• Advances in nano research
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• 제15권5호
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• pp.423-439
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• 2023

The aim of this paper is to investigate the free vibration behavior of the micro sandwich beam composing of five layers such as functionally graded (FG) porous core, nanocomposite reinforced by carbon nanotubes (CNTs) and piezomagnetic/piezoelectric layers subjected to magneto electrical potential resting on silica aerogel foundation. The effect of foundation has been taken into account using Vlasov model in addition to rigid base assumption. For this purpose, an iterative technique is applied. The material properties of the FG porous core and FG nanocomposite layers are considered to vary throughout the thickness direction of the beams. Based on the Timoshenko beam theory and Hamilton's principle, the governing equations of motion for the micro sandwich beam are obtained. The Navier's type solution is utilized to obtain analytical solutions to simply supported micro sandwich beam. Results are verified with corresponding literatures. In the following, a study is carried out to find the effects of the porosity coefficient, porous distribution, volume fraction of CNT, the thickness of silica aerogel foundation, temperature and moisture, geometric parameters, electric and magnetic potentials on the vibration of the micro sandwich beam. The results are helpful for the design and applications of micro magneto electro mechanical systems.

• 반도체디스플레이기술학회지
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• 제9권1호
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• pp.17-21
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• 2010

Currently miniaturized electron-optical columns find their way into electron beam lithography systems. For better lithography process, it is required to make smaller spot size and longer working distance. But, the micro-columns of the multi-beam lithography system suffer from chromatic and spherical aberration, even when the electron beam is exactly on the symmetric axis of the micro-column. The off-axis error of the electron emitting source is expected to become worse with increasing off-axis distance of the focusing spot. Especially the electron beams far from the system optical axis have a non-negligible asymmetric intensity distribution in the micro-column. In this paper, the effect of the off-axis e-beam source is analyzed. To analyze this effect is to introduce a micro-column model of which the e-beam emitting source is aligned with the center of the electron beam by shifting them perpendicular to the system optical axis. The presented solution can be used to analysis the performance of the multi-electron-beam system. The performance parameters, such as the working distances and the focusing position are obtained by the computational simulations as a function of the off-axis distance of the emitting source.

• Steel and Composite Structures
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• 제26권4호
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• pp.513-531
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• 2018

In this article, static, buckling and free vibration analyses of a sinusoidal micro composite beam reinforced by single-walled carbon nanotubes (SWCNTs) with considering temperature-dependent material properties embedded in an elastic medium in the presence of magnetic field under transverse uniform load are presented. This system is used at micro or sub micro scales to enhance the stiffness of micro composite structures such as bar, beam, plate and shell. In the present work, the size dependent effects based on surface stress effect and modified strain gradient theory (MSGT) are considered. The generalized rule of mixture is employed to predict temperature-dependent mechanical and thermal properties of micro composite beam. Then, the governing equations of motions are derived using Hamilton's principle and energy method. Numerical results are presented to investigate the influences of material length scale parameters, elastic foundation, composite fiber angle, magnetic intensity, temperature changes and carbon nanotubes volume fraction on the bending, buckling and free vibration behaviors of micro composite beam. There is a good agreement between the obtained results by this research and the literature results. The obtained results of this study demonstrate that the magnetic intensity, temperature changes, and two parameters elastic foundations have important effects on micro composite stiffness, while the magnetic field has greater effects on the bending, buckling and free vibration responses of micro composite beams. Moreover, it is shown that the effects of surface layers are important, and observed that the changes of carbon nanotubes volume fraction, beam length-to-thickness ratio and material length scale parameter have noticeable effects on the maximum deflection, critical buckling load and natural frequencies of micro composite beams.

• Smart Structures and Systems
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• 제19권3호
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• pp.309-322
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• 2017

In this paper, the buckling, and free vibration analysis of tapered functionally graded carbon nanotube reinforced composite (FG-CNTRC) micro Reddy beam under longitudinal magnetic field using finite element method (FEM) is investigated. It is noted that the material properties of matrix is considered as Poly methyl methacrylate (PMMA). Using Hamilton's principle, the governing equations of motion are derived by applying a modified strain gradient theory and the rule of mixture approach for micro-composite beam. Micro-composite beam are subjected to longitudinal magnetic field. Then, using the FEM, the critical buckling load, and natural frequency of micro-composite Reddy beam is solved. Also, the influences of various parameters including ${\alpha}$ and ${\beta}$ (the constant coefficients to control the thickness), three material length scale parameters, aspect ratio, different boundary conditions, and various distributions of CNT such as uniform distribution (UD), unsymmetrical functionally graded distribution of CNT (USFG) and symmetrically linear distribution of CNT (SFG) on the critical buckling load and non-dimensional natural frequency are obtained. It can be seen that the non-dimensional natural frequency and critical buckling load decreases with increasing of ${\beta}$ for UD, USFG and SFG micro-composite beam and vice versa for ${\alpha}$. Also, it is shown that at the specified value of ${\alpha}$ and ${\beta}$, the dimensionless natural frequency and critical buckling load for SGT beam is more than for the other state. Moreover, it can be observed from the results that employing magnetic field in longitudinal direction of the micro-composite beam increases the natural frequency and critical buckling load. On the other hands, by increasing the imposed magnetic field significantly increases the stability of the system that can behave as an actuator.

• Structural Engineering and Mechanics
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• 제61권2호
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• pp.193-207
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• 2017

In this study, the vibration of an electrostatically actuated micro cantilever beam is analyzed in which a viscoelastic layer covers a portion of the micro beam length. This proposed model is considered as the main element of mass and pollutant micro sensors. The nonlinear motion equation is extracted by means of Hamilton principle, considering nonlinear shortening effect for Euler-Bernoulli beam. The non-linear effects of electrostatic excitation, geometry and inertia have been taken into account. The viscoelastic model is assumed as Kelvin-Voigt model. The motion equation is discretized by Galerkin approach. The linear free vibration mode shapes of non-uniform micro beam i.e. the linear mode shape of the system by considering the geometric and inertia effects of viscoelastic layer, have been employed as comparison function in the process of the motion equation discretization. The discretized equation of motion is solved by the use of multiple scale method of perturbation theory and the results are compared with the results of numerical Runge-Kutta approach. The frequency response variations for different lengths and thicknesses of the viscoelastic layer have been founded. The results indicate that if a constant volume of viscoelastic layer is to be deposited on the micro beam for mass or gas sensor applications, then a modified configuration may be found by using the analysis of this paper.

• Journal of the Optical Society of Korea
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• 제13권1호
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• pp.75-79
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• 2009

A four beam interference optical system for laser micro structuring using a pulse laser was demonstrated. The four beam interference optical system using a pulse laser(picosecond laser) can fabricate micro structure on mold material(NAK80) directly. Micro structure on the polymer can be reproduced economically by injection molding of the micro structure on the mold material. The four beam interference optical system was composed by the DOE(Diffractive Optical Element) and two lenses. The laser intensity distribution of four beam interference was explained by an interference optics point of view and by the image optics point of view. We revealed that both views showed the same result. The laser power distribution of a $1{\mu}m$ peak pattern was made by the four beam interference optical system and measured by the objective lens and CCD. A $1{\mu}m$ pitch dot pattern on the mold material was fabricated and measured by SEM(Scanning Electron Microscopy).

• 소성∙가공
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• 제13권3호
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• pp.216-224
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• 2004

In this study, we have developed a new UV$({\lambda}=355nm)$ laser micromachining technology by direct ablation method without masks. This technology allows that 3D micro parts can be fabricated rapidly and efficiently with a low price. And it has a benefit of reducing fabricating process simply. Due to micro parts' fabrication, such technologies need the control of XYZ stages with high precision, the design of optical devices to maintain micron spot sizes of laser beam and the control technology of laser focus. The developed laser manufacturing process for laser micromachining is that, after extracting coordinates of shape data from CAD model data, a beam path considering manufacturing features of laser beam is created by using genetic algorithm. This generated manufacturing process is sent to stage controller. In order to improve the surface quality of micro parts, we have carried out experiments on iteration manufacturing and beam step-over by using a minimum focus size. Moreover, we have fabricated a micro-channel through the developed laser micromachining technology and verified it through the results.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1194-1197
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• 2005

Micro nozzle is employed as a dynamic passive valve in micro fluidic devices. Micro nozzle array is used in micro droplet generation in bio-medical applications and propulsion device for actuating satellite and aerospace ship in vacuum environments. Aperture angle and the channel length of the micro nozzle affect its retification efficiency, and thus it is needed to produce micro nozzle precisely. MEMS process has a limit on making a micro nozzle with high-aspect ratio. Reactive ion etching process can make high-aspect ratio structure, but it is difficult to make the complex shape. Focused ion beam deposition has advantage in machining of three-dimensional complex structures of sub-micron size. Moreover, it is possible to monitor machining process and to correct defected part at simultaneously. In this study, focused ion beam deposition was applied to micro nozzle production.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.217-217
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• 2009

This paper describes the characteristics of polycrystalline 3C-SiC doubly clamped beam micro resonators. The polycrystalline 3C-SiC doubly clamped beam resonators with 60 ~ 100 ${\mu}m$ lengths, $10\;{\mu}m$ width, and $0.4\;{\mu}m$ thickness were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonant frequency was measured by a laser vibrometer in vacuum at room temperature. For the 60 ~ 100 ${\mu}m$ long cantilevers, the fundamental frequency appeared at 373.4 ~ 908.1 kHz. The resonant frequencies of doubly clamped beam with lengths were higher than simulated results because of tensile stress. Therefore, polycrystalline 3C-SiC doubly clamped beam micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.925-928
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• 2004

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. This paper was carried out some experiments and verifications of mechanism on FIB-CVD using SMI8800 made by Seiko. FIB-CVD has in fact proved to be commercially useful for repair processes because the beam can be focused down to 0.05$\mu\textrm{m}$ dimensions and below and because the same tool can be used to sputter off material with sub-micrometer precision simply by turning off the gas ambient. Recently the chemical vapour deposition induced ion beam has been required more deposition rate and accurate pattern because of trying to manufacture many micro and nano parts. Therefore this paper suggested the optimization parameters and discussed some mechanism of chemical vapour deposition induced ion beam on FIB-CVD for simple pattern.