Transactions of Materials Processing (소성∙가공)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
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Fabrication of Microlens Array by UV-molding

UV 성형을 통한 마이크로 렌즈 어레이의 제작

  • 김석민 (연세대학교 대학원 기계공학과) ;
  • 임지석 (연세대학교 대학원 기계공학) ;
  • 강신일 (연세대학교 기계공학) ;
  • 전병희 (인덕대학 컴퓨터응용기계계열)
  • Published : 2004.06.01
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Abstract

UV-molded microlens arrays with high replication quality were fabricated using a parametric design method. It is important to maximize the replication quality, because one can obtain the replicated micro-optical components with desired properties by accurate control of the shape. In the present study, nickel mold inserts for microlens arrays with lenses having diameters between $3\mu\textrm{m}$ and $230\mu\textrm{m}$ were fabricated by electroforming process. An UV-molding system was designed and constructed, a simple technique to avoid micro-air bubbles was first suggested, and the effects of the compression pressure and UV-curing dose on the replication quality of UV-molded microlens arrays with a diameter of $14\mu\textrm{m}$ were examined experimentally. Finally, geometrical and optical properties of the replicated microlens arrays were measured and analyzed.

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References

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