• Journal of the Korean Vacuum Society
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• v.17 no.1
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• pp.16-22
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• 2008

We studied plasma etching of polycarbonate in $O_2/SF_6$, $O_2/N_2$ and $O_2/CH_4$. A capacitively coupled plasma system was employed for the research. For patterning, we used a photolithography method with UV exposure after coating a photoresist on the polycarbonate. Main variables in the experiment were the mixing ratio of $O_2$ and other gases, and RF chuck power. Especially, we used only a mechanical pump for in order to operate the system. The chamber pressure was fixed at 100 mTorr. All of surface profilometry, atomic force microscopy and scanning electron microscopy were used for characterization of the etched polycarbonate samples. According to the results, $O_2/SF_6$ plasmas gave the higher etch rate of the polycarbonate than pure $O_2$ and $SF_6$ plasmas. For example, with maintaining 100W RF chuck power and 100 mTorr chamber pressure, 20 sccm $O_2$ plasma provided about $0.4{\mu}m$/min of polycarbonate etch rate and 20 sccm $SF_6$ produced only $0.2{\mu}m$/min. However, the mixed plasma of 60 % $O_2$ and 40 % $SF_6$ gas flow rate generated about $0.56{\mu}m$ with even low -DC bias induced compared to that of $O_2$. More addition of $SF_6$ to the mixture reduced etch of polycarbonate. The surface roughness of etched polycarbonate was roughed about 3 times worse measured by atomic force microscopy. However examination with scanning electron microscopy indicated that the surface was comparable to that of photoresist. Increase of RF chuck power raised -DC bias on the chuck and etch rate of polycarbonate almost linearly. The etch selectivity of polycarbonate to photoresist was about 1:1. The meaning of these results was that the simple capacitively coupled plasma system can be used to make a microstructure on polymer with $O_2/SF_6$ plasmas. This result can be applied to plasma processing of other polymers.

• Journal of the Korean Ceramic Society
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• v.42 no.3 s.274
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• pp.165-170
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• 2005

Sol-gel methods offer many advantages over conventional slip-casting, including the ability to produce ceramic membranes. They are purer, more homogeneous, more reactive and contain a wider variety of compositions. We produced ormosil sol using sol-gel process under various molecular weight of polymer species[polyethylene glycol(PEG)] in total system [Tetraethyl ortho silicate(TEOS)-polyethylene glycol(PEG)]. The properties of as-prepared ormosil sol such as viscosity and gelation time are characterized. Also, the ceramic membrane was prepared by dip-coating with synthetic sol and its microstructure was observed by scanning electron microscopy. The permeability and rejection efficiency of membrane for oil/water emulsion were evaluated as cross­flow apparatus. The ormosil sol coated membrane was easily formed by steric effect of polymer and it improved flux efficiency because infiltration into porous support decreased. Its flux efficiency was elevated about $200\;l/m^2h$ compared with colloidal sol coated membrane at point of five minutes from starting test.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.409-409
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• 2014

Recently hexagonal boron nitride (h-BN), III-V compound of boron and nitrogen with strong covalent $sp^2$ bond, is a 2 dimensional insulating material with a large direct band gap up to 6 eV. Its outstanding properties such as strong mechanical strength, high thermal conductivity, and chemical stability have been reported to be similar or superior to graphene. Because of these excellent properties, h-BN can potentially be used for variety of applications such as dielectric layer, deep UV optoelectronic device, and protective transparent substrate. Ultra flat and charge impurity-free surface of h-BN is also an ideal substrate to maintain electrical properties of 2 dimensional materials such as graphene. To synthesize a single or a few layered h-BN, chemical vapor deposition method (CVD) has been widely used by using an ammonia borane as a precursor. Ammonia borane decomposes into hydrogen (gas), monomeric aminoborane (solid), and borazine (gas) that is used for growing h-BN layer. However, very active monomeric aminoborane forms polymeric aminoborane nanoparticles that are white non-crystalline BN nanoparticles of 50~100 nm in diameter. The presence of these BN nanoparticles following the synthesis has been hampering the implementation of h-BN to various applications. Therefore, it is quite important to grow a clean and high quality h-BN layer free of BN particles without having to introduce complicated process steps. We have demonstrated a synthesis of a high quality h-BN monolayer free of BN nanoparticles in wafer-scale size of $7{\times}7cm^2$ by using CVD method incorporating a simple filter system. The measured results have shown that the filter can effectively remove BN nanoparticles by restricting them from reaching to Cu substrate. Layer thickness of about 0.48 nm measured by AFM, a Raman shift of $1,371{\sim}1,372cm^{-1}$ measured by micro Raman spectroscopy along with optical band gap of 6.06 eV estimated from UV-Vis Spectrophotometer confirm the formation of monolayer h-BN. Quantitative XPS analysis for the ratio of boron and nitrogen and CS-corrected HRTEM image of atomic resolution hexagonal lattices indicate a high quality stoichiometric h-BN. The method presented here provides a promising technique for the synthesis of high quality monolayer h-BN free of BN nanoparticles.

• Journal of Wetlands Research
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• v.22 no.4
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• pp.312-320
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• 2020

Various LIDs with natural water circulation function are applied to reduce urban environmental problems and environmental impact of development projects. However, excessive Infiltration and evaporation of LID facilities dry the LID internal soil, thus reducing plant and microbial activity and reducing environmental re duction ability. The purpose of this study was to develop a real-time measurement system with complex sensors to derive the management plan of LID facilities. The test of measurable sensors and Internet of Things (IoT) application was conducted in artificial wetlands shaped in acrylic boxes. The applied sensors were intended to be built at a low cost considering the distributed LID and were based on Arduino and Raspberry Pi, which are relatively inexpensive and commercialized. In addition, the goal was to develop complex sensor measurements to analyze the current state o f LID facilities and the effects of maintenance and abnormal weather conditions. Sensors are required to measure wind direction, wind speed, rainfall, carbon dioxide, Micro-dust, temperature and humidity, acidity, and location information in real time. Data collection devices, storage server programs, and operation programs for PC and mobile devices were developed to collect, transmit and check the results of measured data from applied sensors. The measurements obtained through each sensor are passed through the Wifi module to the management server and stored on the database server in real time. Analysis of the four-month measurement result values conducted in this study confirmed the stability and applicability of ICT technology application to LID facilities. Real-time measured values are found to be able to utilize big data to evaluate the functions of LID facilities and derive maintenance measures.

• Korean Chemical Engineering Research
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• v.45 no.4
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• pp.328-334
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• 2007

Chemical heat pump system of 2-propanol/acetone/hydrogen is most suitable to the recovery of waste heat of power plant. various types of 5 wt% Pt-alumina catalysts were prepared for 2-propanol dehydrogenation using sol-gel method. The characteristics and the dehydrogenation reaction rate of each catalyst were investigated. Pt-alumina xerogel catalyst has excellent reaction rate and good durability in comparison with the existing alumina supported Pt catalysts. Pt-alumina aerogel catalyst had the highest reaction rate in all prepared catalysts, but sufficient aging time was necessary to maintain its reaction rate. A potential advantage of the aerogel catalyst is the fact that the high temperature heat treatment is not required. Without heat treatment or with low temperature heat treatment, the Pt-alumina aerogel catalyst has excellent reaction rate as well as durability and this gives us the economic advantage. Alumina xerogel supported Pt catalyst prepared by incipient wetness method showed good reaction rate, and had good mechanical strength. Blank alumina xerogel prepared by sol-gel method can be used for the support of metal catalysts.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.30 no.3 s.47
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• pp.295-305
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• 2004

Colloid and surface chemistry have been focused on surface area and surface energy. Local surface properties such as surface density, interaction, molecular orientation and reactivity have been one of interesting subjects. Systems of such surface energy being important would be listed as association colloid, emulsion, particle dispersion, foam, and 2-D surface and film. Such nanoparticle systems would be applied to drug delivery systems and functional cosmetics with biocompatible and degradable materials, while nanoparticles having its size of several nm to micron, and wide surface area, have been accepted as a possible drug carrier because their preparation, characteristics and drug loading have been inves-tigated. The biocompatible carriers were also used for the solubilization of insoluble drugs, the enhancement of skin absorption, the block out of UV radiation, the chemical stabilization and controlled release. Nano/micro emulstion system is classified into nano/microsphere, nano/microcapsule, nano/microemulsion, polymeric micelle, liposome according to its prep-aration method and size. Specially, the preparation method and industrial applications have been introduced for polymeric micelles self-assembled in aqueous solution, nano/microapsules controlling the concentration and activity of high concen-tration and activity materials, and monolayer or multilayer liposomes carrying bioactive ingredients.

• Korean Journal of Materials Research
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• v.8 no.8
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• pp.744-750
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• 1998

Unlike common device, MEMS(micro-electro-mechanical system) device consists of very small mechanical structures which determine the performance of the device. Because of its small mechanical structure inside. MEMS device is very sensitive to thermal stress caused by CTE(coefficient of thermal expansion) mismatch between its components. Therefore, its characteristics are affected by material properties. process temperature. and dimensions of each layer such as chip, adhesive and substrate. In this study. we investigated the change of the thermal stress in the chip attached to a substrate. With computer-aided finite element method (FEM), the computer simulation of the thermal stress was conducted on variables such as bonding material, process temperature, bonding layer thickness and die size. The commercial simulation program, ABAQUS ver5.6, was used. Subsequently 3-layer test samples were fabricated, and their degree of bending were measured by 3-D coordinate measuring machine. The experimental results were in good agreement with the simulation results. This study shows that the bonding layer could be the source of stress or act as the buffer layer for stress according to its elastic modulus and CTE. Solder adhesive layer was the source of stress due to its high elastic modulus, therefore high compressive stress was developed in the chip. And the maximum tensile stress was developed in the adhesive layer. On the other hand, polymer adhesive layer with low elastic modulus acted as buffer layer, and resulted in lower compressive stress. The maximum tensile stress was developed in the substrate.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.1
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• pp.159-167
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• 2000

In recent years, combined and separated sewer overflows (CSOs, SSOs) have been recognized as a significant pollution problem. To solve this problem a series of experiments were performed in a small scale Rapid Floc Settler (RFS) device to determine its ability in removing micro particles and dissolved materials from polluted waters. The RFS device is a compact physico-chemical wasterwater treatment system. Polyacrylamide (PAM) is used as a coagulant for treating stormwater in the RFS. The results of Jar test showed that PAM could be an excellent coagulant as compared with aluminum sulfate. and ferric chloride. In several experimental conditions, the influence of different variation parameters was tested to measure the efficiency of the RFS. Tests have been carried out with typical CSOs concentrations (50~1.000mg SS/L). The treatment efficiency with regard to SS and COD, which can be obtained at an overflow rate of $130m^3/m^2/day$, are 90% and 80%, respectively. Comparing other sedimentation technologies with RFS, the overflows rate of RFS is ten times faster. The distribution of particle size and number were analyzed. The RFS is suitable for the treatment of CSOs and also the removal of settleable and dissolved materials in urban stormwater runoff.

• Journal of The Korean Astronomical Society
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• v.52 no.1
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• pp.23-30
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• 2019

The KVN(Korean VLBI Network)-style simultaneous multi-frequency receiving mode is demonstrated to be promising for mm-VLBI observations. Recently, other Very long baseline interferometry (VLBI) facilities all over the globe start to implement compatible optics systems. Simultaneous dual/multi-frequency VLBI observations at mm wavelengths with international baselines are thus possible. In this paper, we present the results from the first successful simultaneous 22/43 GHz dual-frequency observation with KaVA(KVN and VERA array), including images and astrometric results. Our analysis shows that the newly implemented simultaneous receiving system has brought a significant extension of the coherence time of the 43 GHz visibility phases along the international baselines. The astrometric results obtained with KaVA are consistent with those obtained with the independent analysis of the KVN data. Our results thus confirm the good performance of the simultaneous receiving systems for the nonKVN stations. Future simultaneous observations with more global stations bring even higher sensitivity and micro-arcsecond level astrometric measurements of the targets.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.55 no.1
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• pp.29-38
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• 2019

In order to investigate the behavioral characteristics of Pacific cod (Gadus macrocephalus) released at the entrance of Jinhae Bay, Korea, the direction and range of movement, swimming speed of the fish were measured with an acoustic telemetry techniques in winter, 2015. Three wild Pacific codes WC1 to WC3 (total length 66.0, 75.0, 76.0 cm; body weight 2.84, 2.79, 3.47 kg, respectively) were tagged with the acoustic transmitter. WC1 tagged with an acoustic transmitter internally by surgical method, WC2 and WC3, externally with the acoustic data logger and a micro data logger for recording audible sound waves including timer release unit. The movement routes of the tagged fish were measured more than five hours using VR100 receiver and a directional hydrophone. The directionality of the fish movement was tested by Rayleigh's z-Test, the statistical analysis, and a statistical program SPSS. Three tagged fishes were individually released on the sea surface around the entrance to the Jinhae Bay on 10 to 24 January 2015. WC1 moved about 13.32 km with average swimming speed of 0.63 m/s for six hours. The average swimming depth and water depth of the seabed on the route of WC1 were 7.2 and 32.9 m, respectively. The movement range of WC2 and WC3 were 7.95 and 11.06 km, approximately, with average swimming speed of 0.44 and 0.58 m/s for 5.1 and 5.3 hours, respectively. The average swimming depth of WC2 and WC3 were 18.7 and 5.0 m, and the water depth on the route, 34.4 and 29.8 m, respectively. Three fishes WC1 to WC3 were shown significant directionality in the movement (p < 0.05). Movement mean angles of WC1 to WC3 were 77.7, 76.3 and $88.1^{\circ}$, respectively. There was no significant correlation between the movement direction of fish (WC1 and WC2) and the tidal currents during the experimental period (p >= 0.05). Consequently, three tagged fishes were commonly moved toward outside of the entrance and headed for eastward of the Korean Peninsula, approximately, after release. It may estimate positively that the tidal current speed may affect to the swimming speed of the Pacific cod during the spring tide than the neap tide.