• 한국기계가공학회지
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• 제17권5호
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• pp.8-15
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• 2018

Films with special properties (e.g., water-repellent films, optical films, anti-reflection films, and flexible films) are referred to as functional films. Recently, there has been interest in fine patterning methods for film fabrication. In particular there have been many studies that use a UV nanoimprint process involving a UV curing method. In this paper, a polymer film was fabricated by the UV nanoimprint process with a micro-pattern, and its durability was evaluated by a wear test and a nano-indentation test. The film mechanical properties (such as coefficient of friction, hardness, and modulus of elasticity) were measured. Moreover, the choice of PUA type resin used in the UV nanoimprint process was confirmed to impact the durability of the thin film. Despite making the polymer film samples using the same method and PUA type resin, different coefficient of friction, hardness, and modulus of elasticity values were obtained. PUA 4 resin had the most favorable coefficient of friction, hardness, and modulus of elasticity. This material is predicted to produce a high durability functional film.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 추계학술대회 논문집
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• pp.182-185
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• 2005

Indentation pattern and line pattern were machined on borosilicate(Pyrex 7740 glass) surface using the combination of mechanical machining by $Nanoi-indenter\circledR$ XP and HF wet etching, and a etch-mask effect of the affected layer of the nano-scratched and indented Pyrex 7740 glass surface was investigated. In this study, effects of indentation and scratch process with etching time on the morphologies of the indented and scratched surfaces after isotropic etching were investigated from an angle of deformation energies.

• 한국세라믹학회지
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• 제39권12호
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• pp.1149-1152
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• 2002

실리콘의 고압상을 연구하는 수단으로 압입 방법을 사용하였다. 실험에는 (100)과 (111) 실리콘 웨이퍼를 사용하였으며 하중유지 시간과 하중인가 속도에 따른 잔류상의 변화를 연구하였다. 압입 후의 상분석에는 Raman spectroscopy를 사용하였다. 하중 유지 시간의 실험결과 (111) 시편에서는 하중 유지 시간이 길어질수록 소성변형이 진행되어 고압상인 Si-III 와 Si-XII는 결정구조를 유지하지 못하고 사라지고 대신 a-Si가 관찰되었다. 하중 인가 속도 실험 결과 하중 인가 속도가 0.1 mm/min일 경우 모든 시편의 force/displacement 곡선에서 pop-in을 관찰할 수 있었다. Raman peak 분석 결과 이들 시편에서는 상전이가 관찰되었다. 5 mm/min의 하중인가 속도의 경우 (111) 시편에서는 급격한 변형의 증가 부분이 관찰되었으나 (100) 시편의 경우 관찰되지 않았다. 하중인가 속도가 느릴 경우 상전이 양상이 뚜렷하게 나타났으며 반대의 경우 상전이는 소량 관찰되거나 관찰되지 않았다. 이것은 하중인가속도가 상전이 영역의 부피에 영향을 주기 때문이라 판단된다.

• 대한기계학회논문집A
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• 제33권4호
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• pp.346-352
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• 2009

In the present study, the Weibull statistical analysis using the Monte-Carlo simulation has been performed to investigate the micro-Vickers hardness measurement reliability considering the variability. Experimental indentation test were performed with a micro-Vickers hardness tester for as-received and quenching and tempering specimens in SCM440 steels. The distribution of micro-Vickers hardness is found to be 2-parameter Weibull distribution function. The mean values and coefficients of variation (COV) for both data set are compared with results based on Weibull statistical analysis. Finally, Monte-Carlo simulation was performed in order to evaluate the effect of sample size on the micro-Vickers hardness measurement reliability. For the parent distribution with shape parameter 30.0 and scale parameter 200.0 (COV=0.040), the number of sample data required to obtain the true Weibull parameters was founded by 20. For the parent distribution with shape parameter 10.0 and scale parameter 200.0 (COV=0.1240), the number of sample data required to obtain the true Weibull parameters was founded by 30.

• 한국정밀공학회지
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• 제23권6호
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• pp.52-56
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• 2006

Punching tools like an electrodes are made by milling or etching or EDM. These methods had time consuming, low efficiency and air pollution. So, we have developed a shearing device which counter punching method for burrless cutting of micro wire. Using the straightened SUS304 wire with $200{\mu}m$ diameter, we confirmed the tendency of the shear plane for punch tools. It was impossible to completely remove the bun in the shearing process. In order to minimize the burr size and fine shear plane, we have accomplished the various experiment conditions such as the U-groove, the effect of the counter punch, shear angle and clearance. The results of the experiments show that indentation, slip plane and bent shape were related to the shear angle and clearance.

• 한국표면공학회지
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• 제30권5호
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• pp.347-354
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• 1997

Composite plating is a method of co-depositing fine particles of metallic, non-metallic compound or polymers in the plated layer to improve material properties such as were-resistance, lubrication, or corrosion resistance. Graded Ni-Sic composite coating were produced in this research. Prior to produce Graded Ni-SiC composite coatings, effects of particle size, particle content, pH of electrolyte, temperature, current density, stirring rate on the amount of SiC deposited in the Ni layer were investigated. By manipulating current density and plating time properties of these coating were evaluated by micro-indentation hardness test.

• 한국정밀공학회지
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• 제32권10호
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• pp.911-916
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• 2015

In the nano/micro scale, material properties are dependent on the size-scale of a structure. However, conventional micro-scale tensile tests have limitations to obtain reliable values of nano-scale material properties owing to residual stress and elastic slippage in the gripping/aligning process. The indenter-driven nano-scale tensile test provides prominent advantages simple testing device, high-quality nano-scale metallic specimen with negligible residual stress. In this paper, two-types of specimens (a specimen with multi-testing parts and a specimen with a single-testing part) are discussed. Focused ion beam (FIB) is employed to fabricate a nano-scale specimen from a thin nickel film. Using the specimen with a single-testing part, we obtained a nano-scale stress-strain curve of electroplated nickel film.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1104-1110
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• 2003

There are many applications of nanostructures, have been suggested by lots of researchers. It is highly required to measure the properties of nano-sized materials for design and fabrication of the nanostructures. In this paper, several techniques for measuring the mechanical properties of nano-structures are presented laying emphasis on the activity of Nano Property Measurement Team in KIMM. Some advanced applications of nano-indenter are described for measuring elastic, visco-elastic, frictional and adhesive properties as well as the standard methods of it. Micro-tensile test technique with accurate in-plane strain measurement method is also presented and its role in the property measurement of nanostructures is discussed.

• Tribology and Lubricants
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• 제11권5호
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• pp.114-121
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• 1995

An ultrasonic technique using normal-incident compressional waves was used to evaluate the surface and subsurface damage in ceramics produced by Hertzian indentation. Damage was produced by a blunt indenter (tungsten carbide ball) in glass-ceramic, green glass and silicon nitride. The damage was classified into two types; (1) Hertzian cone crack, in green glass and fine grain silicon nitride, and (2) distributed subsurface micro fractures, without surface damage, produced in glass ceramic. The ultrasonic technique was successful in detecting cone craks. The measurement results with the Hertzian cone cracks indicated that cracks perpendicular to the surface could be detected by the normal-incident compressional waws. Also shown is the capability of normal-incident compressional waves in detection distributed micro-sized cracks size of subsurface microfractures.

• 한국표면공학회지
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• 제54권6호
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• pp.307-314
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• 2021

Diamond-like carbon (DLC) is difficult to achieve sufficient adhesion because of weak bonding between DLC film and the substrate. The purpose of this study is to improve the adhesion between substrate and DLC film. DLC film was deposited on AISI H13 using linear ion source. To improve adhesion, the substrate was treated by dual post plasma nitriding. In order to define the mechanism of the improvement in adhesive strength, the gradient layer between substrate and DLC film was analyzed by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The microstructure of the DLC film was analyzed using a micro Raman spectrometer. Mechanical properties were measured by nano-indentation, micro vickers hardness tester and tribology tester. The characteristic of adhesion was observed by scratch test. The adhesion of the DLC film was enhanced by active screen plasma nitriding layer.