• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.10a
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• pp.763-764
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• 2013

A three-dimensional image capturing device and its signal processing algorithm and apparatus are presented. Three dimensional information is one of emerging differentiators that provides consumers with more realistic and immersive experiences in user interface, game, 3D-virtual reality, and 3D display. It has the depth information of a scene together with conventional color image so that full-information of real life that human eyes experience can be captured, recorded and reproduced. 20 Mega-Hertz-switching high speed image shutter device for 3D image capturing and its application to system prototype are presented[1,2]. For 3D image capturing, the system utilizes Time-of-Flight (TOF) principle by means of 20MHz high-speed micro-optical image modulator, so called 'optical resonator'. The high speed image modulation is obtained using the electro-optic operation of the multi-layer stacked structure having diffractive mirrors and optical resonance cavity which maximizes the magnitude of optical modulation[3,4]. The optical resonator is specially designed and fabricated realizing low resistance-capacitance cell structures having small RC-time constant. The optical shutter is positioned in front of a standard high resolution CMOS image sensor and modulates the IR image reflected from the object to capture a depth image (Figure 1). Suggested novel optical resonator enables capturing of a full HD depth image with depth accuracy of mm-scale, which is the largest depth image resolution among the-state-of-the-arts, which have been limited up to VGA. The 3D camera prototype realizes color/depth concurrent sensing optical architecture to capture 14Mp color and full HD depth images, simultaneously (Figure 2,3). The resulting high definition color/depth image and its capturing device have crucial impact on 3D business eco-system in IT industry especially as 3D image sensing means in the fields of 3D camera, gesture recognition, user interface, and 3D display. This paper presents MEMS-based optical resonator design, fabrication, 3D camera system prototype and signal processing algorithms.

• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.38-44
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• 2005

Pyrolyzed polyimide is explored in terms of MEMS material. This paper describes chemical, electrical, mechanical properties of pyrolyzed polyimide (PIX-1400) thin film as MEMS material. When polyimide thin film was pyrolyzed at $800^{\circ}C$ for 60 minutes in $N_{2}$ ambient, the residual ratio of pyrolyzed film thickness measured with a surface profiler is about 49 %, and the resistivity is about $2.17{\times}10^{-2}\;{Omega}cm$. From the result of the load-deflection test, the estimated Young's modulus and initial average stress of pyrolyzed polyimide are 67 GPa and 30 MPa, respectively. As one demonstration of MEMS structures of pyrolyzed polyimide, the fabrication method of the microbridge structure is proposed for a micro heater and a resonator.

• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.1097-1100
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• 2003

Tunable thermo-optic filter for WDM system was designed and fabricated. The basic structure of the filter was a Fabry-Perot resonator and the center cavity layer was poly-Si. Quardraple layers of low and high refractive index materials were used as DBR mirrors. Tuning and transmission efficiencies was measured and compared with the simulation results. Tuning range of 9.4 nm can be obtained by 64.7$^{\circ}C$ temperature changes and tuning efficiency was 0.144nm/K. The filter is to be assembled onto the micro optical bench with fiber optical path.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.74-75
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• 2008

This work has suggested corrugation beam as a new structure for mechanical resonators. Micro beam resonators based on 3C-SiC films which have two side corrugations along the length of beams were simulated by finite-element modeling and compared to a flat rectangular beam with the same dimension. With the dimension of $36\times12\times0.5{\mu}m^3$, the flat cantilever has resonant frequency of 746 kHz. Meanwhile, this frequency reaches 1.252 MHz with the corrugated cantilever which has the same dimension with flat type but corrugation width of $6{\mu}m$ and depth of $0.4{\mu}m$. It is expected that mechanical resonators with corrugations will be very helpful for the research of sensing devices with high-resolution, high-performance oscillators and filters in wireless communications as well as measurement in basic physics.

• Korean Chemical Engineering Research
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• v.47 no.3
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• pp.321-326
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• 2009

A simple measuring device is proposed, and its performance is examined in an adsorption process separating a gas mixture. The sensor is made of a quartz crystal resonator and solid adsorbent to detect the target component. Micro-particle carbon cryogel(MCC) is utilized as the adsorbent, and the gas mixture of air and i-butane are separated in a column containing bamboo activated carbon. Two devices are placed at the inlet and outlet of the column. The measurements are compared with those of GC outcome to prove the measurements are effective. The experimentally proved system is simple and capable to be implemented in an in-line system with on-line measurement.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.4
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• pp.314-317
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• 2009

This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The $1.2{\mu}m$ and $0.4{\mu}m$ thick polycrystalline 3C-SiC cantilever and doubly clamped beam resonators with $60{\sim}100{\mu}m$ lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at temperature range of $25{\sim}200^{\circ}C$. The TCF(Temperature Coefficient of Frequency) of 60, 80 and 100 On long cantilever resonators were -9.79, -7.72 and -8.0 ppm/$^{\circ}C$. On the other hand, TCF of 60, 80 and $100{\mu}m$ long doubly clamped beam resonators were -15.74, -12.55 and -8.35 ppm/$^{\circ}C$. Therefore, polycrystalline 3C-SiC resonators are suitable with RF MEMS devices and bio/chemical sensor applications in harsh environments.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.04a
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• pp.528-532
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• 2013

In this study, an analytical model of micro-beam structure including thermoelastic damping with irregularly distributed masses is investigated. The significance of thermoelastic damping for micro-scale mechanical resonators is evaluated to design -with high quality factor(Q-factor). The beam model of this work is based on Euler-Bernoulli beam theory. In order to determine the natural frequency of the model, energy method is applied. Also, the thermoelatic damping effects are considered by using heat conduction equations, and the Q-factor can be determined. To derive the equation of motion, non-dimensionalization is employed for systematic analysis. Results of the model are verified, and present mode shapes and Q-factors for the micro-beam with thermoelastic damping including random point masses.

• Current Optics and Photonics
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• v.2 no.6
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• pp.576-581
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• 2018

A new approach for identification of a microwave frequency using an integrated optical waveguide chip, combined with a phase modulator (PM) and two microring resonators (MRRs), is proposed, theoretically deduced, and verified. By wavelength tuning to set the PM under the condition of a double side band (DSB), the measurement range can be started from the dc component, and the measurement range and response slope can be adjusted by designing the radius and transmission coefficient of the MRR. Simulations reveal that the amplitude comparison function (ACF) has a monotonic relationship from dc to 32.5 GHz, with a response slope of 5.15 dB under conditions of DSB modulation, when the radius values, transmission coefficients, and the loss factors are designed respectively as $R_1=400{\mu}m$, $R_2=600{\mu}m$, $t_1=t_2=0.63$, and ${\gamma}_1={\gamma}_2=0.66$. Theoretical calculations and simulation results both indicate that this new approach has the potential to be used for measuring microwave frequencies, with the advantages of compact structure and superior reconfigurability.

• Korean Journal of Optics and Photonics
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• v.18 no.3
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• pp.216-220
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• 2007

A widely tunable add/drop filter composed of double ring resonators is implemented with high-index-contrast polymer waveguide. To enhance the productivity, directional couplers are designed to have good fabrication tolerance. The refractive indices of the core and cladding in the 1550 nm wavelength are 1.51 and 1.378, respectively. Drop response in comparison with neighborhood peak gets enhanced by more than 2.9 dB at the wavelength where both rings resonate. This filter can be used to build widely tunable laser diode through hybrid-integration with reflective SOA.

• Korean Journal of Optics and Photonics
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• v.28 no.2
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• pp.59-67
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• 2017

This paper proposes an asymmetric split-loop resonator with an outer square loop (ASLR-OSL), which can actively control terahertz wave transmission properties while maintaining a high-Q-factor of the asymmetric split-loop resonator (ASLR). An added outer square loop is designed to play the roles of both a metamaterial and a micro-heater, which can control the temperature through a directly applied bias voltage. A vanadium dioxide ($VO_2$) thin film, which exhibits an insulator-metal phase transition with temperature change, is used to control the transmission properties. The proposed ASLR-OSL shows transmission properties similar to those of the ASLR, and they can be successfully controlled by directly applying bias voltage to the outer square loop. Based on these results, an electrically controllable terahertz high-Q metamaterial could be achieved simply by adding a square loop to the outside of a well-known high-Q metamaterial.