• Title/Summary/Keyword: microstructure effect

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Effect of high-temperature annealing on the microstructure of laterally crystallized polycrystalline Si films and the characteristics of thin film transistor (고온열처리가 측면결정화시킨 다결정 실리콘 박막의 미세구조와 박막트랜지스터 특성에 미치는 영향)

  • 이계웅;김보현;안병태
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.70-70
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    • 2003
  • 금속용액을 이용하여 측면고상결정화 시킨 다결정 실리콘 박막내의 고각입계를 줄이기 위해 서 고온열처리를 실시하였다. SEM과 TEM을 이용하여 다결정 실리콘내의 바늘모양의 결정립의 폭의 증가를 관찰하였고, 결정 립내의 결함이 감소를 관찰하였다. 그리고 결정화된 다결정 실리콘의 표면 거칠기를 AFM이용하여 퍼니스에서 53$0^{\circ}C$에서 25시간 동안 결정화 시킨 시편과 이후 80$0^{\circ}C$에서 40분간 추가 고온 열처리시킨 시편을 비교한 결과 6.09$\AA$에서 4.22$\AA$으로 개선되었음을 확인할 수 있었다. 박막내의 금속에 의한 오염을 줄이기 위해 금속의 농도를 줄인 금속용액을 결정화에 사용하였다. 이때 저농도 금속용액을 사용하여 측면결정화시킨 다결정 실리콘 박막내의 소각입계를 이루는 결정립군의 크기가 고농도 금속용액을 이용하여 측면결정화시킨 경우보다 증가함을 확인 할 수 있었다. 박막트랜지스터를 제작하여 트랜지스터의 전기적특성을 살펴보았다. 전계이동도가 80$0^{\circ}C$ 고온 열처리에 의해서 53$\textrm{cm}^2$/Vsec 에서 95$\textrm{cm}^2$/Vsec 로 상승하였는데 이는 고온열처리에 의해서 측면결정화된 다결정 실리콘내의 트랩 밀도가 2.2$\times$$10^{12}$/$\textrm{cm}^2$ 에서 1.3$\times$$10^{12}$$\textrm{cm}^2$로 감소하였기 때문이다.

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ISB Bonding Technology for TSV (Through-Silicon Via) 3D Package (TSV 기반 3차원 반도체 패키지 ISB 본딩기술)

  • Lee, Jae Hak;Song, Jun Yeob;Lee, Young Kang;Ha, Tae Ho;Lee, Chang-Woo;Kim, Seung Man
    • Journal of the Korean Society for Precision Engineering
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    • v.31 no.10
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    • pp.857-863
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    • 2014
  • In this work, we introduce various bonding technologies for 3D package and suggest Insert-Bump bonding (ISB) process newly to stack multi-layer chips successively. Microstructure of Insert-Bump bonding (ISB) specimens is investigated with respect to bonding parameters. Through experiments, we study on find optimal bonding conditions such as bonding temperature and bonding pressure and also evaluate in the case of fluxing and no-fluxing condition. Although no-fluxing bonding process is applied to ISB bonding process, good bonding interface at $270^{\circ}C$ is formed due to the effect of oxide layer breakage.

Microstructure and shear modulus in concentrated dispersions of bidisperse charged spherical colloids

  • Chun, Myung-Suk;Lee, Sangwoo;Lee, Tae-Seok;Cho, Jae-Seol
    • Korea-Australia Rheology Journal
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    • v.16 no.1
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    • pp.17-26
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    • 2004
  • We examine rigorous computations on microstructural as well as rheological properties of concentrated dispersions of bidisperse colloids. The NVT Monte Carlo simulation is applied to obtain the radial distribution function for the concentrated system. The long-range electrostatic interactions between dissimilar spherical colloids are determined using the singularity method, which provides explicit solutions to the linearized electrostatic field. The increasing trend of osmotic pressure with increasing total particle concentration is reduced as the concentration ratio between large and small particles is increased. From the estimation of total structure factor, we observe the strong correlations developed between dissimilar spheres. As the particle concentration increases at a given ionic strength, the magnitude of the first peak in structure factors increases and also moves to higher wave number values. The increase of electrostatic interaction between same charged particles caused by the Debye screening effect provides an increase in both the osmotic pressure and the shear modulus. The higher volume fraction ratio providing larger interparticle spacing yields decreasing high frequency limit of the shear modulus, due to decreasing the particle interaction energy.

Effect of Substrate Bias Voltage on the Properties of Hafnium Nitride Films Deposited by Radio Frequency Magnetron Sputtering Assisted by Inductive Coupled Nitrogen Plasma

  • Heo, Sung-Bo;Lee, Hak-Min;Kim, Dae-Il;Choi, Dae-Han;Lee, Byung-Hoon;Kim, Min-Gyu;Lee, Jin-Hee
    • Transactions on Electrical and Electronic Materials
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    • v.12 no.5
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    • pp.209-212
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    • 2011
  • Hafnium nitride (HfN) thin films were deposited onto a silicon substrate by inductive coupled nitrogen plasma-assisted radio frequency magnetron sputtering. The films were prepared without intentional substrate heating and a substrate negative bias voltage ($-V_b$) was varied from -50 to -150 V to accelerate the effects of nitrogen ions ($N^+$) on the substrate. X-ray diffractometer patterns showed that the structure of the films was strongly affected by the negative substrate bias voltage, and thin film crystallization in the HfN (100) plane was observed under deposition conditions of -100 $V_b$ (bias voltage). Atomic force microscopy results showed that surface roughness also varied significantly with substrate bias voltage. Films deposited under conditions of -150 $V_b$ (bias voltage) exhibited higher hardness than other films.

Evaluation of Weldability on Identical and Dissimilar Welding Parts of Austenite Stainless Steel by GTAW (오스테나이트 스테인리스강에 대한 가스텅스텐 아크용접 시동종 및 이종 용접부의 용접성 평가)

  • Han, Min-Su;Park, Jae-Cheul;Kim, Seong-Jong
    • Journal of Advanced Marine Engineering and Technology
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    • v.35 no.1
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    • pp.68-74
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    • 2011
  • This papers investigated the mechanical characteristics and the weldability of identical as well as dissimilar welding by GTAW for STS 304 and STS 316L. It is applied to double wall gas pipe of duel fuel engine for LNG carrier. Consequently, the weldability of dissimilar and identical welded zone of STS 304 decreased compared to base metal significantly. The result of microstructure observation for welded zone, a degree of acicular ferrite in welding zone for STS 304 presented more than STS 316L. The hardness of welding zone for STS 304 presented higher value than that for STS 316L by this effect.

Optimal Reheating Condition of Semi-solid Material in Semi-solid Forging by Neural Network

  • Park, Jae-Chan;Kim, Young-Ho;Park, Joon-Hong
    • International Journal of Precision Engineering and Manufacturing
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    • v.4 no.2
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    • pp.49-56
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    • 2003
  • As semi-solid forging (SSF) is compared with conventional casting such as gravity die-casting and squeeze casting, the product without inner defects can be obtained from semi-solid forming and globular microstructure as well. Generally, SSF consists of reheating, forging, and ejecting processes. In the reheating process, the materials are heated up to the temperature between the solidus and liquidus line at which the materials exists in the form of liquid-solid mixture. The process variables such as reheating time, reheating temperature, reheating holding time, and induction heating power has large effect on the quality of the reheated billets. It is difficult to consider all the variables at the same time for predicting the quality. In this paper, Taguchi method, regression analysis and neural network were applied to analyze the relationship between processing conditions and solid fraction. A356 alloy was used for the present study, and the learning data were extracted from the reheating experiments. Results by neural network were in good agreement with those by experiment. Polynominal regression analysis was formulated using the test data from neural network. Optimum processing condition was calculated to minimize the grain size and solid fraction standard deviation or to maximize the specimen temperature average. Discussion is given about reheating process of row material and results are presented with regard to accurate process variables fur proper solid fraction, specimen temperature and grain size.

A Study on the Friction and Wear Characteristics of C-N Coated Spur Gear (C-N 코팅 스퍼기어의 마찰${\cdot}$마모 특성에 관한 연구)

  • Lu Long;Lyu Sung-ki
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2004.11a
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    • pp.41-46
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    • 2004
  • This study deals with the friction and wear characteristics of C-N coated spur gear. The PSII apparatus was built and a SCM415 test piece and test gear with steel substrate was treated with carbon nitrogen by this apparatus. The composition and structure of the surface layer were analyzed and compared with that of PVD coated TiN layer. It was found that both of friction coefficients of C-N coating and TiN coaling decreased with increasing load, however, C-N coating showed relatively lower friction coefficient than that of TiN coating. We was investigated the effect of C-N coating on hardness, friction and wear. The TiN coated gear showed more serious friction phenomena than that of C-N coated gear. It was considered that coating of TiN, which was conducted at a vacuum chamber at about $500^{\circ}C$ results in a tempering of base material that causes microstructure change, which in turn resulted in decreasing of hardness. The C-N coated gear and pinion had higher wear resistance that of TiN coated gear and pinion. C-N coating significantly improved the friction and wear resistance of the gear.

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Applications to Thin Film Processing to Solid Oxide Fuel Cells

  • Kim, Eui-Hyun;Hwang, Hee-Su;Ko, Myeong-Hee;Hwang, Jin-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.696-696
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    • 2013
  • Solid Oxide Fuel Cells (SOFCs) have been gaining academic/industrial attention due to the unique high efficiency and minimized pollution emission. SOFCs are an electrochemical system composed of dissimilar materials which operates at relatively high temperatures ranging from 800 to 1000oC. The cell performance is critically dependent on the inherent properties and integration processing of the constituents, a cathode, an electrolyte, an anode, and an interconnect in addition to the sealing materials. In particular, the gas transport, ion transport, and by-product removal also affect the cell performance, in terms of open cell voltages, and cell powers. In particular, the polarization of cathode materials is one of the main sources which affects the overall function in SOFCs. Up to now, there have been studies on the materials design and microstructure design of the component materials. The current work reports the effect of thin film processing on cathode polarization in solid oxide fuel cells. The polarization issues are discussed in terms of dc- and ac-based electrical characterizations. The potential of thin film processing to the applicability to SOFCs is discussed.

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Effect of Air-jet Texturing Conditions on the Physical Properties of Low Melting Polyester/Tencel Composite Yarn (에어제트 텍스처링 조건이 저융점 폴리에스터/텐셀 복합사의 물리적 특성에 미치는 영향)

  • Lee, Sun Young;Yoo, Jae Jung;Choi, Oh Gon;Lee, Si Woo;Lee, Seung Goo
    • Textile Coloration and Finishing
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    • v.25 no.1
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    • pp.47-55
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    • 2013
  • Physical properties of the composite yarn using low-melting(LM) polyester/Tencel were investigated with air-jet texturing conditions such as temperature, take-up overfeed, yarn speed and air pressure. Surface morphology, microstructure, tensile property, glossiness were evaluated. Surface morphology of a composite yarn had more damaged and loosened structure according to increase of take-up overfeed, yarn speed and air pressure. Crystallinity was affected by parameters such as temperature, yarn speed, take-up overfeed and air pressure and especially, yarn speed was most effective for increase of crystallinity. Also, it was found that temperature and air pressure had significantly affected tensile properties of a composite yarn. The glossiness of yarn increased with increase of temperature, yarn speed and air pressure.

Effect of Hot Isostatic Pressing on the Microstructure and Properties of Kinetic Sprayed Nb Coating Material (Kinetic Spray 공정으로 제조된 Nb 코팅 소재의 미세조직 및 물성에 미치는 열간 등압 성형(HIP)의 영향)

  • Lee, Ji-Hye;Yang, Sangsun;Lee, Kee-Ahn
    • Journal of Powder Materials
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    • v.23 no.1
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    • pp.15-20
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    • 2016
  • Niobium is one of the most important and rarest metals, and is used in the electronic and energy industries. However, it's extremely high melting point and oxygen affinity limits the manufacture of Nb coating materials. Here, a Nb coating material is manufactured using a kinetic spray process followed by hot isotactic pressing to improve its properties. OM (optical microscope), XRD (X-ray diffraction), SEM (scanning electron microscopy), and Vickers hardness and EPMA (electron probe micro analyzer) tests are employed to investigate the macroscopic properties of the manufactured Nb materials. The powder used to manufacture the material has angular-shaped particles with an average particle size of $23.8{\mu}m$. The porosity and hardness of the manufactured Nb material are 0.18% and 221 Hv, respectively. Additional HIP is applied to the manufactured Nb material for 4 h under an Ar atmosphere after which the porosity decreases to 0.08% and the hardness increases to 253 Hv. Phase analysis after the HIP shows the presence of only pure Nb. The study also discusses the possibility of using the manufactured Nb material as a sputtering target.