• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.152-152
• /
• 2012

In this work we measured electron temperature and electron density of a microplasma by optical emission spectroscopy. The plasma is generated from a small discharge gap of a microwave parallel stripline resonator (MPSR) in Helium at atmospheric pressure. The microwave power supplied for this plasma source from 0.5 to 5 watts at a frequency close to 800 MHz. The electron temperature and electron density were estimated through Collisional-radiative model combined with Corona-equilibrium model. The results show that the electron density and temperature of this plasma in the case small discharge gap width are higher than that in larger gap width. The diagnostic techniques and associated challenges will be presented and discussed.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.58 no.12
• /
• pp.2474-2479
• /
• 2009

This paper presents an atmospheric microplasma-jet device for bio~medical application. The microplasma-jet device consists of four components; a thin Ni anode, porous alumina insulator, a stainless steel cathode and an aluminum case. The anode has 8 holes, and hole diameter and depth are $200 {\mu}m$ and $60 {\mu}m$, respectively. The discharge test was performed in atmospheric pressure using nitrogen gas and AC voltage at the optimum gas flow rate of 4 Vmin. The plasma-jet is ejected stably for the input voltage ranging from 5.5 to $9.5 kV_{p-p}$. The plasma becomes dense as the input voltage increases, which was verified by the hydrophilicity change of PMMA surface treated by the plasma. The temperature increasement of the aluminum film exposed to plasma-jet illustrates that the micro plasma-jet device is feasible for bio-medical application.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.27 no.8
• /
• pp.1266-1272
• /
• 2003

This paper presents a new class of magnetic microsensors based on the Hall effect in AC microplasma. In the theoretical study, we develop a simple model of the plasma Hall sensor and express the plasma Hall voltage as a function of magnetic field, plasma discharge field, pressure, and electrode geometry. On this basis, we have designed and fabricated magnetic microsensors using AC neon plasma. In the experiment, we have measured the Hall voltage output of the plasma microsensors for varying five different conditions, including the frequency and the magnitude of magnetic field, the frequency and the magnitude of plasma discharge voltage, and the neon pressure. The fabricated magnetic microsensors show a magnetic field sensitivity of 8.87${\pm}$0.18㎷/G with 4.48% nonlinearity.

• Proceedings of the Korea Air Pollution Research Association Conference
• /
• 2006.04a
• /
• pp.281-282
• /
• 2006

• 한국정보디스플레이학회:학술대회논문집
• /
• 2006.08a
• /
• pp.925-928
• /
• 2006

With the high sustain frequency at 250 kHz, a three-dimensional diagnostics of excited xenon atoms was investigated by the emission and absorption microscopic spectroscopy for plasma display panels, spatiotemporally. As a typical feature of the emissions, a broad discharge peak was observed on the temporal cathode and a sharp one was monitored on the anode, at the high frequency. However, the discharge starts from the cathode edge, actually, that is a discharge space on the floated address (or data) electrode. Spatially, the dense emission and absorption peak were observed in the discharge space between the sustain electrodes gap. Overall, the microdischarge at high sustain frequency showed priming dominant characteristics.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.180-180
• /
• 2012

A microplasma system source based on microwave parallel stripline resonator (MPSR) was developed for the generation of microplasmas in a wide range of pressure from some torr to 760 torr. This source was operated at its resonance frequency that much depends upon not only its discharge gap size but also operated pressure. This paper applied a simple circuit model to analyze the effects of discharge gap size and pressure to resonance frequency and impedance of MPSR in the cases with and without plasma exist inside the discharge gap. In the process of calculating, the conformal mapping method was used to estimate the capacitance of the MPSR. The calculating results by using circuit model agree well with the simulation results that using commercial CST microwave studio software.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.27 no.6
• /
• pp.31-38
• /
• 2013

A pulse driven atmospheric plasma jet controlled by external ballast capacitor is developed. Unlike the most commonly use DBD sources, the proposed device utilizes bare metal electrode. The discharge energy per pulse can precisely be determined by changing voltage and capacitance of the ballast capacitor. It is shown that the device can provide wide range of plasma, from stable glow mode to near arc state. Current-voltage waveforms, optical emission spectra and discharge images are investigated as a function of an injection energy. The OES shows that He and oxygen lines are increased as a function of the external ballast capacitor. Ozone and rotational temperature have similar tendency with a power consumption. The feeding gas is He and the applied DC voltage is from 400V to 800V when the gap distance is $500{\mu}m$.

• Journal of IKEEE
• /
• v.15 no.4
• /
• pp.305-312
• /
• 2011

A primary interest of this work is to develop an efficient and powerful repetitive pulser system for the application of ultra wide band generation. The important component of the pulser system is a small-sized coaxial type spark gap with planar electrodes filled with SF6 gas. A repetitive switching action by the coaxial spark gap generates two consecutive pulses in less than a microsecond with rise times of a few hundred picoseconds (ps). A set of several parameters for the repetitive switching of the spark gap is required to be optimized in charging and discharging systems of the pulser. The parameters in the charging system include a circuit scheme, circuit elements, the applied voltage and current ratings from power supplies. The parameters in the discharging system include the spark gap geometry, electrode gap distance, gas type, gas pressure and the load. The characteristics of the spark gap discharge, such as breakdown voltage, output current pulse and recovery rate are too dynamic to control by switching continuously at a high pulse repetition rate (PRR). This leads to a low charging efficiency of the spark gap system. The breakthrough of the low charging efficiency is achieved by a parallel operation of two spark gaps system. The operational behavior of the two spark gaps system is presented in this paper. The work has focused on improvement of the charging efficiency by scaling the PRR of each spark gap in the two spark gaps system.