• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1947-1950
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• 2008

Printing technology is a very useful method in the several process of industrial fabrication due to noncontact and fast pattern generation. To make micro pattern, we investigate the electrostatic induced inkjet printer head for micro droplet generation and drop-on-demand jetting. In order to achieve the drop-on-demand micro droplet ejection by the electrostatic induced inkjet printer head, the pulsed DC voltage is supplied. In order to find optimal pulse conditions, we tested jetting performance for various bias and pulse voltages for drop-on-demand ejection. In this result, we have successful drop-on-demand operation and micro patterning. Therefore, our novel electrostatic induced inkjet head printing system will be applied industrial area comparing conventional printing technology.

• Korean Membrane Journal
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• 제5권1호
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• pp.1-9
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• 2003

Due to the increasing intelligence, the increasing connectivity, and always-on characteristics energy needs for the portable electronics cannot be managed by the state-of-art battery technology. Micro fuel cell fuelled by aqueous methanol is gaining lots of interest from the new energy storage developers since it has the potential to offer the longer operation time to the portable electronic devices. Although the technical barriers to the commercialization exit, it is expected that the micro fuel cell technology bring huge benefits to the current energy storage market once it matures. In the article, benefits, challenges and market players of the direct methanol fuel cell arena is briefly reviewed.

• 반도체디스플레이기술학회지
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• 제12권3호
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• pp.29-34
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• 2013

Solar cell has been considered as renewable green energy. Its silicon wafer thickness is thinner due to manufacturing cost and accordingly micro cracks is often generated in the process. Micro cracks result in bad quality of solar cell, and so their accurate and reliable detection is required. In this paper, near-infrared optics system is newly designed based on the analysis of near-infrared transmittance characteristics and its important parameters are optimally selected using the design of experiment for micro crack detection in solar cell wafer. The performance of the proposed method is verified using several experiments.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.490-493
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• 2004

There is great difficulty in machine below 10 micrometers by conventional machining methods, such as micro-EDM. However, ultra micro machining using focused ion beam(FIB) is able to machine to 50 nanometers. Bie ＆ moulds techniques are better than one-to-one machining techniques in regards to production costs in the mass production of ultra size structures. Also, it is advantageous to machine die ＆ moulds to the 10 micrometers level by FIB technique rather than other techniques. It is difficult to machine the three dimensional machining, such as micro lens, using FIB system because of their machining characteristics. In this paper, three dimensional machining techniques were properly introduced, and also experiments showed effectiveness of their techniques.

• 한국공작기계학회논문집
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• 제16권5호
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• pp.198-204
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• 2007

This study was carried out to develope a flow control system using to supply PR(photo-resist) in the semi-conductor manufacturing process. The features of this system are to be able to measure the high viscosity and micro-flow. To meet above study object some ideas was induced to design a new concept valve with new material, multi-cross wheel, and new sealing method etc.. As the evaluations on the developed micro-flowmeter it was enough satisfied to use at the IT industries such as photo-resist process.

• 전기학회논문지
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• 제61권1호
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• pp.94-98
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• 2012

The behavior of ozone micro bubble cleaning system was investigated to evaluate the solution as a new method of solar cell wafer cleaning in comparison with former conventional RCA cleaning. We have developed the ozone dissolution system in the ozonated water for more efficient cleaning conditions. The optimized cleaning conditions for solar cell wafer process were 10 ppm of ozone concentration and 12 minutes in cleaning periods, respectively. We have confirmed the cleaning reliability and cell efficiencies after ozone micro bubble cleaning. Using this new cleaning technology, it was possible to obtain higher efficiency, higher productivity, and fast tact time for applying cleaning in the fields on bare ingot wafer, LED wafers as well as the solar cell wafer.

• 재활복지공학회논문지
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• 제8권1호
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• pp.19-26
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• 2014

본 연구는 고령자를 대상으로 마이크로 버블과 LED 조명을 이용하여 반신욕 시 인체의 변화를 평가하였다. 피험자는 남성 고령자 6명과 여성 고령자 7명을 대상으로 마이크로 버블을 이용하는 그룹(남성 3명, 여성 4명)과 마이크로 버블을 이용하지 않는 그룹(남성 3명, 여성 3명)으로 나누었다. 실험은 LED 조명의 색상을 달리하여 4회 진행하였다. 실험 결과 교감 신경에 비하여 부교감 신경의 활성화를 보였으며(마이크로 버블을 이용 한 반신욕 : 21.41%), 빨간색 조명과 마이크로 버블을 이용한 반신욕에서 $5.93^{\circ}C$로 체열의 가장 큰 증가를 보였다. 본 결과는 마이크로 버블과 LED 조명이 반신욕 시스템에 활용될 거라 사료된다.

• 대한기계학회논문집B
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• 제34권2호
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• pp.113-120
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• 2010

마이크로채널 열교환기에서 R-134a의 증발열전달 특성에 관하여 실험적 연구를 수행하였다. 마이크로채널은 금속박판인 SUS304에 포토에칭 공정으로 식각되었으며, 13개의 금속박판은 차례로 적층되어 확산접합공정을 통하여 접합되었다. 본 연구에서는 R-134a의 증발온도, 질량유속 그리고 물의 입구온도의 변화에 따른 열전달 특성을 대향류 조건에서 실험하였다. 실험결과 R-134a와 물의 입구온도차가 클수록 증발열전달량은 증가하였으며, 증발열전달계수는 0.67 kW/$m^2{\cdot}^{\circ}C$에서 6.23 kW/$m^2{\cdot}^{\circ}C$이었다. 아울러 마이크로채널 열교환기에서 R-134a와 물의 열교환에 따른 증발열전달 특성에 영향을 미치는 Reynold수와 무차원 온도비 $\Theta$를 도출하여 Nusselt수에 관한 실험적 상관식을 제안하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.1051-1054
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• 2000

We developed the micro CSF (celebrospinal fluid) shunt valve with surface and bulk micromachining technology in polymer MEMS. This micro CSF shunt valve was formed with four micro check valves to have a membrane connected to the anchor with the four bridges. The up-down movement of the membrane made the CSF on & off and the valve characteristic such as open pressure was controlled by the thickness and shape of the bridge and the membrane. The membrane, anchor and bridge layer were made of the $O_2$ RIE (reactive ion etching) patterned Parylene thin film to be about 5~10 microns in thickness on the silicon wafer. The dimension of the rectangular nozzle is 0.2＊0.2 $\textrm{mm}^2$ and the membrane 0.45 mm in diameter. The bridge width is designed variously from 0.04 mm to 0.12 mm to control the valve characteristics. To protect the membrane and bridge in the CSF flow, we developed the packaging system for the CSF micro shunt valve with the deep RIE of the silicon wafer. Using this package, we can control the gap size between the membrane and the nozzle, and protect the bridge not to be broken in the flow. The total dimension of the assembled system is 2.5＊2.5 $\textrm{mm}^2$ in square, 0.8 mm in height. We could precisely control the burst pressure and low rate of the valve varing the design parameters, and develop the whole CSF shunt system using this polymer MEMS fabricated CSF shunt valve.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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• pp.150-153
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• 2006

Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system as analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.