• Title/Summary/Keyword: micro-structures

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Fabrication and Time-Dependent Analysis of Micro-Hole in GaAs(100) Single Crystal Wafer Using Wet Chemical Etching Method (습식 화학적 식각 방법에 의한 시간에 따른 GaAs(100) 단결정 웨이퍼에서의 마이크로 구멍의 제작 및 분석)

  • Lee, Ha Young;Kwak, Min Sub;Lim, Kyung-Won;Ahn, Hyung Soo;Yi, Sam Nyung
    • Korean Journal of Materials Research
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    • v.29 no.3
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    • pp.155-159
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    • 2019
  • Surface plasmon resonance is the resonant oscillation of conduction electrons at the interface between negative and positive permittivity material stimulated by incident light. In particular, when light transmits through the metallic microhole structures, it shows an increased intensity of light. Thus, it is used to increase the efficiency of devices such as LEDs, solar cells, and sensors. There are various methods to make micro-hole structures. In this experiment, micro holes are formed using a wet chemical etching method, which is inexpensive and can be mass processed. The shape of the holes depends on crystal facets, temperature, the concentration of the etchant solution, and etching time. We select a GaAs(100) single crystal wafer in this experiment and satisfactory results are obtained under the ratio of etchant solution with $H_2SO_4:H_2O_2:H_2O=1:5:5$. The morphology of micro holes according to the temperature and time is observed using field emission - scanning electron microscopy (FE-SEM). The etching mechanism at the corners and sidewalls is explained through the configuration of atoms.

Reduction of Differential Settlements due to Deep Excavation Using the Micro-piling Method (마이크로 파일을 이용한 가설 벽체 인접 구조물의 침하 억제에 관한 연구)

  • Huh, In-Goo;Hwang, Tae-Hyun;Lee, Sang-Ryeong;Shin, Jong-Ho;Kwon, Oh-Yeob
    • Journal of the Korean Geotechnical Society
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    • v.24 no.10
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    • pp.71-81
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    • 2008
  • Wall displacements caused by earth pressure, rainfalls, rise in ground water level, inappropriate deep excavation and structural defects of the wall may produce differential settlements to existing buildings, which often result in damages and/or collapses of the building structures. In this case, measures to protect the walls and nearby structures would be required. One of the recent measures to reduce differential settlements and protecting walls is to reinforce the ground using micro-piles. In this study physical model tests were carried out to evaluate the performance of the micro-pile method. It is revealed that reduction of the settlement was maximized when the length of micro-pile is twice of the foundation width, distance between piles is twice of the pile diameter and the distance to wall is one tenth of the foundation width. Based on the test results some design recommendations were made.

Bending analysis of porous microbeams based on the modified strain gradient theory including stretching effect

  • Lemya Hanifi Hachemi Amar;Abdelhakim Kaci;Aicha Bessaim;Mohammed Sid Ahmed Houari;Abdelouahed Tounsi
    • Structural Engineering and Mechanics
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    • v.89 no.3
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    • pp.225-238
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    • 2024
  • In this paper, a quasi-3D hyperbolic shear deformation theory for the bending responses of a functionally graded (FG) porous micro-beam is based on a modified couple stress theory requiring only one material length scale parameter that can capture the size influence. The model proposed accounts for both shear and normal deformation effects through an illustrative variation of all displacements across the thickness and satisfies the zero traction boundary conditions on the top and bottom surfaces of the micro-beam. The effective material properties of the functionally graded micro-beam are assumed to vary in the thickness direction and are estimated using the homogenization method of power law distribution, which is modified to approximate the porous material properties with even and uneven distributions of porosity phases. The equilibrium equations are obtained using the virtual work principle and solved using Navier's technique. The validity of the derived formulation is established by comparing it with the ones available in the literature. Numerical examples are presented to investigate the influences of the power law index, material length scale parameter, beam thickness, and shear and normal deformation effects on the mechanical characteristics of the FG micro-beam. The results demonstrate that the inclusion of the size effects increases the microbeams stiffness, which consequently leads to a reduction in deflections. In contrast, the shear and normal deformation effects are just the opposite.

Micro-patterning for Biomimetic Functionalization of Surface

  • Jeon, Deok-Jin;Lee, Jun-Yeong;Yeo, Jong-Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.272-273
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    • 2013
  • Some living thingsuse micro- or nano- structures for living in nature. Scientists and engineers made efforts to mimic them, and they succeeded in making new types of applications. They used 'Namib desert beetle' to self-filling device by moisture harvesting and 'lotus leaf' to self-cleaning device by water repelling. 'Namib desert beetle' and lotus leaf have micro-patterns on their surface, which consists of hydrophobic or hydrophilic materials [1]. Moreover, micro-patterns on the surface make self-filling or self-cleaning property enhanced because of the surface roughness. Surface roughness enhances wettability [2]. Micro-pattern is a significant factor to make the surface be functional, so we want to make new types of functional surface by micro-patterning. In this work,we make several functional micro-patterns (radial, line, and dot arrays) using maskless lithography and analyze the characteristics of each micro-pattern. In order to analyze and understand surface characteristics, micro-patterns with varying sizes are investigated. All experiments are proceeded on mr-DWL5 photo resists coated on silicon wafers in same condition. All the experiments have demonstrated good performances about hydrophobic or hydrophilic property corresponding to their material and structural combinations. In radial micro-pattern, although the surface is flat, water drops on hydrophilic radial pattern can be convergent to a middle point and water drops on hydrophobic radial pattern can be divergent from the middle point. In line array micro-pattern, water drops can roll off along only one direction in parallel with the line arrays. Such phenomena might be mainly caused by the local change of surface roughness. From these results, controlling the movement and direction of water drops is made feasible without introducing a slope, which can potentially be used for new types of applications.

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A Study on the Correlation between Advanced Small Punch Test and Charpy V-notch Test on X20CrMoV121 and 2.25Cr1Mo steels Weldment (X20CrMoV121강과 2.25Cr1Mo강 용접부의 ASP 시험과 CVN 충격 시험의 상관관계에 대한 연구)

  • Lee, Dong-Hwan;Kim, Hyoung-Sup
    • Journal of Welding and Joining
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    • v.26 no.3
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    • pp.37-44
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    • 2008
  • Charpy V-Notch test is commonly used to evaluate fracture toughness. However, since the region to be evaluated is limited to bulk material due to the specimen size required, individual evaluation of micro-structures on weldment is very difficult. In this study, ASP(Advanced Small Punch) test was carried out to evaluate material degradation and fracture toughness on the B.M, W.M and each micro-structures of HAZ for X20CrMoV121 and 2.25Cr1Mo steels with artificial aging time. In addition, to evaluate fracture toughness and material degradation of B.M and W.M of X20CrMoV121 steels with aging times, CVN (Charpy V-notch) test was performed. And then the correlation between ASP and CVN test on X20CrMoV121 steels was obtained. Furthermore, through this correlation, material degradation property of each micro-region of the HAZ in weldment, which was impossible to be evaluated by the CVN test, can be estimated and determined.

Investigation into the Fabrication of Micro-scale Winkles using Repetitive Contact-and-open Method (반복 접촉-분리 방식을 이용한 마이크로 표면주름 구조 제작)

  • Kim, Seong-Jin;Park, Sang-Hu
    • Journal of the Korean Society for Precision Engineering
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    • v.29 no.8
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    • pp.920-926
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    • 2012
  • Wrinkling is a common phenomenon in nature and the shape of a wrinkle can be defined using characteristic dimensions such as pitch, length, amplitude, and density etc. Wrinkle structure can be utilized in various research fields, and especially it has special characteristics when it used in applications of heat transfer; a wrinkly surface has the effect to promote turbulent flow and increasing surface area. However, the generation of wrinkle structures in somewhat regular is not easy. Till now, there are some research works focused on realization of wrinkles in micro scale. However, most of the processes generally requires high precision equipments and high costs, and also there is a limitation to generate the wrinkles in a large area. In this study, we propose a novel method named as a RCO (repetitive contact-and-open) process to fabricate wrinkle structure with low cost and relative easy way. Using the RCO, we fabricated micro-corrugate structures successfully. From the experimental results, we found out the process parameters of RCO, and showed the possibility of RCO to be used in real applications.

Micro-machining Characteristics using Focused Ion Beam (집속이온빔에 의한 미세가공 특성)

  • 이종항;박철우;이상조
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.636-639
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    • 2003
  • It is difficult to machine below 10 micrometers by conventional machining methods, such as micro-EDM. However, ultra micro machining using focused ion beam(FIB) is able to machine to 50 nanometers. In addition, 3 dimensional structures can be made by a combination of FIB and CVD to the level of 10 nanometers. Die & moulds techniques are better than one-to-one machining techniques in the mass production of ultra size structures, in regards to production costs. In this case, the machining precision of die & moulds affects produced parts. Also, it is advantageous to machine die & moulds to the 10 micrometer level by FIB technique rather than other techniques. In this paper, the grooving characteristics for die & mould materials by FIB were carried out experimentally in order to compare the machining characteristics of FIB with conventional machining methods. The results showed that the machining parameters and the scanning path of FIB affects the precision. The machined width and depth of the groove varied depending on the required depth due to the redeposition of the sputtered ion material accumulating on both the bottom and the side of the wall.

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Design and Fabrication of Movable Micro-Fersnel Lens on XY-stage (XY-Stage에 의해 정적인 변위를 갖는 미세 프레넬 렌즈(Micro-Fresnel Lens)의 설계 및 제작)

  • Kim, Che-Heung;Ahn, Si-Hong;Lim, Hyung-Taek;Kim, Yong-Kweon
    • Proceedings of the KIEE Conference
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    • 1998.07g
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    • pp.2515-2517
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    • 1998
  • The micro fresnel lens(MFL) was modeled and fabricated on a XY-stage electrostatically driven by comb actuator. The modeled MFL was approximated as a step shape with 4-phase and 4-zone plate. The focal length and diameter of the MFL is 20mm and 912${\mu}m$, respectively. The XY-stage suspending the MFL is designed to generate a large static displacement up to about 20${\mu}m$. On SOI substrates, we first fabricated MFL using the RIE(reactive Ion etching) technology and then patterned and etched bulk silicon to make XY-stage. After the fabrication of all structures on top side of the SOI substrates. $Si_3N_4$ was deposited for passivation of all structures using PECVD(plasma enhanced chemical vapor deposition). All the MFL systems width comb drive actuator were released by KOH etching from the bottom side of the SOI wafer using double-sided alignment technique. In fabrication of MFL, a dry etching conditions is established in order to improve surface roughness and to control the etched depth.

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Corrosion Quantification of Reinforcing Bar in Concrete Using Micro Computer Tomography (Micro-CT 활용 콘크리트 내 철근 부식 정량을 위한 실험적 연구)

  • Jang, In-Dong;Yi, Chong-Ku
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2019.05a
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    • pp.252-253
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    • 2019
  • Corrosion of rebars in reinforced concrete structures is a major factor that shortens the life of the structure. As corrosion progresses, the adhesion between the concrete tissues and the rebar decreases and the cracks in the concrete due to the expansion of the oxide intensify. Although it is necessary to measure corrosion behavior of rebars inside the concrete to measure degradation of structures due to rebar corrosion, no studies have been conducted to measure corrosion of rebars in In-situ state. In this study, corrosion of rebars in reinforced concrete specimens was attempted to be quantified using micro-computer tomography. Since corrosion of concrete takes several months per 10mm of cover, accelerated corrosion techniques were applied. Accelerated corrosion on the specimen was conducted by applying a 10 V magnetic field to the buried rebar and external electrodes with the specimen submerged in a 10% calcium chloride solution. The experiment found that within two weeks, more than 40% of rebar reduction occurred, and the cracks in the radial cracks occurred through the concrete structure, leading to the transfer of the oxide produced through the cracks to the surface of the specimen.

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The Surface Micro-structures with the Atmospheres in Graphitizing the Carboneous Materials for Rechargeable Batteries and Their Effects on the Cell Performances (이차전지용 탄소재의 흑연화 분위기에 따른 표면미세구조와 전지성능에 미치는 영향)

  • Huh, Yoon;Lee, Jeong-Yong;Yoon, Sang-Young
    • Korean Journal of Materials Research
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    • v.10 no.11
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    • pp.743-748
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    • 2000
  • Amorphous carbons(neddle cokes), which are used as anode materials for lithium ion secondary batteries, were graphitized or heat-treated at high temperature in $N_2$ atmosphere and in Ar atmosphere, after adding $B_2O_3$. After then, using transmission eletron microscopy, their surface micro-structures and the formations and distributions of the second phases were analyzed. It was studied that such analyzed results were related to the cell capacities and efficiencies.

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