• Journal of the Korean Ceramic Society
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• v.56 no.3
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• pp.256-268
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• 2019

In this research, some mechanical properties of Al₂O₃-based composites containing nanoSiC and nanoMgO additives, including elasticity modulus, hardness, and fracture toughness, have been evaluated. Micron-sized Al₂O₃ powders containing 0.08 wt.% nanoMgO particles have been mixed with different volume fractions of nanoSiC particles (2.5 to 15 vol.%). Untreated samples have been sintered by using hot-press technique at temperatures of 1600 to 1750℃. The results show significant increases in the mechanical characteristics with increases in the sintering temperature and amount of nanoSiC particles, with the result that the elasticity modulus, hardness, and fracture toughness were obtained as 426 GPa, 21 GPa, and 4.5 MPa.m^1/2, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.41-44
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• 2003

As the device feature size is reduced to the deep sub-micron regime, the chemical mechanical polishing (CMP) technology is widely recognized as the most promising method to achieve the global planarization of the multilevel interconnection for ULSI applications. However, cost of ownership (COO) and cost of consumables (COC) were relatively increased because of expensive slurry. In this paper, the effects of different slurry composition on the oxide CMP characteristics were investigated to obtain the higher removal rate and lower non-uniformity. We prepared the various kinds of slurry. In order to save the costs of slurry, the original slurry was diluted by de-ionized water (DIW). And then, alunima abrasives were added in the diluted slurry in order to promote the mechanical force of diluted slurry.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.29 no.4 s.235
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• pp.504-511
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• 2005

The generation of fine relics of inorganic and metallic materials from precursor suspensions is of significant current interest as it holds the key to the fabrication of display and printed circuit board. Some novel printing methods depositing ceramic particles have been suggested in recent years. When a conducting liquid is supplied to a capillary nozzle at a low flow rate and when the interface between air and the liquid is charged to a sufficiently high electrical potential, the liquid meniscus takes the form of a stable cone, whose apex emits a microscopic jet. This is called as a cone-jet mode. In our experiments, an alumina particles flowing through a nozzle were subjected to electro-hydrodynamic printing in the cone-jet mode. The pattern of 'YONSEI' characters was tested at $10 {\mu}l/min$ of alumina ink flow rate and different applied voltages. At an applied voltage of 6 kV, feature size was in the range of $250 {\mu}m.$

• Korean Chemical Engineering Research
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• v.57 no.2
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• pp.185-197
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• 2019

Deactivation of porous photocatalytic materials was studied using three types of microstructured particles: macroporous titania particles, titania microspheres, and porous silica microspheres containing CNTs and $TiO_2$ nanoparticles. All particles were synthesized by emulsion-assisted self-assembly using micron-sized droplets as micro-reactors. During repeated cycles of the photocatalytic decomposition reaction, the non-dimensionalized initial rate constants (a) were estimated as a function of UV irradiation time (t) from experimental kinetics data, and the results were plotted for a regression according to the exponentially decaying equation, $a=a_0\;{\exp}(-k_dt)$. The retardation constant ($k_d$) was then compared for macroporous titania microparticles with different pore diameters to examine the effect of pore size on photocatalytic deactivation. Nonporous or larger macropores resulted in smaller values of the deactivation constant, indicating that the adsorption of organic materials during the photocatalytic decomposition reaction hinders the generation of active radicals from the titania surface. A similar approach was adopted to evaluate the activation constant of porous silica particles containing CNT and $TiO_2$ nanoparticles to compare the deactivation during recycling of the photocatalyst. As the amount of CNTs increased, the deactivation constant decreased, indicating that the conductive CNTs enhanced the generation of active radicals in the aqueous medium during photocatalytic oxidation.

• Nuclear Engineering and Technology
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• v.51 no.6
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• pp.1589-1595
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• 2019

In this paper, the CLAM steel strengthened by micro-scale Y-Zr-O was prepared by vacuum induction melting followed by electroslag remelting (VIM-ESR). Yttrium (Y) and zirconium (Zr) were easy to aggregates into massive yttrium-zirconium-rich inclusions in the steel melted by vacuum induction melting (VIM), which would interrupt the continuity of the matrix and reduce the mechanical properties of steel. Micron-sized Y-Zr-O inclusions would be produced with the removal of original blocky Y-Zr-rich inclusions and the submicron-sized inclusions smaller than $0.2{\mu}m$ could be retained in the steel. The small grain size and the better refinement and distribution uniformity of Y-Zr-O inclusions after remelting would be responsible for the better yield strength and toughness. For VIM-ESR alloy, the ultimate tensile strength is 749 MPa and the yield strength is 642 MPa at room temperature, meanwhile they are 391 MPa and 367 MPa at $600^{\circ}C$, respectively. Meanwhile, the ductile-brittle transition temperature (DBTT) reduced from $-43^{\circ}C$ (VIM) to $-76^{\circ}C$ (VIM-ESR).

• Analytical Science and Technology
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• v.19 no.5
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• pp.407-414
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• 2006

An X-ray diffractometer for spatially resolved X-ray diffraction measurements was developed to identify phase in the narrow (micron-scaled) region of high burn-up fuels and some nuclear materials. The micro-XRD was composed of an X-ray microbeam alignment system and a sample micro translation system instead of a normal slit and a fixed sample stage in a commercial XRD. The X-ray microbeam alignment system was fabricated with a microbeam concentrator having two Ni deposited mirrors, a vertical positioner, and a tilt table for the generation of a concentrated microbeam. The sample micro translation system was made with a sample holder and a horizontal translator, allowing movement of a specimen at $5{\mu}m$ steps. The angular intensity profile of the microbeam generated through a concentrator was symmetric and not distorted. The size of the microbeam was $4,000{\times}20{\mu}m$ and the spatial resolution of the beam was $47{\mu}m$ at the sample position. When the diffraction peaks were measured for a $UO_2$ pellet specimen by this system, the reproducibility ($2{\Theta}={\pm}0.01^{\circ}$) of the peaks was as good as a conventional X-ray diffractometer. For the cross section of oxidized titanium metal, not only $TiO_2$ in an outer layer but also TiO near an oxide-metal interface was observed.

• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.66-71
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• 2023

This paper describes a hybrid cleaning method of silicon wafer combining nano-bubble and ultrasound to remove sub-micron particles and contaminants with minimal damage to the wafer surface. In the megasonic cleaning process of semiconductor manufacturing, the cavitation induced by ultrasound can oscillate and collapse violently often with re-entrant jet formation leading to surface damage. The smaller size of cavitation bubbles leads to more stable oscillations with more thermal and viscous damping, thus to less erosive surface cleaning. In this study, ultrasonic energy was applied to the wafer surface in the DI water to excite nano-bubbles at resonance to remove contaminant particles from the surface. A patented nano-bubble generator was developed for the generation of nano-bubbles with concentration of 1×10⁹ bubbles/ml and nominal nano-bubble diameter of 150 nm. Ultrasonic nano-bubble technology improved a contaminant removal efficiency more than 97% for artificial nano-sized particles of alumina and Latex with significant reduction in cleaning time without damage to the wafer surface.

• Korean Journal of Materials Research
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• v.12 no.10
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• pp.771-775
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• 2002

$Gd_2$$O_3$:Eu phosphor particles with nano-sized and non-aggregation characteristics were prepared by spray pyrolysis using the spray solution containing polymeric precursor and $Li_2$$CO_3$ flux material. Nano-sized $Gd_2$$O_3$:Eu phosphor particles had higher brightness than the commercial $Y_2$$O_3$:Eu phosphor particles. The $Gd_2$$O_3$:Eu phosphor particles had nano-size and non-aggregation characteristics after heat-treatment at $1000^{\circ}C$ when the addition amount of $Li_2$$CO_3$ flux was 1 wt.% and 3 wt.%. The mean size of particles were 200 nm and 400 nm when the amount of flux was 1 wt.% and 3 wt.%, respectively. The prepared phosphor particles had higher photoluminescence intensity than that of the commercial product regardless of the content of$ Li_2$$CO_3$ flux and had the maximum brightness when the content of flux was 5 wt %. The photoluminescence intensity of the nano-sized $Gd_2$$O_3$:Eu phosphor particles containing 3 wt.% $Li_2$$CO_3$ flux was 125% in comparison with that of the micron-sized $Y_2$$O_3$:Eu commercial product.

• Asian Journal of Atmospheric Environment
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• v.6 no.1
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• pp.41-52
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• 2012

Particulate sulfate in $PM_{2.5}$, sulfur dioxide ($SO_2$) and size-segregated aerosol particle number concentrations were measured at a site ($32^{\circ}19'N$, $129^{\circ}59'E$) on the southwestern Japan coast from 5 March to 10 April, 2010. Results show frequent episodic increases of sulfate and $SO_2$. Compared to the average concentration of sulfate $4.4{\pm}2.7\;{\mu}g\;m^{-3}$ in the whole observation period, episodic sulfate reached $10.5-20.1\;{\mu}g\;m^{-3}$. The variation of sulfate always synchronized with aerosol particles in the size range of $0.1-0.5 {\mu}m$, indicating the episodic sulfate was a consequence of the increase of the sub-micron particles. $SO_2$ did not have remarkable increase in any episodes of sulfate increase. During the passage of low pressure systems which loaded Asian dust in postfrontal air, concentrated sulfate appeared right behind the front but before dust arrival, suggesting the dominance of dust-free particulate sulfate. Weather and backward trajectory analyses revealed that air parcels with high sulfate passed eastern and northeastern China or Korean peninsula before arriving at the site. In contrast, those with high $SO_2$ passed an active volcano, Mt. Sakurajima, about 100 km in the south, suggesting the $SO_2$ was more likely from the volcanic emission. The ratio of sulfate to total sulfur compounds $({SO_4}^{2-})/({SO_4}^{2-}+SO_2)$ was 0.31-0.89 in continentally originated air while was 0.25-0.43 in the air having passed the volcano, showing more efficient conversions of $SO_2$ to sulfate in the air from the continent. The close dependence of the conversion on humidity in the continentally originated air was confirmed.

• Analytical Science and Technology
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• v.24 no.4
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• pp.249-255
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• 2011

Swelling of starch granules by water-sorption causes a progressive or sometimes abrupt change in sorption behavior as a result of structural alterations and the possible exposure of new sites with high affinity for water. It is thus of interest to examine the time-dependent change in the size or shape of the starch granules. Gravitational field-flow fractionation (GrFFF) utilizes the earth's gravity as the external field, and is useful for separation of micron-sized particles with larger particles eluting earlier than smaller ones. In this study, GrFFF was used to monitor the swelling of two starch granules, potato starch and sweet potato starch during contact time of 11-12 days at room temperature in water. Results from GrFFF were compared with those obtained from optical microscope (OM). For both starch granules, the mean sizes were increased with time spent in water.