• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집C
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• pp.513-518
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• 2001

[ $Al_[2}O_{3}$ ] ceramics are generally used as components in processing equipment, devices or machinery. But it's difficult to machining as being machanical because $Al_[2}O_{3}$ ceramics are brittle materials. This study described a basic study of the input parameters effect on the dimension of the microhole at the $Al_[2}O_{3}$ ceramics using Nd:YAG laser. Major input parameters are peak power, pulse frequency and pulse duration in the laser microhole machining of $Al_[2}O_{3}$ ceramics. We will get a smaller microhole and diameter rate by an appropriate peak power, pulse duration.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.1072-1075
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• 2001

$Al_2O_3$ ceramics are generally used as components in processing equipment, devices or machinery because it can perform some functions better than competing metals or polymers. Many of these applications rely on $Al_2O_3$ ceramics special electromagnetic properties, its relative chemical inertness, hardness, strength and its temperature capabilities. But $Al_2O_3$ ceramics are brittle materials, a fact that may cause problems and at the same time be helpful while machining with laser. This study described a basic study of the input parameters effect on the dimension of the microhole at the $Al_2O_3$ ceramics using Excimer laser. In the laser microhole machining of $Al_2O_3$ ceramics, major input parameters are pulse energy, pulse power, pulse frequency and pulse numbers. In conclusion, we can get a smaller microhole and diameter rate by an appropriate pulse energy, pulse frequency and pulse number.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.1075-1079
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• 1995

It is difficult to machine microparts, such as microshaft and microholes, by conventional machining. Such micropart can be easily machined by EDM because it's machining force is very low. In micro-EDM, the precise electrode movement and discharge energy control are important. Therefore, high precision motion stage and EDM device with high performance is necessary. In this research, a new EDM machine was developed and microshaft and microhole, with various shape and size, was machined.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.1056-1059
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• 2001

These days, as dynamic function and special properties to compare traditional material, $Al_20_3$ ceramic use all over the industry. But it is very difficult to process because of high hardness and brittleness. Therefore, in this paper, it was investigated that laser process parameter which can produce appropriate quality of $Al_20_3$ ceramic microhole machining.

• 한국정밀공학회지
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• 제15권12호
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• pp.55-61
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• 1998

Recently, the needs of machining technologies of very small parts have been increasing with advent of micro-revolution. These technologies have mostly used the method applied to semi-conductor production process such as LIGA, etc. But they have serious difficulties to settle down in terms of workpiece materials, machining thickness, 3-dimensional structure. Therefore. mciro-machining technology using EDM(Electrical Discharge Machining) was proposed. It is very difficult to machine the micro-parts (microshaft, microhole) using conventional machining. Micro-machining using BDM can machine the micro-parts easily because it requires little machining force. This MEDM(Micro-EDM) need the capabilities to move a electrode and control a discharge energy precisely, and the gap control strategy to maintain the optimal discharge condition is necessary. Therefore, in this study, the new EDM machine with high precision motion stage and high-performance EDM device was developed. Using this MEDM machine, we have machined microshaft and microhole with various shapes and sizes.

• 한국레이저가공학회지
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• 제2권3호
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• pp.32-41
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• 1999

This study is about Jig used in wiring when we make Probecard and Large Scale Intergrated Electronic Circuit. The most universal wiring method is molding with Bond. Polymer film is punched down and adhesives is applied after wiring. Due to shrinkage and modification many problems still have happened in the process of molding. To solve these problems, ceramic plate was introduced in the study. Using Laser, an experiment of microhole treatment on ceramic plate was proceeded. Laser energy, assistance gas, and special features by purity degree were analyzed with the 35W low capacity YAG-Laser. In the condition of energy 0.08J, frequency 20Hz and interval time 200$mutextrm{s}$, about 70${\mu}{\textrm}{m}$ microhole was adequate for the Probecard Jig. In the purity experiment of ceramic materials, high purity ceramic met with good result for microhole. But the price is too high. The shape and size of holes machined combustion gas $O_2$ were better than those in $N_2$ and Ar, the inert gas.

• 한국생산제조학회지
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• 제8권5호
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• pp.115-120
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• 1999

This research is a described result of experimental for the parameter's effecting the microhole machining by Nd-Yag laser, The parameters are energy, pulse interval time a kin of assisting gas and its pressure. The result reveals that parameter value of energy 0.08J, pulse 20Hz, interval time of 300 microseconds could be a good machining condition to make upper microhoel that is the diameter range of 50-70${\mu}{\textrm}{m}$. At tat time the assistant gas such air, $O_2$, Ar $N_2$, was appelied. Assistant gas of air makes heat affected zone enlarge due to burning of material surface. Also it makes microhole irregular and damageable. Because of refusion caused by chemical reaction with $Al_2O_3$ ceramic material . The $O_2$(99.9%) has good characteristics to get good drilling and smooth surface on pressure of 0.2kgf/$\textrm{cm}^2$ but it is expensive. Ar, $N_2$ make material crack and burnning and proved that to be unappropriate but, Ar was a better than $N_2$.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집C
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• pp.519-524
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• 2001

These days, $Al_[2}O_{3}$ ceramic use all over the industry because dynamic function and special properties to compare traditional material. But $Al_[2}O_{3}$ ceramic is high hardness and brittleness materials. For this reason, it is very difficult to process. Therefor, In this paper, it was investigated that laser process parameter, which can produce appropriate quality of $Al_[2}O_{3}$ ceramic microhole machining utilized Nd:YAG laser and Excimer laser.

• Bulletin of the Korean Chemical Society
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• 제34권9호
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• pp.2577-2582
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• 2013

A novel stick-shaped portable sensing device featuring a microhole array interface between the polyvinylchloride-2-nitrophenyloctylether (PVC-NPOE) gel and water phase was developed for in-situ sensing of perchlorate ions in real water samples. Perchlorate sensitive sensing responses were obtained based on measuring the current changes with respect to the assisted transfer reaction of perchlorate ions by a perchlorate selective ligand namely, bis(dibenzoylmethanato)Ni(II) (Ni(DBM)2) across the polarized microhole array interface. Cyclic voltammetry was used to characterize the assisted transfer reaction of perchlorate ions by the $Ni(DBM)_2$ ligand when using the portable sensing device. The current response for the transfer of perchlorate anions by $Ni(DBM)_2$ across the micro-water/gel interface linearly increased as a function of the perchlorate ion concentration. The technique of differential pulse stripping voltammetry was also utilized to improve the sensitivity of the perchlorate anion detection down to 10 ppb. This was acquired by preconcentrating perchlorate anions in the gel layer by means of holding the ion transfer potential at 0 mV (vs. Ag/AgCl) for 30 s followed by stripping the complexed perchlorate ion with the ligand. The effect of various potential interfering anions on the perchlorate sensor was also investigated and showed an excellent selectivity over $Br^-$, $NO_2{^-}$, $NO_3{^-}$, $CO{_3}^{2^-}$, $CH_3COO^-$ and $SO{_4}^{2^-}$ ions. As a final demonstration, some regional water samples from the Sincheon river in Daegu city were analyzed and the data was verified with that of ion chromatography (IC) analysis from one of the Korean-certified water quality evaluation centers.

• 대한기계학회논문집B
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• 제39권4호
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• pp.301-307
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• 2015

MC-50 사이클로트론에서 방출되는 양성자 빔은 직경이 2-3 mm 의 가우시안 분포를 가진다. 이렇게 넓게 조사되는 양성자 빔은 작은 스팟과 정밀한 위치정밀도를 요구하는 반도체 식각, 마이크로 머시닝 등에는 사용될 수 없다. 본 연구에서는 좀 더 경제적인 대안으로 양성자 빔을 마이크로 홀에 통과시켜 수십 ${\mu}m$ 의 직경을 가지도록 조형하는 방법을 제시하였다. 양성자 빔의 조형을 위하여 평균 직경 $21{\mu}m$, 두께 9mm 의 세장비 428 의 마이크로 홀을 제작하였다. 마이크로 홀과 양성자 빔을 정밀하게 정렬하여 양성자 빔을 조형하였다. 이렇게 조형된 양성자 빔을 이용하여 수십 ${\mu}m$ 크기의 마이크로 구조물의 가공성 확인 실험을 실시하였다. 또한 GEANT4 를 이용한 전산모사를 이용하여 해석한 후, 실험결과와 비교하고 분석하였다. 본 연구를 통하여 MC-50 사이클로트론이 조형 장치와 함께 20 마이크론 대의 3 차원 구조물 제작을 위한 마이크로 공정기술에의 사용 가능성을 확인하였다.