Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Active Vibration Control System Design for Nano-scale Stage

초정밀 스테이지용 능동 진동제어시스템 설계

  • 이주훈 (한국전기연구원 기기제어응용연구그룹) ;
  • 이세한 (한국전기연구원 기기제어응용연구그룹) ;
  • 황돈하 (한국전기연구원 기기제어응용연구그룹) ;
  • 김용주 (한국전기연구원 기기제어응용연구그룹) ;
  • 최영규 (부산대학교 전기공학과)
  • Published : 2004.07.14
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Abstract

A system, featuring the hybrid isolator for control in the vertical direction, of active microvibration control was proposed. The main components of this system are a stage vibration isolation table with built-in acceleration sensors for detecting microvibration, hybrid isolators and a digital controller with high precision signal converters. The vibration control algorithm is focused on settling-time critical application and feedback/feedforward combination.

Keywords