• Title/Summary/Keyword: mechanical and thermal behavior

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Experimental and Numerical Analysis of A Novel Ceria Based Abrasive Slurry for Interlayer Dielectric Chemical Mechanical Planarization

  • Zhuanga, Yun;Borucki, Leonard;Philipossian, Ara;Dien, Eric;Ennahali, Mohamed;Michel, George;Laborie, Bernard;Zhuang, Yun;Keswani, Manish;Rosales-Yeomans, Daniel;Lee, Hyo-Sang;Philipossian, Ara
    • Transactions on Electrical and Electronic Materials
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    • v.8 no.2
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    • pp.53-57
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    • 2007
  • In this study, a novel slurry containing ceria as the abrasive particles was analyzed in terms of its frictional, thermal and kinetic attributes for interlayer dielectric (ILD) CMP application. The novel slurry was used to polish 200-mm blanket ILD wafers on an $IC1000_{TM}$ K-groove pad with in-situ conditioning. Polishing pressures ranged from 1 to 5 PSI and the sliding velocity ranged from 0.5 to 1.5 m/s. Shear force and pad temperature were measured in real time during the polishing process. The frictional analysis indicated that boundary lubrication was the dominant tribological mechanism. The measured average pad leading edge temperature increased from 26.4 to $38.4\;^{\circ}C$ with the increase in polishing power. The ILD removal rate also increased with the polishing power, ranging from 400 to 4000 A/min. The ILD removal rate deviated from Prestonian behavior at the highest $p{\times}V$ polishing condition and exhibited a strong correlation with the measured average pad leading edge temperature. A modified two-step Langmuir-Hinshelwood kinetic model was used to simulate the ILD removal rate. In this model, transient flash heating temperature is assumed to dominate the chemical reaction temperature. The model successfully captured the variable removal rate behavior at the highest $p{\times}V$ polishing condition and indicates that the polishing process was mechanical limited in the low $p{\times}V$ polishing region and became chemically and mechanically balanced with increasing polishing power.

The Research About Free Piston Linear Engine with Artificial Neural Network (인공 신경망을 이용한 프리피스톤 리니어 엔진의 연구)

  • AHMED, TUSHAR;HUNG, NGUYEN BA;LIM, OCKTAECK
    • Journal of Hydrogen and New Energy
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    • v.26 no.3
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    • pp.294-299
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    • 2015
  • Free piston linear engine (FPLE) is a promising concept being explored in the mid-20th century. On the other hand, Arficial neural networks (ANNs) are non-linear computer algorithms and can model the behavior of complicated non-linear processes. Some researchers already studied this method to predict internal combustion engine characteristics. However, no investigation to predict the performance of a FPLE using ANN approach appears to have been published in the literature to date. In this study, the ability of an artificial neural network model, using a back propagation learning algorithm has been used to predict the in-cylinder pressure, frequency, maximum stroke length of a free piston linear engine. It is advised that, well-trained neural network models can provide fast and consistent results, making it an easy-to-use tool in preliminary studies for such thermal engineering problems.

Numerical Investigation on Soot Primary Particle Size Using Time Resolved Laser Induced Incandescence (TIRE-LII) (시분해 레이저 유도 백열법을 이용한 매연 입자 크기에 관한 수치적 연구)

  • Lee, Jong-Ho;Kim, Jeong-Yong;Jeong, Dong-Soo;Chang, Young-June;Jeon, Chung-Hwan
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.29 no.9 s.240
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    • pp.1022-1031
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    • 2005
  • Temporal behavior of the laser induced incandescence (LII) signal is often used for soot particle sizing, which is possible because the cooling behavior of a laser heated particle is dependent on the particle size. In present study, LII signals of soot particles are modeled using two non-linear coupled differential equations deduced from the energy- and mass-balance of the process. The objective of this study is to obtain an appropriate calibration curve for determining primary particle size by comparing the gated signal ratio and double-exponential curve fitting methods. Not only the effects of laser fluence and gas temperature on the cooling behavior but also heat transfer mechanisms of heated soot particle have been investigated. The second-order exponential curve fitting showed better agreements with the LII signals than the gated signal ratio method which was based on the lust-order exponential curve fit. And the temporal decay rate of the LII signal and primary particle size showed nearly linear relationship, which was little dependent on the laser fluence. And it also could be reconfirmed that vaporization was dominant process of heat loss during first loons after laser pulse, then heat conduction played most important role while thermal radiation had little influence all the time.

A Numerical Analysis on the Freeze Coating of a Non-Isothermal Flat Plate with a Binary Alloy (비등온 평판의 이성분 합금 냉각코팅에 관한 수치해석)

  • Nam, Jin-Hyeon;Kim, Chan-Jung
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.24 no.11
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    • pp.1437-1446
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    • 2000
  • A numerical analysis on the freeze coating process of a non-isothermal finite dimensional plate with a binary alloy is performed to investigate the growth and decay behavior of the solid and the mushy layer of the freeze coat and a complete procedure to calculate the process is obtained in this study. The continuously varying solid and mushy layers are immobilized by a coordinate transform and the resulting governing differential equations are solved by a finite difference technique. To account for the latent heat release and property change during solidification, proper phase change models are adopted. And the convection in the liquid melt is modeled as an appropriate heat transfer boundary condition at the liquid/mushy interface. The present results are compared with analytic solutions derived for the freeze coating of infinite dimensional plates and the discrepancy is found to be less than 0.5 percent in relative magnitude for all simulation cases. In addition the conservation of thermal energy is checked. The results show that the freeze coat grows proportional to the 1.2 square of axial position as predicted by analytic solutions ar first. But after the short period of initial growth, the growth rate of the freeze coat gradually decreases and finally the freeze coat starts to decay. The effects of various non-dimensional processing parameters on the behavior of freeze coat are also investigated.

The Study on Peak Disappearance of Minor Phase and Formation of ${Al_3}Ti$ in Mechanically Alloyed Al-Ti Samples (기계적 합금화한 Al-Ti 시료에서 미소상 피이크의 소멸현상과 ${Al_3}Ti$ 형성에 관한 연구)

  • Kim, Jin-Gon;Kim, Hye-Seong;Kim, Byeong-Hui
    • Korean Journal of Materials Research
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    • v.11 no.12
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    • pp.1035-1041
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    • 2001
  • The refining process and solubility of Ti in Al matrix during mechanical alloying (MA) were investigated by using X-ray diffraction (XRD), transmission electron microscopy (TEM) as functions of alloy composition, milling time and ball to powder ratio (BPR). Mechanical alloyed samples were annealed for investigating their stability and the formation behavior of$Al_3Ti$in the temperature range from$200{\circ}C$to$600{\circ}C$. It is observed from present experimental that disappearance of Ti peaks in mechanically alloyed Al-10wt%Ti is not simply attributable to the dissolution of Ti into Al, but associated mainly with extreme refining and/or heavy straining of Ti particles The annealing of the mechanically alloyed Al-Ti powders show differences in aluminide formation behavior when Ti content in Al is equal to or less than l0wt% and higher than l5wt%Ti. When Ti-content in Al is equal to or less than l0wt%, the MA powders transform directly to a global equilibrium state forming $DO_{22}- type\;Al_3$Ti above$400{\circ}C$. In the Al-Ti samples with equal to or higher than l5wt%Ti, transitional phases of cubic$Al_3Ti$and tetragonal $Al_{24}Ti_8$ are formed above$400{\circ}C$. They are stable only below$500{\circ}C$, and, $DO_{22}-type\;Al_3Ti$ becomes dominant aluminide at temperature higher than$ 600{\circ}C$.

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The Measurement of Membrane Deformation Behavior in Kogas Pilot LNG Storage Tank by the use of Mechanical/Electrical Sensor (I) (기계적/전기적 측정 센서를 이용한 Kogas Pilot LNG 저장탱크 멤브레인 변형 거동 측정(I))

  • Kim Y.K.;Hong S.H,;Oh B.T.;Yoon I.S.;Kim J.H.;Kim S.S.
    • Journal of the Korean Institute of Gas
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    • v.7 no.3 s.20
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    • pp.13-17
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    • 2003
  • A membrane unit for Liquefied Natural Gas (LNG) storage tank is a structural member which is designed specifically for preventing undesirable LNG leakage. Membrane units have to endure gas and liquid pressures by LNG and thermal stresses by the contact with cryogenic liquid of $-162^{\circ}C$. It is of importance to assure the strengths of membrane by experimental stress analysis under the temperature of LNG. In this paper, we proposed measurement system using commercial electrical strain gage and mechanical extension meter designed for this study.

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Residual Mechanical Properties of Ultra High Strength Concrete with Aggregate Factor (골재요인에 따른 초고강도 콘크리트의 잔존역학적 특성)

  • Lee, Hee-Kwang;Kim, Gyu-Yong;Lee, Tae-Gyu;Nam, Jeong-Soo;Koo, Kyung-Mo;Youn, Yong-Sang
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2011.11a
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    • pp.211-212
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    • 2011
  • It was very important to evaluate concrete experimentally at elevated temperature because concrete was filled with aggregate of concrete volume about 70 percent. Concrete exposure to high temperatures produces changes in its internal structure, for instance loss of its strength and deformation capacity, in extreme cases risking the service life of the structure. The work of this paper is performed to evaluate the thermal behavior of ultra-high strength concrete having different water to cement ratio (strength), fine aggregate to aggregate ratio and maximum size of coarse aggregate. For exposure to 500℃ during 1 hour, residual mechanical properties of the ultra-high strength concrete decreased as the s/a ratio decreases and the maximum size of coarse aggregate increases.

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AGS Distribution in Low-Speed Round-Oval Rolling of S20C Steel (S20C강 저속 라운드-모발 압연의 AGS 분포)

  • Kwon H. C.;Lee H. W.;Lee Y.;Im Y. T.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2004.08a
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    • pp.297-306
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    • 2004
  • This study investigated Austenite Grain Size (AGS) distribution in Low-Speed Round-Oval Rolling. Rolling experiments were done along with the AGS numerical modeling to characterize the final AGS distribution and its kinetics behavior. For bar rolling experiment, we utilized the pilot rolling mill, operating at 34 fixed rpm, at POSCO Technical Research Laboratories. To investigate the microstructural observation, the rigid-viscoplastic finite element analysis was combined with Hodgson's AGS evolution model. To consider the transient thermal history in the integrative AGS modeling, additivity rule was introduced. The integrated analysis revealed that static or meta-dynamic recrystallization is responsible for the AGS difference in the inner or outer region of rolled bar. Comparative study showed that the current AGS modeling approach can be used to model the overall AGS distribution in bar rolling processes. For more accurate AGS prediction, the AGS modeling method should be verified under the various rolling conditions such as different rolling speeds and different deformations.

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Characteristics of the sintered body of the Al2TiO5 with addition of LAS (β-spodumene) and Fe2O3 (LAS (β-spodumene)와 Fe2O3 첨가에 따른 Al2TiO5의 소결체 특성 연구)

  • Kim, Sang-Hun;Kang, Eun-Tae;Kim, Ung-Soo;Hwang, Kwang-Taek;Cho, Woo-Seok
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.22 no.1
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    • pp.57-63
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    • 2012
  • $Al_2TiO_5$ ceramics were sintered by a solid-state reaction. LAS (${\beta}$-spodumene) and $Fe_2O_3$ were added to the $Al_2TiO_5$ composition for enhancement of sintering behavior such as mechanical strength and thermal shock resistance. The sintered body was much densified by addition of LAS and $Fe_2O_3$ because LAS formed the liquid-phase and $Fe_2O_3$ suppressed the grain growth. We have systematically investigated the sintering characteristics, microstructures, mechanical properties, and thermal shock resistance according to the change of the amount of additive. When the additive of LAS (20 wt%)-$Fe_2O_3$ was added to $Al_2TiO_5$, it confirmed that superior mechanical properties of the fracture strength of over 120 MPa and the thermal shock resistance of over $1,200^{\circ}C$ were achieved.

Characterization of Thickness and Thermoelastic Properties of Interphase in Polymer Nanocomposites using Multiscale Analysis (멀티스케일 해석을 통한 고분자 나노복합재의 계면 상 두께와 열탄성 물성 도출)

  • Choi, Joonmyung;Cho, Maenghyo
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.29 no.6
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    • pp.577-582
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    • 2016
  • In this study, a multiscale method for solving a thermoelasticity problem for interphase in the polymeric nanocomposites is developed. Molecular dynamics simulation and finite element analysis were numerically combined to describe the geometrical boundaries and the local mechanical response of the interfacial region where the polymer networks were highly interacted with the nanoparticle surface. Also, the micrmechanical thermoelasticity equations were applied to the obtained equivalent continuum unit to compute the growth of interphase thickness according to the size of nanoparticles, as well as the thermal phase transition behavior at a wide range of temperatures. Accordingly, the equivalent continuum model obtained from the multiscale analysis provides a meaningful description of the thermoelastic behavior of interphase as well as its nanoparticle size effect on thermoelasticity at both below and above the glass transition temperature.