• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.24 no.7
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• pp.525-536
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• 2014

In this paper, GUI program for microspeaker system simulation program was developed and verified through closed box, vent box and 6th order bandpass enclosure system. By using the pseudo loudspeaker model concept, TS parameters and rear volume of microspeaker were identified. Their suitabilities were proved by comparing test results with simulations of electrical impedance and sound pressure response curves for the three box types; closed box, vent box and 6th order bandpass box. Also, MSSP was found to be effective regardless of the microspeaker's shape, either circular or rectangular shape. MSSP can be used for the microspeaker system simulation, and can give a general prediction of such as; sound pressure level curve, electrical impedance, diaphragm velocity and displacement curve according to multiple design parameters; diaphragm mass, compliance, force factor, front and rear volume, front and rear port's diameter and length.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.11
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• pp.1112-1118
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• 2007

It was discussed to identify Thiele Small Parameters for Pseudo loudspeaker within 10mm grade microspeaker attached to closed-box using known dynamic mass of moving parts. Also, enhanced circuit model for vented-box micro speaker system was used to more accurately simulate electrical impedance curves for real vented-box microspeaker system and compared to test results. Consequently, it showed that micro speaker could be modeled by pseudo loudspeaker TS parameters similar to general loudspeaker. Vented-box microspeaker model with pseudo loudspeaker TS parameters was well suited to describe real microspeaker. Also, it was proposed to estimate volume of rear closed-box of microspeaker without design specifications.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.6
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• pp.531-537
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• 2006

A micromachined piezoelectric microspeaker was fabricated with a highly c-axis oriented ZnO thin film on a silicon-nitride film having compressive residual stress. When it was measured 3 mm away from the microspeaker in open field, the largest sound pressure level produced by the fabricated microspeaker was about 91 dB at around 2.9 kHz for the applied voltage of $6\;V_{peak-to-peak}$. The key technologies to these successful results were as follows: (1) the usage of a wrinkled diaphragm caused by the high compressive residual stress of silicon-nitride thin film, (2) the usage of the highly c-axis oriented ZnO thin film.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.4
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• pp.473-479
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• 2008

With the advent of mobile phone, digital multimedia broadcasting(DMB) service is to be realized for multimedia data communication. For an acoustic part, a smaller and lighter microspeaker is also soon to be realized as an MP3 song player and a speakerphone. Sound quality in the microspeaker is becoming more important in mobile phones. It is evaluated by total harmonic distortion(THD). THD is the proportion of higher order frequencies output response to sinusoidal input signal. It is affected by uneven magnetic distribution and nonlinear response of diaphragm. In this paper, harmonic distortion is analyzed by considering magnetic and mechanical coupling effects. Simulated results of THD are compared with experimental data. Results show that THD in lower frequency range is higher due to high displace on voice coil and high mechanical response of high order frequency.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.04a
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• pp.236-241
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• 2008

With the advent of mobile phone, Digital multimedia broadcasting (DMB) service is to be realized for multimedia data communication. For an acoustic part, a smaller and lighter microspeaker is also soon to be realized as an MP3 song player and a speakerphone. Sound quality in the microspeaker is becoming more important in mobile phones. It is evaluated by total harmonic distortion (THD). THD is the proportion of higher order frequencies output response to sinusoidal input signal. It is affected by uneven magnetic distribution and nonlinear response of diaphragm. In this paper, harmonic distortion is analyzed by considering magnetic and mechanical coupling effects. Simulated results of THD are compared with experimental data. Results show that THD in lower frequency range is higher due to high displace on voice coil and high mechanical response of high order frequency.

• ETRI Journal
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• v.31 no.6
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• pp.680-687
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• 2009

This paper reports on an improved piezoelectric microspeaker with a high sound pressure level of 90 dB, a total harmonic distortion of less than 15%, and coherence higher than 0.9. The fabricated Pb(Zr,Ti)$O_3$ (PZT) microspeakers have a thickness of only 1 mm including the speaker frame and an active area of 18 mm${\times}$20 mm. To achieve higher sound pressure and lower distortion, the PZT piezoelectric microspeaker has a well-designed speaker frame and a piezoelectric diaphragm consisting of a tilted PZT membrane and silicone buffer layer. From the simulation and measurement results, we confirmed that the silicon buffer layer can lower the first resonant frequency, which enhances the microspeaker's sound pressure at a low frequency range and can also reduce useless distortion generated by the harmonics. The fabricated PZT piezoelectric microspeakers are implemented on a multichannel speaker array system for personal acoustical space generation. The output sound pressure at a 30 cm distance away from the center of the speaker line array is 15 dB higher than the sound pressure at the neighboring region 30 degrees from the vertical axis.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.45-46
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• 2005

The piezoelectric ZnO thin films were deposited onto Al/Si substrate in order to figure out the crystalline and the residual stress of deposited films. As the $Ar/O_2$ gas ratio is increased, c-axis orientation of deposited films is significantly enhanced and also the residual stresses of ZnO films are all compressive. They are decreased from -1.2 GPa to -950 MPa as the $Ar/O_2$ gas ratio is increased. A diaphragm-based piezoelectric microspeaker fabricated on ONO films shows about 14 mPa output pressure at 1 kHz with $8V_{peak-to-peak}$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.327-327
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• 2007

This paper reports the simulation results of piezoelectric microspeakers due to structural changes(diaphragm materials, corrugation width and electrode shapes). When we compared the dependence of diaphragm material properties, the microspeaker with LTO(Low Temperature Oxide) diaphragm shows higher deflection than that of silicon nitride diaphragm, even though the resonant frequencies are almost same in both cases. In case of circular-electrode microspeaker, the deflection of diaphragm is about $16\;{\mu}m$ at 20 V, and it decreases as the corrugation width is decreased. However, the deflection of diaphragm with the square-electrode reveals almost twice times higher value at the same applied voltage than the circular one, and it increases as the corrugation depths are decreased from $30\;{\mu}m\;to\;10\;{\mu}m$. The first resonant frequency of microspeakers present about 1.8 kHz in circular-electrode and 1.2 kHz in square-electrode, respectively.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.10a
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• pp.773-774
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.347-351
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• 1997

A micromachined piezoelectic cantilever transducer,which works both as a microphone and as a microspeaker,has been fabricated and tested. The 2000*2000*3.mu.m .sap2. cantilever has oxide(ZnO)piezoelectric thin film on a supporting layer of low-pressure chemical-vapor-deposited(LPCVD)low-stress siliconnitride. A highlight of the fabrication process which may also be relevant for other micromachined stuctures is the technique for producing a flat,multilayer cantilever. The measured microphone sensitivity is fairly constant at 2 mV/.mu.bar in the low frequency range and rise to 20 mV/.mu.bar at the lowest resonant frequency of 890 Hz. The 2 mV/.mu.bar sensitivity is the highest report to data for a microphone with a micromachined diaphragm. When measured into a 2 cm/sap3 coupler with 4V (zero-park)drive,the microspeaker output sound pressure level(SPL) is 75 dB at 890 Hz. It increases to approximately 100dB SPL at 4.8kHz with 6V(zero-park)drive. The measured microphone frequency response agrees well with the results of an ABAQUS simulation.