layers was studied as functions of deposition and annealing conditions by cross-sectional transmission electron microscopy and Nomarski microscopy. the layers deposited at $N_2$ gas ratios of 0.4 and 0.5 exhibited good diffusion barrier behaviors up to $700^{\circ}C$, mainly due to the phase transformation of molybdenum to $\gamma$-Mo$_2$N phase. The increase in the N gas ratio in deposition elevates the lower limit of barrier failure temperature. Futhermore, amorphous molybdenum nitride films deposited at 20$0^{\circ}C$ and 30$0^{\circ}C$ did not fail, while the crystalline $\gamma$-Mo$_2$N films deposited at 40$0^{\circ}C$ and 50$0^{\circ}C$ showed signs of interlayer interactions between Cu and Si after annealing at 75$0^{\circ}C$ for 30 minutes. Therefore, the amorphous nature of the molybdenum nitride layer enhanced its ability to reduce Cu diffusion and its stability as a diffusion barrier at elevated temperatures.

Influence of sputtering pressure on structural and electrical properties of molybdenum thin film for solar cell application (태양전지용 Mo 박막의 스퍼터 압력에 따른 구조적, 전기적 특성의 변화)

  • Kim, Joong-gyu;Lee, Su-ho;Lee, Jae-hyung
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2013.05a
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    • pp.786-788
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    • 2013
  • Molybdenum (Mo) thin film has high electrical conductivity and has been used for a back contact of CIGS thin film solar cell. Generally, the electrical conductivity and the adhesion between the substrate and the film is greatly affected by sputtering conditions such as sputtering power, working pressure, and substrate temperature. In this study, Mo films were deposited by DC magnetron sputtering technique. The influence of sputtering pressure on the electrical and structural properties of Mo films was investigated by using SEM(scanning electron microscope), XRD(X-ray Diffraction), 4-point probe, Reflectance, Hall measurement.

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Ionic Equilibria and Ion Exchange of Molybdenum(VI) from Strong Acid Solution

  • Lee, Man-Seung;Sohn, Seong-Ho;Lee, Myung-Ho
    • Bulletin of the Korean Chemical Society
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    • v.32 no.10
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    • pp.3687-3691
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    • 2011
  • Ion exchange experiments of molybdenum(VI) from strong HCl and $H_2SO_4$ solution have been done to investigate the existence of anionic complexes. The concentration of HCl and $H_2SO_4$was changed from 1 to 9 M. From the data on the complex formation of molybdenum in aqueous solution, a new distribution diagram of Mo(VI) was constructed in the pH range from zero to 10. AG 1 X-8, an anion exchange resin, and Diphonix, a cation exchange resin were used in the loading experiments. Ion exchange results indicate that anionic complexes of Mo(VI) begins to form from 3 M HCl and 1 M $H_2SO_4$ solution and the tendency to form anionic complexes is stronger in HCl than in $H_2SO_4$ solution. Our results can be utilized in the analysis of Mo(VI) in strong acid solution and in the design of a process to separate Mo(VI).

Synthesis and Nucleation Behavior of MoO3 Nano Particles with Concentration of Precursors (전구체 농도에 따른 MoO3 나노 분말 합성 및 핵생성 거동)

  • Lee, Seyoung;Kwon, Namhun;Roh, Jaeseok;Lee, Kun-Jae
    • Journal of Powder Materials
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    • v.27 no.5
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    • pp.394-400
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    • 2020
  • Molybdenum trioxide (MoO3) is used in various applications including sensors, photocatalysts, and batteries owing to its excellent ionic conductivity and thermal properties. It can also be used as a precursor in the hydrogen reduction process to obtain molybdenum metals. Control of the parameters governing the MoO3 synthesis process is extremely important because the size and shape of MoO3 in the reduction process affect the shape, size, and crystallization of Mo metal. In this study, we fabricated MoO3 nanoparticles using a solution combustion synthesis (SCS) method that utilizes an organic additive, thereby controlling their morphology. The nucleation behavior and particle morphology were confirmed using ultraviolet-visible spectroscopy (UV-vis) and field emission scanning electron microscopy (FE-SEM). The concentration of the precursor (ammonium heptamolybdate tetrahydrate) was adjusted to be 0.1, 0.2, and 0.4 M. Depending on this concentration, different nucleation rates were obtained, thereby resulting in different particle morphologies.

Synergistic Effect of Nitrogen and Molybdenum on Localized Corrosion of Stainless Steels

  • Kim, Y.S.
    • Corrosion Science and Technology
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    • v.9 no.1
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    • pp.20-28
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    • 2010
  • According to the bipolar model, ion selectivity of some species in the passive film is important factor to control the passivation. An increase of cation selectivity of outer layer of the passive film can stabilize the film and improves the corrosion resistance. Therefore, the formation and roles of ionic species in the passive film should be elucidated. In this work, two types of solution (hydrochloric or sulfuric acid) were used to test high N and Mo-bearing stainless steels. The objective of this work was to investigate the formation of oxyanions in the passive film and the roles of oxyanions in passivation of stainless steel. Nitrogen exists as atomic nitrogen, nitric oxide, nitro-oxyanions (${NO_x}^-$), and N-H species, not nitride in the passive film. Because of its high mobility, the enriched atomic nitrogen can act as a reservoir. The formation of N-H species buffers the film pH and facilitates the formation of oxyanions in the film. ${NO_x}^-$ species improve the cation selectivity of the film, increasing the oxide content and film density. ${NO_x}^-$ acts similar to a strong inhibitor both in the passive film and at active sites. This facilitates the formation of chromium oxide. Also, ${NO_x}^-$ can make more molybdate and nitric oxide by reacting with Mo. The role of Mo addition on the passivation characteristics of stainless steel may differ with the test environment. Mo exists as metallic molybdenum, molybdenum oxide, and molybdate and the latter facilitates the oxide formation. When nitrogen and molybdenum coexist in stainless steel, corrosion resistance in chloride solutions is drastically increased. This synergistic effect of N and Mo in a chloride solution is mainly due to the formation of nitro-oxyanions and molybdate ion. Oxyanions can be formed by a 'solid state reaction' in the passive film, resulting in the formation of more molybdate and nitric oxide. These oxyanions improve the cation selectivity of the outer layer and form more oxide and increase the amount of chromium oxide and the ratio of $Cr_2O_3/Cr(OH)_3$ and make the film stable and dense.

Anti-Oxidation Property of Organo-Molybdenum Dialkyldithiophosphate (유용성 몰리부덴 화합물의 산화방지기능에 관한 연구)

  • 김영환;전광식
    • Tribology and Lubricants
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    • v.18 no.6
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    • pp.396-401
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    • 2002
  • ln this paper, the fuction of molybdenum dialkyl dithiophosphate (MoDTP) as an oxidation inhibitor of mineral oils was investigated and compared with 2,6-Di-tert-Butyl-4-Methylphenol (DBMP). Oxidation tests were conducted using an oxygen absorption apparatus. MoDTP showed anti-oxidation property, and length of induction time prolonged by increasing MoDTP concentration. However the induction time of DBMP was longer than those of MoDTP. The anti-oxidation property of MoDTP was found to be inferior to that of DBMP The capability of hydroperoxide decomposition ability with MoDTP was much greater than that with DBMP. However the rate constant of radical scavenging with MoDTP was much better than that with DBMP. It was found that the performance of MoDTP is exellent with respect to hydroperoxide decomposition but it is susceptible to chemical decomposition. From the fact that formation of phenol was observed when MoDTP was added to hexane solution of cumene hydroperoxide (CHPO), it is indicated that the decomposition of hydroperoxide with MoDTP occurs by means of ionic mechanism.

Fabrication of Molybdenum Alloys with Improved Fracture Toughness through the Dispersion of Lanthanum Oxide (란타넘 산화물의 분산을 통해 향상된 파괴인성을 갖는 몰리브데넘 합금의 제조)

  • Choi, Won June;Park, Chun Woong;Park, Jung Hyo;Kim, Young Do;Byun, Jongmin
    • Journal of Powder Materials
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    • v.26 no.3
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    • pp.208-213
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    • 2019
  • In this study, lanthanum oxide ($La_2O_3$) dispersed molybdenum ($Mo-La_2O_3$) alloys are fabricated using lanthanum nitrate solution and nanosized Mo particles produced by hydrogen reduction of molybdenum oxide. The effect of $La_2O_3$ dispersion in a Mo matrix on the fracture toughness at room temperature is demonstrated through the formation behavior of $La_2O_3$ from the precursor and three-point bending test using a single-edge notched bend specimen. The relative density of the $Mo-0.3La_2O_3$ specimen sintered by pressureless sintering is approximately 99%, and $La_2O_3$ with a size of hundreds of nanometers is uniformly distributed in the Mo matrix. It is also confirmed that the fracture toughness is $19.46MPa{\cdot}m^{1/2}$, an improvement of approximately 40% over the fracture toughness of $13.50MPa{\cdot}m^{1/2}$ on a pure-Mo specimen without $La_2O_3$, and this difference in the fracture toughness occurs because of the changes in fracture mode of the Mo matrix caused by the dispersion of $La_2O_3$.

Fabrication of Iron-Molybdenum Alloyed Nanoparticle and Nanowire using Chemical Vapor Condensation(CVC) (화학적 기상 응축(CVC)법을 이용한 철-몰리브덴합금 나노 입자와 와이어의 제조)

  • Ha, Jong-Keun;Cho, Kwon-Koo;Kim, Ki-Won;Ryu, Kwang-Sun
    • Journal of Powder Materials
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    • v.17 no.3
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    • pp.223-229
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    • 2010
  • Iron(Fe)-Molybdenum(Mo) alloyed nanoparticles and nanowires were produced by the chemical vapor condensation(CVC) process using the pyrolysis of iron pentacarbonyl($Fe(CO)_5$) and Molybdenum hexacarbonyl($Mo(CO)_6$). The influence of CVC parameter on the formation of nanoparticle, nanowire and size control was studied. The size of Fe-Mo alloyed nanoparticles can be controlled by quantity of gas flow. Also, Fe-Mo alloyed nanowires were produced by control of the work chamber pressure. Moreover, we investigated close correlation of size and morphology of Fe-Mo nanoparticles and nanowires with atomic quantity of inflow precursor into the electric furnace as the quantitative analysis. Obtained nanoparticles and nanowires were investigated by field emission scanning electron microscopy, energy dispersive spectroscopy and X-ray diffraction.

Electrical Resistance of Mo-doped $VO_2$ Films Coated on Graphite Conductive Plates by a Sol-gel Method (몰리브덴이 첨가된 이산화바나듐으로 표면처리한 탄소계 전도성판의 전기저항특성)

  • Choi, Won-Gyu;Jung, Hye-Mi;Lee, Jong-Hyun;Im, Se-Joon;Um, Suk-Kee
    • Proceedings of the KSME Conference
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    • 2008.11b
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    • pp.2007-2010
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    • 2008
  • Vanadium pentoxide ($V_2O_5$) powder was prepared and mixed with Molybdenum Oxides ($MoM_3$) to form Mo-doped and -undoped $VO_2$ films by a sol-gel method on graphite conductive substrates. X-Ray diffraction (XRD) and scanning electron microscopy (SEM) was used to investigate the chemical compositions and microstructures of the Mo-doped and -undoped $VO_2$ films. The variation of electrical resistance was measured as a function of temperature and stoichiometric composition between vanadium and molybdenum. In this study, it was found that Mo-doped and -undoped $VO_2$ shows the typical negative temperature coefficient (NTC) behavior. As the amount of the molybdenum increases, the electrical resistance of Modoped $VO_2$ film gets reduced under the transition temperature and a linear decrease in the transition temperature is observed. From these experimental results, we can conclude that the electrical resistance behavior with temperature change of $VO_2$ films can be utilized as a self-heating source with the electrical current flowing through the graphite substrate.

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