• 제목/요약/키워드: metallurgical technology

검색결과 691건 처리시간 0.03초

Diffusion barrier characteristics of molybdenum nitride films for ultra-large-scale-integrated Cu metallization (I); Surface morphologies and characteristics of sputtered molybdenum nitride films

  • Jeon, Seok-Ryong;Lee, You-Kee;Park, Jong-Wan
    • Journal of Korean Vacuum Science & Technology
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    • 제1권1호
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    • pp.24-29
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    • 1997
  • Surface morphologies and fundamental characteristics of molybdenum nitride films deposited by reactive dc magnetron sputtering were studied for application to Cu diffusion barrier. A phase transformation from Mo to $\gamma$-Mo$_2$N phase at 0.5$N_2$ flow ratio.($N_2$/(Ar+$N_2$)) equal to and larger than 0.2, whereas a second phase transformation to $\gamma$-MoN phase at 0.5 N2 flow ratio, With the variation of the N2 ratio the surface morphologies of the films were generally smooth except the cases of 0.2 and 0.3$N_2$ gas rations, where build-up of film stresses occurred. $\gamma$-Mo$_2$N film was found to crystallize at the deposition temperature of 40$0^{\circ}C$. The surfaces of $\gamma$-Mo$_2$N films deposited up to 40$0^{\circ}C$ were smooth, but the film deposited at 50$0^{\circ}C$ had very rough surface morphology. It seems that this was due to the building-up of thermal stresses at the high deposition temperature, which might lead to hillock formation.

복합열처리된 열간 가공용 금형공구강의 기계적 성질 및 열처리특성에 관한 연구 (Study on the Heat Treatment Characteristics and Mechanical Properties of Hot Work Tool Steel by Using Combined Heat Treating)

  • 백성돈;노용식;최문성;최진원;이상윤
    • 열처리공학회지
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    • 제2권4호
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    • pp.27-39
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    • 1989
  • The effect of gas mixing ratios during gas nitrocarburizing treatment on the formation of compound layer and the mechanical properties has been studied for hot work tool steel by using a combined heat treating technique. The thickness of compound and diffusion layers has been shown to grow as a parabolic relation with increasing the amount of ammonia at a given flow quantity of $CO_2$ gas. The compound layer consists mainly of ${\varepsilon}-Fe_3$(C, N) with small amounts of ${\gamma}^{\prime}-Fe_4N$ and ${\alpha}$-Fe. The combined heat treated hot work tool steel has shown that the thickness of compound layer increases with increasing nitrocarburizing time, but the rate of growth slows down as gas nitrocarburizing time goes more than two hours. Tensile properties have given a remarkable improvement. In particular, the wear resistance of combined heat treated hot work tool steel has exhibited an improvement of about 165% greater than that obtained from conventional quenching and multi-tempering treatments.

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Al-Mg합금의 압연변수에 다른 미세구조의 변화와 고온인장특성 (The effects of rolling process on microstructures and high temperature tensile properties of Al-Mg alloy)

  • 김태규;전채홍;권숙인;박종우
    • 열처리공학회지
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    • 제10권2호
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    • pp.81-92
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    • 1997
  • The effect of alloying elements, precipitate size, its distribution, and dislocation substructure resulted from warm rolling or cold rolling in the superplastic Al-Mg alloy system was investigated. One of the major requirements for fine structure superplasticity is that the grain size should be very small. Fine grain structure is controlled by the dislocation substructure and the dynamic recrystallization during hot or warm working. The recovery of Al-Mg base alloys was constrained resulting in relatively high dislocation density when the alloys were warm rolled. In particular, Al-Mg-Zr alloy exhibited the smallest sub-grain size among Al-Mg alloys containing Mn, Cu, Zr as a third element. The Al-Mg-Mn alloy cold rolled 80% after hot rolling showed the maximun strain rate sensitivity exponent, m, of 0.75 under strain rate of $7.1{\times}10^{-4}/s$ at $500^{\circ}C$. The elongation of the alloys was limited in spite of high m values due to large dispersoids containing appreciable amount of Fe impurities.

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Production of Lipase-catalyzed Structured Lipid from Olive Oil with Omega-3 Polyunsaturated Fatty Acids

  • Kahveci, Derya;Can, Ash;Ozcelik, Beraat
    • Food Science and Biotechnology
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    • 제18권1호
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    • pp.79-83
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    • 2009
  • Acidolysis of olive oil with omega-3 (n-3) polyunsaturated fatty acids (PUFAs) was carried out to produce a structured lipid. Novozym $435^{(R)}$ from Candida antarctica was used as the biocatalyst. Response surface methodology (RSM) was used to determine optimum conditions for lipase-catalyzed enrichment of olive oil. Three factors, 5 levels, central composite design was used. The effects of incubation time, temperature, and substrate mole ratio on incorporation ratio (n-3 fatty acids/total fatty acids, %) were investigated. From the evaluation of response surface graphs, the optimal conditions for incorporation of long chain n-3 PUFAs into olive oil were $40-60^{\circ}C$ for temperature, 30-45 hr for reaction time, and 3:1-5:1 (n-3 fatty acids/olive oil) for substrate mole ratio. Experiments conducted under optimized conditions predicted by the model equation obtained from RSM yielded structured lipids with 50.8% n-3 PUFAs. This value agreed well with that predicted by the model. Oxidative stability tests showed that the product was more susceptible to oxidation than unmodified olive oil. Antioxidant addition improved the oxidative stability of the product.

7N01 Al 합금의 미세조직 및 기계적 성질에 미치는 시효처리의 영향 (Effect of Aging Treatment on the Microstructures and Mechanical Properties of 7N01 Aluminium Alloy)

  • 황윤구;강민철;강정윤;김인배
    • 열처리공학회지
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    • 제13권2호
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    • pp.103-107
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    • 2000
  • Effect of aging treatment on the microstructures and mechanical properties of 7N01 Al alloy was investigated by differential scanning calorimetry, transmission electron microscopy, microhardness measurement and tensile test. Maximum hardness(125.7Hv) and tensile strength(447.3MPa) were obtained from the specimen aged at $120^{\circ}C$ for 32hrs. The major precipitation hardening phase was confirmed as coherent $MgZn_2({\eta}^{\prime})$ phase. Microhardness changes after peakaged condition showed very large decrease upon increased aging time. This result was attributed to the high transformation rate from coherent ${\eta}^{\prime}$ to incoherent ${\eta}$. It was found that the precipitation sequence of 7N01 Al alloy was GP zone${\rightarrow}$metastable spherical hcp $MgZn_2({\eta}^{\prime}){\rightarrow}$ equilibrium rodlike hcp $MgZn_2({\eta})$.

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High Temperature Oxidation Behavior of Plasma Sprayed $ZrO_2$ Having Functionally Gradient Thermal Barrier Coating

  • Park, Cha-Hwan;Lee, Won-Jae;Cho, Kyung-Mox;Park, Ik-Min
    • Corrosion Science and Technology
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    • 제2권3호
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    • pp.155-160
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    • 2003
  • Plasma spraying technique was used to fabricate functionally graded coating (FGC) of NiCrAIY/YSZ 8wt%$Y_2O_3-ZrO_2$ on a Co-base superalloy (HAYNES 188) substrate. Six layers were coated on the substrate for building up compositionally graded architecture. Conventional thermal barrier coating (TBC) of NiCrAIY/SZ with sharp interface was also fabricated. As-coated FGC and TBC samples were exposed at the temperature of $1100^{\circ}C$ for 10, 50, 100 hours in air. Microstructural change of thermally exposed samples was examined. Pores and microcracks were formed in YSZ layer due to evolution of thermal internal stress at high temperature. The amount of pores and microcracks in YSZ layer were increased with increasing exposure time at high temperature. High temperature oxidation of coatings occurred mainly at the NiCrAIY/YSZ interface. In comparison with the case of TBC. the increased area of the NiCrAIY/YSZ interface in FGC is likely to attribute to forming the higher amount of oxides.

액상-고체입자 혼합물의 응고 시 응고계면에서의 입자의 거동 (Interaction of Solid Particles with the Solidifying Front in the Liquid-Particle Mixture)

  • 이호석;이규희;오승탁;김영도;석명진
    • 한국분말재료학회지
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    • 제25권4호
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    • pp.336-339
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    • 2018
  • A unique porous material with controlled pore characteristics can be fabricated by the freeze-drying process, which uses the slurry of organic material as the sublimable vehicle mixed with powders. The essential feature in this process is that during the solidification of the slurry, the dendrites of the organic material should repel the dispersed particles into the interdendritic region. In the present work, a model experiment is attempted using some transparent organic materials mixed with glass powders, which enable in-situ observation. The organic materials used are camphor-naphthalene mixture (hypo- and hypereutectic composition), salol, camphene, and pivalic acid. Among these materials, the constituent phases in camphor-naphthalene system, i.e. naphthalene plate, camphor dendrite, and camphor-naphthalene eutectic exclusively repel the glass powders. This result suggests that the control of organic material composition in the binary system is useful for producing a porous body with the required pore structure.

기계적합금화법(機械的合金化法)에 의(依)한 V-Al합금(合金)의 미세조직(微細組織) 변화(變化)에 관(關)한 연구(硏究) (A Study on Microstructure of Vanadium-Aluminum Alloy by Mechanical Alloying)

  • 최운;김하영;남승의
    • 한국주조공학회지
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    • 제11권6호
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    • pp.455-462
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    • 1991
  • The formation of brittle intermetallic compound such as $VAl_3$ tends tp lower the toughness of V-Al alloys. Also, due to the high melting point of vanadium, it is difficult to make that alloy by previous ingot metallurgy method. To depress the technique has been adopted. The effect of particle size and milling time on the phase has been thoroughly studied. For mechanical alloying, SPEX mixed/mill has been used. The milling time and the composition of V and Al are varied to find the optimum condition of forming amorphous phase. The X-Ray Diffrection pattern, microstructure detection, microhandess test, experiments are carried out to analyze MA product. When the final step is reached, no lamellar-structure is detected. The steady state condition is observed after 8 hours and 10 hours milling for 15wt.%Al and 30wt.%Al alloy, respectively. The microhardness continuously increases up to 10 hours after then it remains constant.

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Effect of $Al_2O_3/Fe$ Ratio on Characteristics of Carbon Nanotubes Prepared by Catalytic Chemical Vapor Deposition

  • Jung, Sung-Sil;Lee, Dae-Yeol;Chung, Won-Sub;Park, Ik-Min
    • Carbon letters
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    • 제5권2호
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    • pp.81-87
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    • 2004
  • The effect of compositions of $Al_2O_3$ in the mixed $Fe/Al_2O_3$ catalysts on the synthetic behaviors of carbon nanotubes (CNTs) by catalytic chemical vapor deposition (CCVD) process was investigated in wide range of the mixture ratios of support materials. CNTs were synthesized with $Fe/Al_2O_3$ catalysis under the condition of 40 min in synthetic time, and 923 K of synthetic temperature using $C_2H_4$ and $H_2$ as synthetic and carrier gas, respectively. The carbon yield with the content of $Al_2O_3$ showed in a parabolic curve and the maximum carbon yield was 40 wt.% of $Al_2O_3$. As the mixture ratio of $Al_2O_3$ increased, decreasing tendency was observed in the diameter of CNTs. Specific surface areas of CNTs were increased with the increase of the mixture ratio of $Al_2O_3$.

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Synthetic Properties of Fe/MgO Catalyst on Characteristics of Carbon Nanotubes Prepared by Catalytic Chemical Vapor Deposition

  • Jung, Sung-Sil;Lee, Dae-Yeol;Chung, Won-Sub;Park, Ik-Min
    • Carbon letters
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    • 제5권3호
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    • pp.133-141
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    • 2004
  • The synthetic behaviors of carbon nanotubes (CNTs) by Fe/MgO catalysts were investigated in 0~90 wt.% range of MgO mixture ratios by catalytic chemical vapor deposition (CCVD) process. The CNTs were synthesized with 40 minutes of synthetic time, and 923 K of synthetic temperature using 0.1 L/min of ethylene gas and 1.0 L/min of hydrogen gas as synthetic and carrier gas, respectively. As the increase of synthetic temperatures and times, the diameters of CNTs become thicker. The carbon yield showed in a parabolic curve as MgO content increased and the maximum carbon yield was obtained at 30 wt.% of MgO. There were no obvious changes in the diameters of CNTs respect to the change of MgO content. Fe/MgO CNTs showed good crystalinity by High Resolution Transmission Electron microscope (HR-TEM) analysis. The behaviors of Fe/MgO CNTs have a tendency of depending on synthetic time and temperature rather than MgO content.

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