• Title/Summary/Keyword: mixture flow rate

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A Study on the Silicon Etching Characteristics in ECR using ${SF_6}/{Cl_2}$ Gas Mixtures (${SF_6}/{Cl_2}$ 혼합비에 따른 실리콘 식각 특성 고찰)

  • 이상균;강승열;권광호;이진호;조경익;이형종
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.2
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    • pp.114-119
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    • 2000
  • Etch characteristics of SF6/CI2 electron cyclotron resonance (ECR) plasmas have been investigated. Surface reaction of gas plasma with polysilicon was also analysed using X-ray photoelectron spectroscopy (XPS). At the same time, the relationship between surface reaction and the etched profile of polysilicon was examined using XPS. The etch rate of polysilicon and oxide increases with increasing flow rate of SF6 in the SF6/CI2 gas mixture, and tis selectivity also increase also increase. It was also found that as increasing flow rate of SF6 in the SF6/CI2 gas mixture, the atomic% of chlorine detected at surface region decrease, but F and S contents increase. At the same time, when the mixing ratio of SF6 gas increases, the anisotropy of etched polysilicon is sharply decreased in the 0%~10% range of the SF6 mixing ratio, but is rarely varied in the range over 10%, in spite of the large variations in flow rates. It can be explained that the bonding of S-Si due to SiSx(x$\leq$2) compound formed on the etched surface suppress the formation of Si-Cl and 'or Si-F bonding in the silicon etching.

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Analysis of Convective Boiling Heat Transfer for Refrigerant Mixtures in Annular Horizontal Flow (혼합냉매의 환상 유동 증발열전달 해석)

  • Sin, Ji-Yeong;Kim, Min-Su
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.20 no.2
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    • pp.720-729
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    • 1996
  • An analysis of convective boiling heat transfer for refrigerant mixtures is performed for an annular flow to investigate the degradation of the heat transfer rate. Annular flow is selected in this study because a great portion of the evaporator in the refrigeration and air conditioning system is known to be in the annular flow regime. Mass transfer effect due to composition difference between liquid and vapor is included in this analysis, which is considered to be one of driving forces for the mass transfer at the interface. Due to the concentration gradient at the interface the mass transfer is interfered, so is the evaporative heat transfer at the interface. The mass transfer resistance makes the interface temperature slightly higher and, as a result, the heat transfer coefficients decrease compared with those without mass transfer effects. The degradatioin of the heat transfer rate reaches its maximum at a certain composition. The composition difference between vapor core and vapor at the interface has a direct effect on the temperature difference between the vapor core and the interface and the degradation of the heat transfer rate. Correction factor $C_{F}$ for the mixture effects is added to the correlation for pure substances and the flow boiling heat transfer coefficients can be calculated using the modified equation.n.

Thermo-fluid Dynamic Analysis through a Numerical Simulation of Canister (수치 모사를 통한 사출관 내부의 열유동 해석)

  • Kim, Hyun muk;Bae, Seong hun;Park, Cheol hyeon;Jeon, Hyeok soo;Kim, Jeong Soo
    • Journal of the Korean Society of Propulsion Engineers
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    • v.21 no.1
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    • pp.72-83
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    • 2017
  • A thermo-fluid dynamic analysis was performed through the numerical simulation of a missile canister. Calculation was made in a fixed analytical volume and fully evaporated water was used as a coolant. To analyze the interaction among the hot gas, coolant, and mixture flow, Realizable $k-{\varepsilon}$ turbulence and VOF(Volume Of Fluid) model were chosen and parametric study was performed with the change of coolant flow rate. It could be found that the pressure on the canister top nonlinearly increased with the increase of coolant flow rate. Temperature and coolant distribution were closely related to the flow behavior in canister. Temperature on the canister bottom indicated a decrease being proportional to coolant flow rate in early times but after a specific time, the temperature increased with the tendency being reversed. In addition, the early part of temperature showed a fluctuating phenomenon because of the overall circulatory flow of mixture gas.

A Study on the Multiphase Flow Characteristics in an Mud System (머드시스템의 다상 유동 특성 연구)

  • Lee, Wang-Do;Han, Sang-Mok;Chun, Joong-Ho
    • Journal of the Korean Society of Industry Convergence
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    • v.24 no.6_2
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    • pp.737-744
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    • 2021
  • An investigation is conducted to study a solid-liquid mixture vertically upward hydraulic transport of solid particles by non-Newtonian fluids in the Mud system. Rheology of particulate suspensions in viscoelastic fluids is of importance in many applications such as particle removal from surfaces, transport of proppants in fractured reservoir and cleaning of drilling holes, etc. In this study a clear acrylic pipe was used in order to observe the movement of solid particles. Annular velocities varied from 0.4 m/s to 1.2 m/s. The mud systems which were utilized included aqueous solution of sodium carboxymethyl cellulose (CMC) solutions. Main parameters considered in the study were inner-pipe rotary speed, fluid flow regime and particle injection rate. Solid volumetric concentration and pressure drops were measured for the various parameters such as inclination angle, flow rate, and rotational speed of inner cylinder.

Study on the Strategy of Numerical Modeling for Hybrid Combustion (하이브리드 연소의 수치 모델링 전략에 관한 연구)

  • Yoon, Changjin;Kim, Jinkon;Moon, Heejang
    • Journal of Aerospace System Engineering
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    • v.1 no.2
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    • pp.37-42
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    • 2007
  • This paper proposes a numerical modeling approach to simulate the hybrid combustion phenomena. From the physical understandings of hybrid combustion, the computational domain was separated into three regions: the solid fuel, gas phase reactive flow, and the interface between solid and fluid. Moreover, for the accurate calculation, computational grids for these regions was generated at every time step considering the instantaneous moving interface which are governed by the balance equations using thermal pyrolysis. In the domain of reactive flow, by virtue of diffusion flame structure, turbulent combustion modeling was introduced using either mixture fraction approach or mean reaction rate approach.

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Fundamental Properties of Fireproofing Mortar Containg Perlite (펄라이트를 혼합한 내화모르타르의 기초적 물성)

  • Choi, Yun-Wang;Moon, Dae-Joong;Kim, Kyung-Hwan;Ha, Sang-Woo;Jung, Jea-Guane
    • Proceedings of the Korea Concrete Institute Conference
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    • 2006.05b
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    • pp.605-608
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    • 2006
  • The purpose of this research is to develop the fireproofing mortar through the improved fireproofing properties. Therefore, after manufactured the mortor by changing the mixture rate of the perlite(PL) in three level, we investigated air content, flow value and compressive strength. As a result of this research, as the mixture rate was increased and the air content was also increased. But the flow ability and the compressive strength of the mortar were comparably decreased. Beside, we also found that there is efficiency of the lightweight by mixed PL.

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A Study on the Development of Industrial Dryer using the Superadiabatic Combustion Phenomena (초단열 연소현상을 이용한 산업용 건조기 개발에 관한 연구)

  • Chae, J.O.;Hwang, J.W.;Han, J.H.;Hwang, H.J.;Jun, J.K.;Han, J.O.;Lee, J.S.;You, H.S.;Lee, H.C.
    • Proceedings of the KSME Conference
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    • 2000.04b
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    • pp.168-174
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    • 2000
  • This paper illustrates the validity of reciprocating type superadiabatic combustor as a industrial applicable dryer. After the investigations of inner and surface temperature distributions of combustor various with air-fuel(methane) ratio, mixture flow rate and reciprocating time, this combustor can be applied in industrial dryer at certain operating conditions. The results are as follows. 1) Higher equilivalence ratio emits more radiation heat flux at the censer chamber 2) Higher mixture flow rate makes more uniform temperature distribution. however, due to the heat transfer from censer chamber to porous media, the radiation beat flux is worse. 3) Longer reciprocating time emit more radiation heat flux. however, this case also makes temperature distribution wide

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CAVITATION FLOW SIMULATION FOR A 2-D HYDROFOIL USING A HOMOGENEOUS MIXTURE MODEL ON UNSTRUCTURED MESHES (비정렬 격자계에서 균질혼합 모델을 이용한 2차원 수중익형 주위의 캐비테이션 유동 해석)

  • Ahn, S.J.;Kwon, O.J.
    • Journal of computational fluids engineering
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    • v.17 no.1
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    • pp.94-100
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    • 2012
  • In this paper, the cavitating flows around a hydrofoil have been numerically investigated by using a 2-d multi-phase RANS flow solver based on pseudo-compressibility and a homogeneous mixture model on unstructured meshes. For this purpose, a vertex-centered finite-volume method was utilized in conjunction with 2nd-order Roe's FDS to discretize the inviscid fluxes. The viscous fluxes were computed based on central differencing. The Spalart-Allmaras one equation model was employed for the closure of turbulence. A dual-time stepping method and the Gauss-Seidel iteration were used for unsteady time integration. The phase change rate between the liquid and vapor phases was determined by Merkle's cavitation model based on the difference between local and vapor pressure. Steady state calculations were made for the modified NACA66 hydrofoil at several flow conditions. Good agreements were obtained between the present results and the experiment for the pressure coefficient on a hydrofoil surface. Additional calculation was made for cloud cavitation around the hydrofoil. The observation of the vapor structure, such as cavity size and shape, was made, and the flow characteristics around the cavity were analyzed. Good agreements were obtained between the present results and the experiment for the frequency and the Strouhal number of cavity oscillation.

An Experimental Study on the Noise Generation Mechanisms of Propane Premixed Flames (프로판 예혼합화염의 소음발생 매커니즘에 관한 실험적 연구)

  • Lee, Won-Nam;Park, Dong-Soo
    • 한국연소학회:학술대회논문집
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    • 2004.06a
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    • pp.27-33
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    • 2004
  • The Noise generation mechanisms of propane laminar premixed flames on a slot burner have been studied experimentally. The sound levels and frequencies were measured for various mixture flow rates (velocities) and equivalence ratios. The primary frequency of self-induced noise increases with the mean velocity of mixture as $f{\;}{\propto}{\;}U_f^{1.144}$ and the measured noise level increases with the mixture flow rate and equivalence ratio as $p{\;}{\propto}{\;}U_f^{1.7}$$F^{8.2}$. The nature of flame oscillation and the noise generation mechanisms are also investigated using a high speed CCD camera and a DSRL camera. The repetition of sudden extinction at the tip of flame is evident and the repetition rates are identical to the primary frequencies obtained from the FFT analysis of sound pressure signals. CH chemiluminescence intensities of the oscillating flames were also measured by PMT with a 431 nm(10 FWHM) band pass filter and compared to the pressure signals.

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Experimental Study on the Performance of Heat Pump Using Refrigerant Mixture R22/R142b (R22/R142b 혼합냉매를 사용한 열펌프의 성능)

  • Kim, M.S.;Chang, S.D.;Ro, S.T.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.4 no.1
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    • pp.33-47
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    • 1992
  • Experimental investigation on the performance of a heat pump system using refrigerant mixtures is done. The condenser and the evaporator are double pipe heat exchangers of counter flow type and the compressor is driven by a variable speed motor. The refrigerant mixture used in the experiment is R22/R142b. Experiments are performed by changing the compressor speed, composition on ratio of mixture, and the average temperatures of condenser and evaporator. The compressor work, heating capacity and the coefficient of performance are calculated. Results show that the heating capacity can be changed by varying the mass flow rate of refrigerant mixtures to meet the heating load. It is shown that the capacity control by changing the composition ratio is more effective than by changing the compressor speed. Under the condition where the external conditions are fixed and the heating loads are equal, the coefficient of performance has its maximum value near 50 : 50 mass fraction of the refrigerant mixture in this study.

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