• Title/Summary/Keyword: micro resonator

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The Design and Implementation of PLDRO(Phase Locked Dielectric Resonator Oscillator) Using Dual Phase Lock Loop Structure (이중 위상고정루프 구조를 갖는 PLDRO 설계 및 제작)

  • Kim Hyun-jin;Kim Yong-Hwan;Min Jun-ki;Yoo Hyeong-soo;Lee Hyeong-kyu;Hong Ui-seok
    • The Journal of The Korea Institute of Intelligent Transport Systems
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    • v.3 no.2 s.5
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    • pp.69-74
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    • 2004
  • In this work, A PLDRO (Phase Locked Dielectric Resonator Oscillator) which can be used for the wireless communication systems fur MMC(Microwave Micro Cell) and ITS wireless communication system is designed. A different approach to the PLDRO structure is applied for phase locking by dual phase lock loop structure. The proposed dual loop PLDRO generates the output power of 0 dBm at 18.7 GHz and has the characteristics of a phase noise of -80 dBc/Hz at 1kHz, -83 dBc/Hz at 10 kHz offset frequency from carrier frequency

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Measurement of Adsorption Characteristic Using a Quartz Crystal Resonator (수정진동자를 이용한 흡착특성의 측정)

  • Kim, Byoung Chul;Sung, Ick Gi;Yamamoto, Takuji;Kim, Young Han
    • Korean Chemical Engineering Research
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    • v.47 no.3
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    • pp.368-372
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    • 2009
  • A technique to measure the adsorption characteristic of surface area and pore size distribution is proposed and its performance is examined. While the existing equipment utilizes liquid nitrogen, the proposed uses carbon dioxide at the room temperature leading to the small measuring device with easy operation and short measurement time. The performance of the device has been examined with micro-particle carbon cryogel and bamboo activated carbon. The results from the proposed device compared with those of the adsorption apparatus indicate that the measurement of meso-porous material is comparable but micro-porous material gives some error.

Design and Fabrication of UWB Antenna Using the SRR for WLAN Band Rejection (SRR을 이용한 WLAN 대역 저지용 UWB 안테나의 설계 및 제작)

  • Jo, Nam-I;Kim, Dang-Oh;Kim, Che-Young;Choi, Dong-Muk
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.20 no.9
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    • pp.1014-1020
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    • 2009
  • In this paper, a novel UWB(Ultra Wide-band) antenna with suppressed band of IEEE 802.11a($5.15{\sim}5.825\;GHz$) WLAN was designed and fabricated by using SRR(Split Ring Resonator) with band rejection property. MWS(Micro-wave Studio) of CST company was utilized in the design stage. The antenna was fabricated on a substrate, Rogers 4003, with the thickness of 0.8 mm and relative permittivity of 3.38. The measured result shows that the proposed antenna has a good return loss below -10 dB and group delay below 1nsec over UWB communication band($3.1{\sim}10.6\;GHz$) except WLAN band. It also shows the omni-directional radiation pattern.

Development of a SAW based Gyroscope (표면탄성파를 이용한 자이로스코프 개발)

  • Oh, Hae-Kwan;Yun, Sung-Jin;Lee, Kee-Keun;Wang, Wen;Yang, Sang-Sik
    • Journal of the Korea Institute of Military Science and Technology
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    • v.12 no.1
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    • pp.106-113
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    • 2009
  • This paper presents a surface acoustic wave(SAW) micro-electro-mechanical-systems(MEMS) interdigital transducer (IDT) gyroscope with 80MHz central frequency on a $128^{\circ}\;YX\;LiNbO_3$, which is consisted of a two-port SAW resonator, metallic dots and dual delay lines for the sensor and reference oscillators. Reason for using two delay line oscillators is to extract the gyroscope effect by comparing the resonant frequencies between two oscillators and to compensate the temperature effect. Based on the coupling of modes(COM) simulation, an 80MHz two ports SAW resonator and dual delay line were fabricated and characterized by the network analyzer. Obtained sensitivity was $109Hz/deg{\cdot}s^{-1}$ in the angular rate range of $0{\sim}1000deg/s$. Good Linearity and superior directivity were observed.

Nano and micro structures for label-free detection of biomolecules

  • Eom, Kil-Ho;Kwon, Tae-Yun;Sohn, Young-Soo
    • Journal of Sensor Science and Technology
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    • v.19 no.6
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    • pp.403-420
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    • 2010
  • Nano and micro structure-based biosensors are promising tool for label-free detection of biomolecular interactions with great accuracy. This review gives a brief survey on nano and micro platforms to sense a variety of analytes such as DNA, proteins and viruses. Among incredible nano and micro structure for bio-analytical applications, the scope of this paper will be limited to micro and nano resonators and nanowire field-effect transistors. Nanomechanical motion of the resonators transducers biological information to readable signals. They are commonly combined with an optical, capacitive or piezo-resistive detection systems. Binding of target molecule to the modified surface of nanowire modulates the current of the nanowire through electrical field-effect. Both detection methods have advantages of label-free, real-time and high sensitive detection. These structures can be extended to fabricate array-type sensors for multiplexed detection and high-throughput analysis. The biosensors based on these structures will be applied to lab-on-a-chip platforms and point-of-care diagnostics. Basic concepts including detection mechanisms and trends in their fields will be covered in this review.

Fabrication and characteristics of polycrystalline SiC micro resonators (다결정 SiC 마이크로 공진기의 제작과 그 특성)

  • Chung, Gwiy-Sang;Lee, Tae-Won
    • Journal of Sensor Science and Technology
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    • v.17 no.6
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    • pp.425-428
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    • 2008
  • This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{\sim}40{\mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{\sim}856.3kHz$. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

Fabrication of MEMS Devices Using SOI(Silicon-On-Insulator)-Micromachining Technology (SOI(Silicon-On-Insulator)- Micromachining 기술을 이용한 MEMS 소자의 제작)

  • 주병권;하주환;서상원;최승우;최우범
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.874-877
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    • 2001
  • SOI(Silicon-On-Insulator) technology is proposed as an alternative to bulk silicon for MEMS(Micro Electro Mechanical System) manufacturing. In this paper, we fabricated the SOI wafer with uniform active layer thickness by silicon direct bonding and mechanical polishing processes. Specially-designed electrostatic bonding system is introduced which is available for vacuum packaging and silicon-glass wafer bonding for SOG(Silicon On Glass) wafer. We demonstrated thermopile sensor and RF resonator using the SOI wafer, which has the merits of simple process and uniform membrane fabrication.

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Characterization of the mechanical and micro-fracture properties of material for ME the resonance frequency (공진주파수 분석을 통한 MEMS용 Si 소재의 기계적 물성 및 미세파손 분석 기법)

  • Kim, Jae-Sug;Lee, Se-Ho;Kwon, Dong-Il
    • Proceedings of the KIEE Conference
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    • 2000.11c
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    • pp.575-577
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    • 2000
  • (100) single crystal Si은 좋은 anisotropy etching 성질과 기계적 강도를 가지고 있어 MEMS 구조용 소재로 사용되고 있다. (100) Si의 신뢰성 평가를 위하여 필요한 탄성계수를 측정하고 반복동작에 의한 응력에 의한 파손특성을 평가하기 위하여 micromachining을 통해 resonator를 제작하였다. Resonator의 공진주파수를 분석함으로써 탄성계수를 추하고자 하였으며 반복응력에 대한 파괴특성을 평가하기 위하여 공진 상태에서 파괴가 일어날 때까지의 사이를 수를 측정함으로써 반복음력에 대한 Si의 피로특성을 평가하고자 하였다. 실험 결과 (100) Si의 <110> 방향으로의 탄성 개수를 측정할 수 있었으며 Si의 미세파손의 응력에 대한 의존성을 평가할 수 있었다. 평가결과 Si의 미세파손 메커니즘은 억제된 균열의 진전에 의한 subcritical crack에 의한 피로파괴 현상보다는 과도한 스트레스에 의한 순간적인 균열전파에 의해 지배됨을 관찰할 수 있었다.

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Design of PCB Embedded Balanced-to-unbalanced WiMax Duplexer Using Coupled LC Resonators (WiMAX 응용을 위한 결합 공진기 기반의 PCB 내장형 평형신호 듀플렉서의 설계)

  • Park, Ju-Y.;Park, Jong-C.;Park, Jae-Y.
    • Proceedings of the KIEE Conference
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    • 2009.07a
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    • pp.1587_1588
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    • 2009
  • In this paper, PCB embedded balanced-to-unbalamced duplexer using coupled LC resonator was introduced for low cost dualband WiMax front-end-module application. In order to obtain the function of bandpass filter and balun transformer, proposed duplexer was configured by using magnetically coupled LC resonator. Out-of-band suppression was enhanced by applying two m-Derived transform circuits to obtain transmission zeros at 2GHz and 4.8GHz. In order to reduce the size of embedded duplexer, BaSrTiO3 (BST) composite high Dk RCC film was applied to improve the capacitance density. This high Dk film provided the capacitance density of 12.2 pF/mm2. The simulation results shows that fabricated duplexer had an insertion loss of 2.9dB and 5.5dB and return loss of 15dB and 16dB for 2.5GHz~2.6GHz and 3.5GHz~3.6GHz, respectively. The maximum magnitude and phase imbalance were 0.01dB and 0.17dB, and 1degree and 2degree in its passband, respectively. The out-of-band suppression was observed approximately 29dB and 40dB below 1.9GHz and over 4.5GHz, respectively. It has a volume of 6 mm $\times$ 7 mm $\times$ 0.7 mm (height).

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Multimode interference coupled ring resonator using half ring and total internal reflection mirrors (반 링과 전반사 미러를 이용한 다중모드 간섭기로 결합된 링 공진기)

  • Kim, Doo-Gun;Choi, Young-Wan
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.44 no.2
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    • pp.46-54
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    • 2007
  • We have fabricated and characterized MMI (Multimode Interference) coupled ring resonator with the total internal reflection mirrors and the semiconductor optical amplifier for the integration of the WDM (Wavelength Division Multiplexing) system. The TIR (Total Internal Reflection) mirrors were fabricated by self-aligned process and had losses of about 0.71 dB per mirror. Coupling in and out of a resonator was achieved using the extremely small MMI couplers. The MMI length and width used in the experiment were $119{\mu}m$ and $9{\mu}m$, respectively. The resulting FSR (Free Spectral Range) and on-off ratio were approximately 1.333 nm (162 GHz) and 13 dB, respectively.