• Journal of Institute of Convergence Technology
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• v.4 no.2
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• pp.41-45
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• 2014

Micro fabrication technologies of aluminium have been required to satisfy many demands in technology fields. Pulsed laser beam machining can be an alternative method to accomplish the micro machining of aluminium. Pulsed laser beam can be applied to micro machining such as micro drilling and milling. Using pulsed laser beam, the machining characteristics of aluminium in micro drilling and milling were investigated according to average power, repetition rate, moving speed of spot. The laser beam machining with the optimal conditions can achieve precise micro figures. As a result, micro pattern, text and structures on aluminium surface was successfully fabricated by pulsed laser beam machining.

• Advances in materials Research
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• v.8 no.3
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• pp.219-235
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• 2019

This research is devoted to analyzing mechanical-thermal post-buckling behavior of a micro-size beam reinforced with graphene platelets (GPLs) based on geometric imperfection effects. Graphene platelets have three types of dispersion within the structure including uniform-type, linear-type and nonlinear-type. The micro-size beam is considered to be perfect (ideal) or imperfect. Buckling mode shape of the micro-size beam has been assumed as geometric imperfection. Modified couple stress theory has been used for describing scale-dependent character of the beam having micro dimension. Via an analytical procedure, post-buckling path of the micro-size beam has been derived. It will be demonstrated that nonlinear buckling characteristics of the micro-size beam are dependent on geometric imperfection amplitude, thermal loading, graphene distribution and couple stress effects.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.7
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• pp.737-744
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• 2012

EDM is the manufacturing process that uses the thermal energy to machine electrically conductive part. Despite a lot of research has been conducted for decades, the best aspect ratio of the micro hole using micro-EDM has not been over 30, yet. In the present study, new fabrication scheme was introduced to increase the aspect ratio of micro hole dramatically. Micro holes with less than 10 aspect ratio were aligned and welded together to manufacture a micro hole with extreme aspect ratio. Alignment of the micro hole with over 380 aspect ratio was conducted by the home-made apparatus installed with microscope and laser beam. The micro hole with extreme aspect ratio was used to shape pencil beam from proton beam generated from MC-50 cyclotron. The pencil beam was utilized to machine test specimen whose result was compared with GEANT4 computer simulation. It was shown that the experimental and simulation result were closer as the aspect ratio of the micro hole was bigger.

• International Journal of Precision Engineering and Manufacturing
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• v.3 no.2
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• pp.72-77
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• 2002

In this paper, a simple method to measure the residual stress in microstructure is presented. In order to find the residual stress in micro-machined beam, the first natural frequency of the beam that has the residual stress inside is analyzed using Rayleigh's energy method. Micro gold electroplated structure is fabricated by surface micro-machining process including electroplating. The made structure is an approximate shape of clamped-clamped beam and its 1 st natural frequency is measured by resonance method. For the better estimation of the residual stress, an equivalent length of micro-fabricated beam to ideal beam is calculated by FEM. The residual stress was estimated from the equivalent length and the measured natural frequency. It was found that a tensile stress was residue in the micro beam structure.

• Journal of Institute of Convergence Technology
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• v.5 no.2
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• pp.21-25
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• 2015

This paper proposes a fabrication process of deposited layer with micro patterns that uses a combination of a pulsed laser beam machining and an electrodeposition. This process consists of the electrodeposition and the laser beam machining. The deposited layer on metal can be selectively eliminated by laser ablation. As a result, the deposited layer with micro patterns can be fabricated without a mask. The characteristics of the deposited layer on stainless steel were investigated according to the average power and marking speed in the pulsed laser beam machining. The optimal laser beam conditions for precise micro patterning of the deposited layer were determined. Finally, the deposited copper layer with micro text was successfully fabricated by the pulsed laser beam machining.

• Interaction and multiscale mechanics
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• v.5 no.4
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• pp.385-397
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• 2012

In this paper the dynamic stiffness matrix method was used for the free vibration analysis of axially moving micro beam with constant velocity. The extended Hamilton's principle was employed to derive the governing differential equation of the problem using the modified couple stress theory. The dynamic stiffness matrix of the moving micro beam was evaluated using appropriate expressions of the shear force and bending moment according to the Euler-Bernoulli beam theory. The effects of the beam size and axial velocity on the dynamic characteristic of the moving beam were investigated. The natural frequencies and critical velocity of the axially moving micro beam were also computed for two different end conditions.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2263-2265
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• 2000

본 연구에서는 광 픽업의 소형, 경량 제작을 위해 MEMS 기술을 이용하여 planar micro optics 방법으로 광 픽업을 구성하는 micro lens, actuator, beamsplitter 등을 설계, 제작하고 집적화한 픽업헤드를 구성하여 그 특성을 분석하였다. 특성분석 결과 disk에 focusing 되는 beam의 형상은 circle type의 비교적 양호한 결과를 얻을 수 있었고 beam spot size는 약 22$\mu m$로 실제 system에서 요구되는 0.9$\mu m$이내의 beam spot size에 비해 약 25배 가량 큰 beam spot size를 얻을 수 있었다.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.12
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• pp.195-200
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• 2000

In order to find a residual stress in the micro-machined beam, first natural frequency of the beam that has the residual stress inside is analyzed using the Rayleigh's energy method. Micro gold electroplated structure is fabricated by surface micro-machining process. The made structure is clamped-clamped beam and its 1st natural frequency is measured by resonance method. For the better estimation of the residual stress, an equivalent length of micro-machined beam to ideal beam is calculated by FEM. The residual stress is estimated from the equivalent length and the measured natural frequency.

• Structural Engineering and Mechanics
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• v.64 no.5
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• pp.527-541
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• 2017

In this work, a new hyperbolic shear deformation beam theory is proposed based on a modified couple stress theory (MCST) to investigate the bending and free vibration responses of functionally graded (FG) micro beam made of porous material. This non-classical micro-beam model introduces the material length scale coefficient which can capture the size influence. The non-classical beam model reduces to the classical beam model when the material length scale coefficient is set to zero. The mechanical material properties of the FG micro-beam are assumed to vary in the thickness direction and are estimated through the classical rule of mixture which is modified to approximate the porous material properties with even and uneven distributions of porosities phases. Effects of several important parameters such as power-law exponents, porosity distributions, porosity volume fractions, the material length scale parameter and slenderness ratios on bending and dynamic responses of FG micro-beams are investigated and discussed in detail. It is concluded that these effects play significant role in the mechanical behavior of porous FG micro-beams.

• Structural Engineering and Mechanics
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• v.71 no.5
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• pp.485-502
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• 2019

In this research, the nonlinear static, buckling and vibration analysis of viscoelastic micro-composite beam reinforced by various distributions of boron nitrid nanotube (BNNT) with initial geometrical imperfection by modified strain gradient theory (MSGT) using finite element method (FEM) are presented. The various distributions of BNNT are considered as UD, FG-V and FG-X and also, the extended rule of mixture is used to estimate the properties of micro-composite beam. The components of stress are dependent to mechanical, electrical and thermal terms and calculated using piezoelasticity theory. Then, the kinematic equations of micro-composite beam using the displacement fields are obtained. The governing equations of motion are derived using energy method and Hamilton's principle based on MSGT. Then, using FEM, these equations are solved. Finally the effects of different parameters such as initial geometrical imperfection, various distributions of nanotube, damping coefficient, piezoelectric constant, slenderness ratio, Winkler spring constant, Pasternak shear constant, various boundary conditions and three material length scale parameters on the behavior of nonlinear static, buckling and vibration of micro-composite beam are investigated. The results indicate that with an increase in the geometrical imperfection parameter, the stiffness of micro-composite beam increases and thus the non-dimensional nonlinear frequency of the micro structure reduces gradually.