Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Characterization of Piezoelectric Microspeaker Fabricated with C-axis Oriented ZnO Thin Film

C-축 배향된 ZnO 박막을 이용하여 제작한 압전형 마이크로 스피커의 특성 평가

  • 이승환 (국립 충주대학교 기계공학과, 친환경 에너지 변환.저장소재 및 부품개발 연구센터) ;
  • 서경원 (국립 충주대학교 기계공학과, 친환경 에너지 변환.저장소재 및 부품개발 연구센터) ;
  • 유금표 (고려대학교 제어계측공학과) ;
  • 권순용 (국립 충주대학교 신소재공학과, 친환경 에너지 변환.저장소재 및 부품개발 연구센터)
  • Published : 2006.06.01
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Abstract

A micromachined piezoelectric microspeaker was fabricated with a highly c-axis oriented ZnO thin film on a silicon-nitride film having compressive residual stress. When it was measured 3 mm away from the microspeaker in open field, the largest sound pressure level produced by the fabricated microspeaker was about 91 dB at around 2.9 kHz for the applied voltage of $6\;V_{peak-to-peak}$. The key technologies to these successful results were as follows: (1) the usage of a wrinkled diaphragm caused by the high compressive residual stress of silicon-nitride thin film, (2) the usage of the highly c-axis oriented ZnO thin film.

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References

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