• Title/Summary/Keyword: micro-array

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Reliable design and characterization of MEMS probe tip (신뢰성을 갖는 MEMS 프로브 팁의 설계 및 특성평가)

  • Lee, Seung-Hun;Chu, Sung-Il;Kim, Jin-Hyuk;Seo, Ho-Won;Han, Dong-Chul;Moon, Sung
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.1718-1723
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    • 2007
  • The Probe Card is a test component which is to classify the good semiconductor chips before the packaging. The yield of semiconductor product can be better from analysis of probe test information. Recently the technology of the probe card needs narrow width and large amount of probe tip. In this research, the probe tip based on the MEMS(micro electro mechanical system) technology was designed and fabricated to improve the reliability of the test and to meet 2-dimensional Array of tip. The mechanical and electrical properties of proposed tip were evaluated and it has over 100,000 of repetition times in the condition of 5gf, $20{\mu}m$ Over Drive.

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A Study on the Optical communication part Lid glass manufacture technology by high temperature and compression molding (광통신 부품 Lid glass 고온압축성형의 관한 연구)

  • Jang, K.C.;Lee, D.G.;Jang, H.
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.1526-1531
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    • 2007
  • Data transmission capacity that is required in 2010 is forecasted that increase by optical communication capacity more than present centuple, and is doing increased demand of optical communication related industry product present. Specially, Lid glass' application that is one of optical communication parts is used in optical communication parts manufacture of Fiber array, Ferrule array, Fanout Black, Silica optical waveguide chip and splitter etc. Also, it is used widely for communication network system, CATV, ATM-PON, FTTH and system. But, Lid glass need much processing times and becomes cause in rising prices of optical communication parts because production cost is expensive. The objectives, of this work is to suggest the micro concave and convex pattern manufacturing technology on borosilicate plate using high temperature and compression molding method. As a result, could developed micro pattern Mold more than 5 pattern, and reduce Lid Glass manufacture cycle time.

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Development of the Digital Controller for High Precision Digital Power Supply (고정밀전원장치를 위한 디지털 제어기 개발)

  • Ha, K.M.;Lee, S.K.;Kim, Y.S.
    • Proceedings of the Korean Society of Marine Engineers Conference
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    • 2006.06a
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    • pp.249-250
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    • 2006
  • In this paper, hardware design and implementation of digital controller for the High Precision Digital Power Supply (HPDPS) based on Digital Signal Processor (DSP) and Field Programmable Gate Array (FPGA) is presented. Developed digital controller is composed of high resolution Digital Pulse Width Modulation (DPWM) and high resolution analog to digital converter circuit with anti-aliasing filter. And Digital Signal Processor (DSP) has the capability of a few micro-second calculation time for one feedback loop. 32-bit DSP and DPWM with 150[ps] step resolution is used to implement the HPDPS. Also 18-bit 2 mega sample per second ADC board is adopted for the developed digital controller. Also, hardware structure of the developed digital controller and experimental results of the first prototype board for HPDPS is described.

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Thermal Fatigue Life Prediction of ${\mu}BGA$ Solder Joint Using Sn-37mass%Pb Solder and Sn-3.5mass%Ag Lead-free Solder (Sn-37mass%Pb 솔더 및 Sn-3.5mass%Ag 무연솔더를 이용한 ${\mu}BGA$ 솔더접합부의 열피로수명 예측)

  • 신영의;이준환;하범용;정승부;정재필
    • Journal of Welding and Joining
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    • v.19 no.4
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    • pp.406-412
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    • 2001
  • This study is focussed on the numerical prediction of the thermal fatigue life of a ${\mu}BGA$(Micro Ball Grid Array) solder joint. Numerical method is used to perform three-dimensional finite element analysis for Sn-37mass%Pb. Sn-3.5mass%Ag solder alloys during the given thermal cycling. Strain values, along with the result of mechanical fatigue tests for solder alloys were then used to predict the solder joint fatigue life using the Coffin-Manson equation. In this study, a practical correlation for the prediction of the thermal fatigue life is suggested by using the dimensionless variable $\gamma$. As a result. it could be found that Sn-3.5mass%Ag has longer fatigue life than Sn-37mass%Pb in low cycle fatigue. In addition. the result with ${\gamm}ashow$a good agreement with the FEA results.

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Fabrication of Microlens Array by UV-molding (UV 성형을 통한 마이크로 렌즈 어레이의 제작)

  • 김석민;임지석;강신일;전병희
    • Transactions of Materials Processing
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    • v.13 no.3
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    • pp.236-241
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    • 2004
  • UV-molded microlens arrays with high replication quality were fabricated using a parametric design method. It is important to maximize the replication quality, because one can obtain the replicated micro-optical components with desired properties by accurate control of the shape. In the present study, nickel mold inserts for microlens arrays with lenses having diameters between $3\mu\textrm{m}$ and $230\mu\textrm{m}$ were fabricated by electroforming process. An UV-molding system was designed and constructed, a simple technique to avoid micro-air bubbles was first suggested, and the effects of the compression pressure and UV-curing dose on the replication quality of UV-molded microlens arrays with a diameter of $14\mu\textrm{m}$ were examined experimentally. Finally, geometrical and optical properties of the replicated microlens arrays were measured and analyzed.

The microphone system of the cellular phone for privately telephonic communication (속삭임 통화를 위한 휴대 전화용 마이크로폰 시스템)

  • 최성준;문원규;이정현
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2001.11b
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    • pp.1335-1340
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    • 2001
  • The information technology brought us many kinds of conveniences to our life, but it also caused social problems such as privacy interference, unexpected personal information leaks, and nose generation by telephonic talks, etc. In this paper, the microphone system of the cellular phone is developed to prevent these problems caused by progress of information technology. The developed system was designed to detect only acoustic signals from a human being in the presence of various kinds of background noises. A windscreen was designed by use of micro-channels to eliminate the popping noise by the wind from the mouth of a speaker and four microphone array and signal processing techniques are applied to reduce background noise. The impact of the developed system was evaluated by experimental tests. The results show that the system can improve the required functions considerably.

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Development of Multi Sample Array System Based on Pneumatic Valve (공압식 미세밸브를 이용한 다중유체 배열장치 개발)

  • Kim, Chul Min;Park, Seo Jung;Kim, Gyu Man
    • Journal of the Korean Society for Precision Engineering
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    • v.34 no.1
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    • pp.59-63
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    • 2017
  • We present a multi-sample array device based on a pneumatic system. Solenoid valves were used to control a micro valve in a pneumatic system. The use of a compressor together with a vacuum pump ensured that one outlet could supply both compression and vacuum pressure. The multi-sample array device was fabricated using conventional photolithography and PDMS casting. The device was composed of a multiplexer, sample array, and rinsing. The multiplexer could control four sample solutions injecting into the sample array chamber. Sample solution not arrayed was removed by DI-water from the rinsing inlet. To prevent trapping of microbubbles in the channel during injection of sample solution into the device, surfactant was added in PDMS solution to serve as a hydrophilic surface treatment. As a result, the device could be used as a sample array for 64 cases, using four samples and three columns of three chambers.

Micromachining for plastic mold steel using DPSS UV laser and wet etching (DPSS UV Laser와 습식 식각을 이용한 금형강 미세 가공)

  • Min, Kyoung-Ik;Kim, Jae-Gu;Cho, Sung-Hak;Choi, Doo-Sun;Whang, Kyung-Hyun
    • Laser Solutions
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    • v.12 no.3
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    • pp.1-6
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    • 2009
  • This paper describes the method for the fabrication of micro dot array on a plastic mold steel using DPSS (diode pumped solid-states) UV laser and wet etching process. We suggest the process of the ablation of a photoresist (PR) coated on plastic mold steel and wet etching process using solutions of various concentrations of $FeCl_3$, $HNO_3$ in water as etchant. This method makes it possible to fabricate metallic roller mold because the microstructures are directly fabricated on the metal surface. In the range of operating conditions studied, $17\;{\mu}J$ laser pulse energy and 50 ms laser exposure time, an etchant containing 40wt% $FeCl_3$, 5wt% $HNO_3$ and etch time for 45 s gave the $10\;{\mu}m$ of micro dot pattern on plastic mold steel.

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Fabrication Process and Power Generation Characteristics of the Micro Thermoelectric Devices Composed of n-type Bi-Te and p-type Sb-Te Nanowires (n형 Bi-Te 나노와이어와 p형 Sb-Te 나노와이어로 구성된 미세열전소자의 형성공정 및 열전발전특성)

  • Kim, Min-Young;Park, Kyung-Won;Oh, Tae-Sung
    • Korean Journal of Metals and Materials
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    • v.47 no.4
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    • pp.248-255
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    • 2009
  • A micro thermoelectric device was processed by electroplating the n-type Bi-Te nanowires and ptype Sb-Te nanowires into an alumina template with 200 nm pores. Power generation characteristics of the micro devices composed of the Bi-Te nanowires, the Sb-Te nanowires, and both the Bi-Te and the Sb-Te nanowires were analyzed with applying a temperature difference of $40^{\circ}C$ across the devices along the thickness direction. The n-type Bi-Te and the p-type Sb-Te nanowire devices exhibited thermoelectric power outputs of $3.8{\times}10^{-10}W$ and $4.8{\times}10^{-10}W$, respectively. The output power of the device composed of both the Bi-Te and the Sb-Te nanowires decreased to $1.4{\times}10^{-10}W$ due to a large electrical resistance of the Cu electrode connecting the Bi-Te nanowire array with the Sb-Te nanowire array.

Machining of The Micro Nozzle Using Focused Ion Beam (집속이온빔을 이용한 마이크로 노즐의 제작)

  • Kim G.H.;Min B.K.;Lee S.J.;Park C.W.;Lee J.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1194-1197
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    • 2005
  • Micro nozzle is employed as a dynamic passive valve in micro fluidic devices. Micro nozzle array is used in micro droplet generation in bio-medical applications and propulsion device for actuating satellite and aerospace ship in vacuum environments. Aperture angle and the channel length of the micro nozzle affect its retification efficiency, and thus it is needed to produce micro nozzle precisely. MEMS process has a limit on making a micro nozzle with high-aspect ratio. Reactive ion etching process can make high-aspect ratio structure, but it is difficult to make the complex shape. Focused ion beam deposition has advantage in machining of three-dimensional complex structures of sub-micron size. Moreover, it is possible to monitor machining process and to correct defected part at simultaneously. In this study, focused ion beam deposition was applied to micro nozzle production.

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