• International Journal of Precision Engineering and Manufacturing
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• 제7권4호
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• pp.18-22
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• 2006

Although many efforts have been made in making nanometer-sized holes, there is still a major challenge in fabricating individual single-digit nanometer holes in a more controllable way for different materials, size distribution and hole shapes. In this paper we describe our efforts to use a top down approach in nanofabrication method to make single-digit nanoholes. There are three major steps towards the fabrication of a single-digit nanohole. 1) Preparing the freestanding thin film by epitaxial deposition and electrochemical etching. 2) Making sub-micro holes ($0.2{\mu}\;to\;0.02{\mu}$) by focused ion beam (FIB), electron beam (EB), atomic force microscope (AFM), and others methods. 3) Reducing the hole size to less than 10 nm by epitaxial deposition, FIB or EB induced deposition and micro coating. Preliminary work has been done on thin films (30 nm in thickness) preparation, sub-micron hole fabrication, and E-beam induced deposition. The results are very promising.

• ETRI Journal
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• 제27권4호
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• pp.433-438
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• 2005

We present a new type of silicon micro-probe card using a three-dimensional probe beam of the cantilever type. It was fabricated using KOH and dry etching, a porous silicon micromachining technique, and an Au electroplating process. The cantilever-type probe beam had a thickness of $5 {\mu}m$, and a width of $50{\mu}$ and a length of $800 {\mu}m$. The probe beam for pad contact was formed by the thermal expansion coefficient difference between the films. The maximum height of the curled probe beam was $170 {\mu}m$, and an annealing process was performed for 20 min at $500^{\circ}C$. The contact resistance of the newly fabricated probe card was less than $2{\Omega}$, and its lifetime was more than 20,000 turns.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 추계학술대회논문집
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• pp.656-661
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• 2004

Static and dynamic responses of micro double cantilever beam structures interacted by electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as natural frequencies are estimated for several sets of beam properties and applied voltages. It is shown that the variations of beam properties resulted by manufacturing process influence the deflections and the modal characteristics significantly. Such information can be usefully employed for the design of MEMS structures.

• 한국기계가공학회지
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• 제21권4호
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• pp.77-83
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• 2022

Amorphous alloys exhibit excellent mechanical properties; therefore, application technology development is being attempted in various fields. However, industrial use of application technology is limited owing to the limitations in fabrication. In this study, micropattern fabrication of an amorphous alloy was conducted using laser beam machining. Although microhole fabrication is possible without the deformation of the amorphous phase through nanosecond pulsed laser beam machining, there are limitations in the generation of recast layers and spatters. In cover plate laser beam machining (c-LBM), a cover plate is used to reduce the thermal deformation and processing area. Therefore, it is possible to fabricate holes at the level of several micrometers. In this study, it was confirmed that recast layers are hardly generated in c-LBM. Furthermore, square-shaped micropatterns were successfully fabricated using c-LBM.

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2004년도 Proceedings of 2004 Korea-Japan Joint Seminar on Particle Image Velocimetry
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• pp.65-74
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• 2004

Measurement of concentration distributions of suspended particles in a micro-channel is out of the most crucial necessities in the area of Lab-on-a-chip to be used for various bio-chemical applications. One most feasible way to measure the concentration field in the micro-channel is using micro-LIF(Laser Induced Fluorescence) method. However, an accurate concentration field at a given cross plane in a micro-channel has not been successfully achieved so far due to various limitations in the light illumination and fluorescence signal detection. The present study demonstrates a novel method to provide an ultra thin laser sheet beam having five(5) microns thickness by use of a micro focus laser line generator. The laser sheet beam illuminates an exact plane of concentration measurement field to increase the signal to noise ratio and considerably reduce the depth uncertainty. Nile Blue A was used as fluorescent dye for the present LIF measurement. The enhancement of the fluorescent intensity signals was performed by a solvent mixture of water $(95\%)$ and ethanol (EtOH)/methanol (MeOH) $(5\%)$ mixture. To reduce the rms errors resulted from the CCD electronic noise and other sources, an expansion of grid size was attempted from $1\times1\;to\;3\times3\;or\;5\times5$ pixel data windows and the pertinent signal-to-noise level has been noticeably increased accordingly.

• 한국정밀공학회지
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• 제31권5호
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• pp.375-380
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• 2014

To enhance biocompatibility between the orthopedic implant stem and obsteoblast cells, bone-forming cells, micro-size holes are patterned in Ti plate surface. Initially, the house built laser power stabilization system is applied to the laser micro patterning machine to convince repeatable result. Various pulse widths are irradiated Ti plate and relationship between diameters of patterned holes and pulsed width is derived. Effect of multi pulse is observed and optimal pulse number is considered to avoid heat affected zone. After MG-63 osbeoblast cells are cultured, micro patterned Ti plates are compared with control plates. In SEM image, cells are well aligned and aggregation is observed in both 60, and $100{\mu}m$ patterned plates. Finally, free form surface stem model is prepared to test micro hole patterning.

• 마이크로전자및패키징학회지
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• 제26권3호
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• pp.7-13
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• 2019

In this paper, the principles, types and characteristics of the laser and laser soldering are introduced. Laser soldering methods for electronics, metals, semiconductors are also presented. Laser soldering is a non-contact process that transfers energy to solder joint by a precisely controlled beam. Demands for laser soldering are increasing due to bonding for complex circuits and local heating in micro joint. Laser absorption ratio depends on materials, and each material has different absorption or reflectivity of the laser beam, which requires fine adjustment of the laser beam. Laser types and operating conditions are also important factors for laser soldering performance. In this paper, the performance of Nd:YAG laser soldering is compared to the hot blast reflow. Meanwhile, a diode laser gives different wavelength and smaller parts with high performance, but it has various reliability issues such as heat loss, high power, and cooling technology. These issues need to be improved in the future, and further studies for laser micro-joining and soldering are required.

• 대한전기학회논문지:시스템및제어부문D
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• 제54권11호
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• pp.654-659
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• 2005

An improved power supply for APD(Avalanche Photo Diode) with a received optical power monitoring circuit allows the received optical power increase temporary without of the degradation of the electrical signal. For the cost reduction and simple fabrication, an improved power supply has been proposed that it was designed for driving a APD as a receiving device of a wireless optical transmission system. It was demonstrated that it was possible to improve a dynamic range by compensating the temperature coefficient of the APD up to 1.0 V/$^{\circ}C$ through the power supply. Also, for an efficient transmission at the receiver end, a simple structure of a single cylindrical micro-lens configuration was used in conjunction with the laser diode to partially compensate a laser beam ellipticity. For this purpose, an astigmatism introduced by the micro-lens is utilized for the additional compensation of the beam ellipticity at the receiver end. In this paper, it is demonstrated that an efficient beam shaping is realized by using the proposed configuration consisting of the single lens attached to the laser diode.

• 한국의학물리학회지:의학물리
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• 제25권2호
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• pp.116-121
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• 2014

본 본문은 Bio-MEMS 공정으로 제작한 마이크로 세포 분석 바이오칩을 사용하여 적혈구의 광학적 특성을 전압으로 측정한 실험이다. Bio-MEMS 공정을 이용하여 세포의 원활한 이동과 측정 분석에 사용되는 글라스에 채널 패턴 에칭을 위하여 포토리소그래피(photolithography)와 산화완충식각(BOE: buffered oxide etchant) 공정 조건, 세포 분석과 정보 전달에 사용되는 광섬유의 에칭을 위하여 산화완충식각 공정 조건, 세포나 유체를 칩과 외부의 전달 등에 사용되는 글라스의 홀을 위하여 전기화학방전(ECD: electro chemical discharge) 공정 조건, 글라스 접합을 위한 자외선반응접합(UVSA: ultraviolet sensitive adhesives) 공정 조건을 정립하였다. 또한 유체나 세포의 흐름 제어를 위한 라미나 흐름 조건, 적혈구세포에 대한 산란빔 파형을 측정하였다. 적혈구 실험을 통하여 출력 광섬유의 각도에 따른 산란빔이 출력측의 광섬유각도가 $0^{\circ}$일 때 약 17 V, 각도가 $5^{\circ}$일 때 약 10 V, 각도가 $10^{\circ}$일 때 약 6 V, 각도가 $15^{\circ}$일 때 약 4 V의 전압(Vpp)으로 측정되었다. 따라서 마이크로 세포 분석 바이오칩 제작의 소형화, 단순화, 공정신간 단축, 정량화하였고 적혈구의 광학적 특성을 측정을 측정함으로써 의공학(biomedical), 바이오칩공학(biochip), 반도체공학(semiconductor), 생물정보학(bioinformatics) 등의 응용과학 분야 발전에 기여할 것으로 기대한다.

• 대한의용생체공학회:의공학회지
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• 제25권2호
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• pp.97-102
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• 2004

소 동물 촬영에 이용될 수 있는 고해상도의 x-선 cone-beam micro computed tomography (micro-CT) 시스템을 개발하였다 Micro-CT 시스템은 120${\times}$120 mm2 의 2차원 평판 x-선 감지기, micro-focus x-선 발생장치, 주사 기구부, 병렬처리 영상 재구성 시스템으로 이루어져 있다. 개발된 시스템의 성능을 평가하기 위해 대조도와 공간해상도를 측정하였다. 대조도 실험에서는 95 mGy 에서 36 CT-번호를 구별할 수 있음을 확인하였고, 공간 해상도 실험에서는 14 lp/mm 의 성능을 확인하였다. 소 동물 촬영 결과로 실험용 쥐의 대퇴부, 심장 그리고 복부 동맥 혈관을 촬영한 경상을 제시하였다. 개발된 micro-CT 시스템은 소 동물을 이용한 생명공학 분야 연구에 널리 이용될 수 있을 것으로 기대된다.