• 한국정밀공학회지
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• 제19권12호
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• pp.171-178
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• 2002

With increasing the needs for micro and precision parts, micro machining technology using micro tools has been studied to fabricate a small part with high density such as electronics, optics, communications, and medicine industry more than before. Though these micro tools have developed rapidly, it is difficult to apply them to micro fabrication technologies, because of the inherent manufacturing. In this study, micro tools (WC) to produce micro structures and parts were manufactured by cylindrical grinding machine employing ELID (Electrolytic In-process Dressing) technique and the micro tools are fabricated as square shape with the dimension less than 100${\mu}{\textrm}{m}$. With the micro tools on the same machine, characteristics of micro grooving and drilling are evaluated. Also we compare normal micro machining with ultrasonic micro machining on the vibration table. It is confirmed that the developed micro tools are fully applicable to micro grooving, micro drilling and free form cutting.

• 한국결정성장학회지
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• 제21권3호
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• pp.114-118
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• 2011

본 논문에서는 육각형 GaN 피라미드의 꼭지점 부분에만 나노 혹은 마이크로 크기의 GaN 구조를 선택적으로 성장시킬 수 있는 결정 성장 방볍에 대하여 연구하였다. 최적화된 포토리소그라피 공정을 이용하여 육각형 GaN 피라미드 구조의 꼭지점 부분의 $SiO_2$ 마스크 영역만을 제거할 수 있었으며, 이렇게 하여 노출된 육각형 GaN 피라미드의 꼭지점 부분에만 metal organic vapor phase epitaxy(MOVPE) 결정 성장방법을 사용하여 나노 및 마이크로 크기의 GaN 구조를 선택적으로 성장하였다. GaN 피라미드 꼭지점 부근에 형성된 나노 및 마이크로 G값J 구조는 semi-polar {1-101} 결정면으로 둘러싸인 육각 피라미드 형상을 하고 있으며 그들의 크기는 성장 시간에 의해 쉽게 조절할 수 있음을 확인하였다. TEM 관측 결과, 측면 방향으로 진행하는 관통전위들이 $SiO_2$ 마스크에 의해 효율적으로 차단되어 나노 및 마이크로 GaN 구조에서는 전위 밀도가 감소하는 것을 확인할 수 있었으나 $SiO_2$ 마스크의 끝부분의 매끄럽지 못한 부분에 의해 적층 결함이 발생함을 확인하였다.

• 대한기계학회논문집A
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• 제27권7호
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• pp.1234-1242
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• 2003

In this paper we present a simple and efficient robust optimal design formulation for MEMS structures and its application to a resonant-type micro probe. The basic idea is to use the gradient index (GI) to improve robustness of the objective and constraint functions. In the robust optimal design procedure, a deterministic optimization for performance of MEMS structures is followed by design sensitivity analysis with respect to uncertainties such as fabrication errors and change of operating conditions. During the process of deterministic optimization and sensitivity analysis, dominant performance and uncertain variables are identified to define GI. The GI is incorporated as a term of objective and constraint functions in the robust optimal design formulation to make both performance and robustness improved. While most previous approaches for robust optimal design require statistical information on design variations, the proposed GI based method needs no such information and therefore is cost-effective and easily applicable to early design stages. For the micro probe example, robust optimums are obtained to satisfy the targets for the measurement sensitivity and they are compared in terms of robustness and production yield with the deterministic optimums through the Monte Carlo simulation. This method, although shown for MEMS structures, may as well be easily applied to conventional mechanical structures where information on uncertainties is lacking but robustness is highly important.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.508-511
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• 2002

With increasing the needs for micro and precision parts, micro machining technology using micro tools has been studied to fabricate a small part with high density such as electronics, optics, communications, and medicine industry more than before. Though these micro tools have developed rapidly, it is difficult to apply them to micro fabrication technologies, because of the inherent manufacturing. In this study, micro tools(wc) to produce micro structures and parts were manufactured by cylindrical grinding machine employing ELID(Electrolytic In-process Dressing) technique and good dimensional accuracy was achieved. Furthermore we researched the characteristics of machining on the micro drilling using micro drills and manufactured micro tools. Finally it is confirmed that manufactured micro tools can be used for micro machining.

• 한국정밀공학회지
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• 제29권7호
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• pp.799-804
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• 2012

Recently micro-nano structures has widely been reported to improve the performance of waterproof, heat isolation, sound and light absorption in various fields of electric devices such as mobiles, battery, display and solar panels. A lot of micro-sized holes on the surface of thin film provide excellent sound, or heat, or light transmission efficiency more than solid film and simultaneously nano-sized protrusions around micro hole increase the hydrophobicity of the surface of thin film because of lotus leaf effects as generally known previously. In this paper new rapid fabrication process with 355 nm UV laser ablation was proposed to get micro-nano structures on the surface of thin film, which have only been observed at higher laser fluence. Developed thin micro-nano structured film was also investigated the hydrophobic property by measuring the contact angle and demonstrated the possibility to apply to water droplet separation.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2006년 제4회 한국유체공학학술대회 논문집
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• pp.375-376
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• 2006

Turbulent structure of a boundary-layer over a flat plate coated with micro riblet film(MRF) has been investigated experimentally. The turbulent structure was visualized using a dynamic particle image velocimetry (Dynamic PIV) system. We identified the vortex structures from 2-D velocity field data by applying the complex eigenvalue definition. The velocity field images acquired by using the complex eigenvalue definition showed the whole 2-D vortex structures clearly. In addition, the spatial distributions of small-scale vortices as well as large-scale vortices were obtained with high accuracy. The difference of vortex structures between the MRF coated flat plate and the smooth flat plate was analysed in detail. With varying upstream flow speed, the characteristics of vortex structure over the MRF coated flate plate was compared with those over the smooth flat plate.

• 동력기계공학회지
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• 제19권3호
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• pp.55-62
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• 2015

This paper discusses a new model for investigating the micro-mechanical behavior of beam-like structures composed of various elastic moduli and complex geometries varying through the cross-sectional directions and also periodically-repeated along the axial directions. The original three-dimensional problem is first formulated in an unified and compact intrinsic form using the concept of decomposition of the rotation tensor. Taking advantage of two smallness of the cross-sectional dimension-to-length parameter and the micro-to-macro heterogeneity and performing homogenization along dimensional reduction simultaneously, the variational asymptotic method is used to rigorously construct an effective zeroth-order beam model, which is similar a generalized Timoshenko one (the first-order shear deformation model) capable of capturing the transverse shear deformations, but still carries out the zeroth-order approximation which can maximize simplicity and promote efficiency. Two examples available in literature are used to demonstrate the consistence and efficiency of this new model, especially for the structures, in which the effects of transverse shear deformations are significant.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.209.2-209.2
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• 2014

In recent years, researches about hydrophobic and hydrophilic surfaces have been executed however their other effects have not been researched enough. In this paper, the fabrication method of hierarchical structures of micro line array combined with fluorinated wax for anisotropic superomniphobic wettability is presented. We have achieved anisotropic and superomniphobic surface via simple two step methods, which are maskless photolithography and wax deposition. In order to prove how to provide those characteristics, SEM, contact angle measurement tool and X-ray diffraction are used. Fluorinated wax is crystalized self-assembly and it is subordinated on micro line array so that it is able to display anisotropic wettability. Understanding on anisotropic superomniphobic surface and simple fabrication method has been attracted to apply for lots of applications which range from self-cleaning surface, microfluidic chip, to directionally fluid control device, even in oily fluid.

• Steel and Composite Structures
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• 제25권1호
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• pp.67-78
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• 2017

In this study, free vibration of functionally graded (FG) micro/nanobeams based on nonlocal third-order shear deformation theory and under different boundary conditions is investigated by applying the differential quadrature method. Third-order shear deformation theory can consider the both small-scale effects and quadratic variation of shear strain and hence shear stress along the FG nanobeam thickness. The governing equations are obtained by using the Hamilton's principle, based on third-order shear deformation beam theory. The differential quadrature (DQ) method is used to discretize the model and attain the natural frequencies and mode shapes. The properties of FG micro/nanobeam are assumed to be chanfged along the thickness direction based on the simple power law distribution. The effects of various parameters such as the nonlocal parameter, gradient index, boundary conditions and mode number on the vibration characteristics of FG micro/nanobeams are discussed in detail.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 추계학술대회 논문집
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• pp.343-346
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• 2000

This paper presents the characteristics of low consumption, high-response time hot-film type micro-flowsensors with SOI(Si-on-insulator) and trench structures. Output voltages increased due to increase of heat-loss from sensor to external. Compared with no-trench on the SOI structure, the micro-flowsensors with trench structures have properties of high output voltage and low consume power. Output voltage of micro-flowsensors with SOI and trench structures was 250 mV at $N_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time was about 85 msec when input flow was step-input.