• 제목/요약/키워드: microvibration

검색결과 24건 처리시간 0.025초

초정밀 스테이지용 능동 진동제어시스템 설계 (Active Vibration Control System Design for Nano-scale Stage)

  • 이주훈;이세한;황돈하;김용주;최영규
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 하계학술대회 논문집 D
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    • pp.2495-2497
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    • 2004
  • A system, featuring the hybrid isolator for control in the vertical direction, of active microvibration control was proposed. The main components of this system are a stage vibration isolation table with built-in acceleration sensors for detecting microvibration, hybrid isolators and a digital controller with high precision signal converters. The vibration control algorithm is focused on settling-time critical application and feedback/feedforward combination.

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미진동 저감을 위한 복합형 전자기식 액추에이터 설계 (Design of Hybrid Electromagnetic Actuator against Microvibration)

  • 문석준;최상민;정종안;김철호
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2009년도 추계학술대회 논문집
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    • pp.299-304
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    • 2009
  • A hybrid electromagnetic actuator with an air spring is designed so as to achieve the desired isolation reduce the vibration efficiency on the floor vibration. The performance specification of the hybrid electromagnetic actuator is determined based on the vibration criterion for vibration-sensitive equipment. In basic design stage of the electromagnetic actuator, the simple reluctance method is adapted to analyze magnetic circuits. The result is verified by finite element analysis using ANSYS Emag. Finally, some design parameters are optimized under several constraint conditions. Through this study, the design procedure for a specific electromagnetic actuator is set up using a simple reluctance method.

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미진동 저감을 위한 복합형 전자기식 작동기의 개발에 대한 연구 (A Study on the Development of a Hybrid Electromagnetic Actuator Against Microvibration)

  • 문석준;박수홍;정종안;허영철;김철호;최상민
    • 한국소음진동공학회논문집
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    • 제21권5호
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    • pp.475-483
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    • 2011
  • A hybrid electromagnetic actuator with an air mount is designed so as to achieve the desired isolation reduce the vibration efficiency on the floor vibration. The performance specification of the hybrid electromagnetic actuator is determined based on the vibration criterion for vibration-sensitive equipment. In the design stage of the electromagnetic actuator, the simple reluctance method is adapted to analyze magnetic circuits. The result is verified by finite element analysis using ANSYS Emag. Finally, in order to confirm the design performance, a dynamic characteristic test is carried out for the prototype of a hybrid electromagnetic actuator.

포토커플러를 이용한 미세 진동 측정장치 (Development of Microvibration Sensing Appratus using Photo Coupler)

  • 김호수;구경완;이명섭;김유배;이승권
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.798-801
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    • 2001
  • we have investigated a characteristic of a vibration displacement detector, which was made with a photocoupler. Output signals of the detector were dominant at 700Hz of the frequency of vibrator, and It was maximum, when the amplitude of input signal had been at 1.1V. The detector will be used in measuring the surface roughness of substrates.

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렌즈 시프팅 영상 안정화 기법 적용을 위한 위성카메라의 광학설계 (Optical Design of Satellite Camera for Lens Shifting Image Stabilization)

  • 탁준모;황재혁
    • 항공우주시스템공학회지
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    • 제10권4호
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    • pp.17-25
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    • 2016
  • 본 연구에서는 초점면부 영상안정화 기법 중 렌즈 시프팅 영상안정화 기법에 적용될 광학설계를 수행하였다. 렌즈 시프팅 기법은 광학탑재체로 전달되는 미세진동외란을 보상하기 위해 광 경로를 바꿔주는 영상 안정화 기법이다. 실제 위성카메라의 제원을 참고하여 렌즈 시프팅 기법이 적용될 광학계의 요구도를 수립하였으며, 광학설계 프로그램인 Code-V를 이용해 광학계를 설계하였다. 설계된 광학계가 요구 조건을 충족하였는지 검증하기 위해 시야에 따른 광선 수차분석, 스팟 다이어그램 분석, MTF 선도분석을 수행하였다. 최종적으로 설계된 광학계는 슈미트 카세그라인 타입에 필드 플래트너와 진동보상 렌즈가 삽입된 형태이며, 주반사경 직경은 200 mm, GSD 2.87m, 나이퀴스트 주파수에서 MTF 33%으로 광학계 성능요구도를 만족하였다. 본 연구에서 설계된 진동보상렌즈의 입사광선에 대한 진동계수는 0.95~1.00 으로 성능 요구도를 만족하였다.

스텝모터 구동형 짐벌 안테나의 미소진동저감을 위한 초탄성 형상기억합금 메쉬 와셔 기어의 기본특성 분석 (Characteristics Analysis of a Pseudoelastic SMA Mesh Washer Gear for Jitter Attenuation of Stepper-actuated Gimbal-type Antennas)

  • 박연혁;유창목;오현웅
    • 항공우주시스템공학회지
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    • 제12권2호
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    • pp.46-58
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    • 2018
  • 고해상도 관측위성의 대용량 영상 데이터 송신용인 2축 짐벌식 X-밴드 안테나는 궤도 임무수행 중 안테나 구동에 따라 미소진동을 유발하며, 이는 관측위성의 영상 품질을 저하시키는 요인 중 하나이기 때문에 반드시 절연되어야 할 대상이다. 본 논문에서는 상기 X-밴드 안테나의 방위각 구동에 따른 미소진동절연과 동시에 기존에 제안된 티타늄 블레이드 기어가 소성변형에 취약한 문제점을 보완하기 위해 초탄성 형상기억합금 (SMA)을 활용한 메쉬 와셔 기어를 제안하였다. 상기 SMA 메쉬 와셔 기어의 기본 특성을 파악하기 위해 SMA 메쉬 와셔 두께방향 정하중 시험과 SMA 메쉬 와셔 기어 수준의 회전방향정하중 시험을 실시하였다. 아울러 안테나 조립체 수준의 미소진동 측정시험을 통해 제안된 SMA 메쉬와셔 기어의 진동절연이 효과적임을 입증하였다.

실험적 모드해석법에 의한 이중바닥구조의 동특성 해석 (Experimental Model Analysis of Double Floor)

  • 변근주;노병철;이헌주;이호범
    • 한국콘크리트학회:학술대회논문집
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    • 한국콘크리트학회 1993년도 가을 학술발표회 논문집
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    • pp.207-212
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    • 1993
  • When constructing highly precise production plants, for example, super LSI plants or semiconductor plants, it is important to take the necessary control countermeasures into consideration to obtain the working microvibration environment, which is directly related to product precision. Working environment of a clean room means vibration-free and there are only ultra-miro vibration which human cannot sense. In order to provide an place having a vibration-free working environment with only ultra-micro vibration it is necessary to posses a great number of vibration isolation technlogies, wide-ranging and abundant survey and teat data, and a high level of knowledge enabling comprehensive judgments to be made. In this study, experimental modal analysis is used to analyze the dynamic characteristics of double floor for vibration-proofing near apparatus which generate vibration. It is concluded that the double floor system with rubber pad inserted between floor panel and pedestal is good for vibration proof.

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노치 필터 제어기법을 이용한 반작용 휠 미소진동 절연장치의 절연성능 평가 (Performance Evaluation of RWA Vibration Isolator Using Notch Filter Control)

  • 박지용;서종은;이대은;한재흥
    • 한국소음진동공학회논문집
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    • 제26권4호
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    • pp.391-397
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    • 2016
  • Vibration disturbances induced by the reaction wheels can severely degrade the performance of high precision payloads on board satellites with high pointing stability requirements. The unwanted disturbances produced by the reaction wheels are composed of fundamental harmonic disturbances due to the flywheel imbalance and sub/higher harmonic disturbances due to bearing irregularities, motor imperfections and so on. Because the wheel speed is constantly changed during the operation of a reaction wheel, the vibration disturbance induced by the reaction wheels can magnify the satellite vibration when the rotating frequency of wheel meets the natural frequency of satellite structure. In order to provide an effective isolation of the reaction wheel disturbances, isolation performance of a hybrid vibration isolator is investigated. In this paper, hybrid vibration isolator that combines passive and active components is developed and its hybrid isolation performance using notch filter control is evaluated in single-axis. The hybrid isolation performance using notch filter control show additional performance improvement compared to the results using only passive components.