Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Micro-pattern Fabrication of Amorphous Alloy by Laser Beam Machining

비정질 합금의 마이크로 패턴 레이저 가공

  • Kim, Haan (Department of Mechanical Engineering, Dongyang Mirae University) ;
  • Park, Jong Wuk (Department of Mechanical Design Engineering, Dongyang Mirae University)
  • 김한 (동양미래대학교 기계공학과) ;
  • 박종욱 (동양미래대학교 기계설계공학과)
  • Received : 2022.01.13
  • Accepted : 2022.03.02
  • Published : 2022.04.30
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Abstract

Amorphous alloys exhibit excellent mechanical properties; therefore, application technology development is being attempted in various fields. However, industrial use of application technology is limited owing to the limitations in fabrication. In this study, micropattern fabrication of an amorphous alloy was conducted using laser beam machining. Although microhole fabrication is possible without the deformation of the amorphous phase through nanosecond pulsed laser beam machining, there are limitations in the generation of recast layers and spatters. In cover plate laser beam machining (c-LBM), a cover plate is used to reduce the thermal deformation and processing area. Therefore, it is possible to fabricate holes at the level of several micrometers. In this study, it was confirmed that recast layers are hardly generated in c-LBM. Furthermore, square-shaped micropatterns were successfully fabricated using c-LBM.

Keywords

Acknowledgement

이 논문은 동양미래대학교 2019 교내 학술연구 사업의 연구비 지원에 의하여 연구되었음.

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