• 제목/요약/키워드: materials flow

검색결과 3,903건 처리시간 0.035초

수소 유량에 따른 IZO 박막의 구조적 및 전기적 특성 (Structural and Electrical Characteristics of IZO Thin Films Deposited at Different Hydrogen Flow Rate)

  • 홍경림;이규만
    • 반도체디스플레이기술학회지
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    • 제18권3호
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    • pp.7-11
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    • 2019
  • We have investigated the effect of the hydrogen flow rate on the characteristics of IZO thin films for the TCO (transparent conducting oxide). For this purpose, IZO thin films are deposited by RF magnetron sputtering at 300℃ with various H2 flow rate. To investigate the influences of the ambient gases, the flow rate of hydrogen in argon was varied from 0.1 sccm to 1 sccm. The IZO thin films deposited at 300℃ show crystalline structure having an (222) preferential orientation. The electrical resistivity of the crystalline-IZO films deposited at 300℃ and hydrogen gas of 0.8sccm was 3.192×10-4Ω cm, the lowest value. As the hydrogen gas flow rate increased, the resistivity tended to decrease. The XPS profiles showed that the number of oxygen vacancy decreased as the hydrogen flow rate increased. The transmittance of the IZO films deposited at 300℃ were showed more than 80%.

증착 온도 및 수소 유량에 따른 MZO 박막의 구조적 및 전기적 특성 (Structural and Electrical Characteristics of MZO Thin Films Deposited at Different Substrate Temperature and Hydrogen Flow Rate)

  • 이지수;이규만
    • 반도체디스플레이기술학회지
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    • 제17권2호
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    • pp.6-11
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    • 2018
  • In this study, we have studied the effect of substrate temperature and hydrogen flow rate on the characteristics of MZO thin films for the TCO(Transparent conducting oxide). MZO thin films were deposited by RF magnetron sputtering at room temperature and $100^{\circ}C$ with various $H_2$ flow rate(1sccm~4sccm). In order to investigate the effect of hydrogen gas flow rate on the MZo thin film, we experimented with changing the hydrogen in argon mixing gas flow rate from 1.0sccm to 4.0sccm. MZO thin films deposited at room temperature and $100^{\circ}C$ show crystalline structure having (002), (103) preferential orientation. The electrical resistivity of the MZO films deposited at $100^{\circ}C$ was lower than that of the MZO film deposited at room temperature. The decrease of electrical resistivity with increasing substrate temperature was interpreted in terms of the increase of the charge carrier mobility and carrier concentration which seems to be due to the oxygen vacancy generated by the reducing atmosphere in the gas. The average transmittance of the MZO films deposited at room temperature and $100^{\circ}C$ with various hydrogen gas flow was more than 80%.

심미수복 재료의 마모와 화학적 분해 (WEAR AND CHEMICAL DEGRADATION OF ESTHETIC RESTORATIVE MATERIALS)

  • 양규호;최남기;김훈주;김선미
    • 대한소아치과학회지
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    • 제31권2호
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    • pp.190-201
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    • 2004
  • 수복재료의 요건으로서 치아의 저작기능과 심미성을 회복할 수 있는 물리적, 화학적 성질뿐만 아니라 생물학적 적합성과 구강내 환경변화에 대한 내구성을 들 수 있다. 불소 방출의 장점을 갖는 컴포머나 시술시간을 줄이는데 유리한 재료인 유동성 복합레진을 유구치부에 사용하려고 할 때 마모저항성과 구강내 환경에서의 분해저항성은 중요한 물성 중 하나이다. 실험에 사용된 복합레진은 최근에 시판되고 있는 Charmfil(Dentist, Korea)과 유동성인 Charmfil flow(Denkist, Korea)이고, 컴포머는 Compoglass F(Ivoclar Vivadent, Liechtenstein)와 유동성인 PrimaFlow(DMG Hamburg, Germany)이었다. 각 제품의 분해저항성과 마모도를 평가하고자 마모시험 후 마모된 면의 깊이를 측정하였고 알칼리성 용액에 보관 시 각 제품의 분해저항성을 무게손실, 표면하 분해층 깊이, 용출된 Si 농도를 기준으로 평가하였고 주사전자현미경과 공촛점 레이저 현미경으로 분해층을 관찰하여 다음과 같은 결과를 얻었다. 1. 무게손실량은 각 제품간 차이를 보이지 않았다(p>0.05). 2. 분해층 깊이는 Compoglass F가 가장 깊었고, PrimaFlow, Charmfil, Charmfil flow 순이었고 Compoglass F와 다른 제품간에는 유의한 차이를 보였다(p<0.05). 3. Si 용출량은 Charmfil flow가 가장 많았고, Compoglass F가 가장 작았으며 두 제품간에는 유의한 차이를 보였다(p<0.05). 4. 주사전자현미경 관찰시 표면 양상 및 분해층 깊이를 관찰할 수 있었고 공촛점 레이저 현미경 관찰시 NaOH용액에 보관한 후 수복재의 기질과 충전제 사이의 결합의 파괴 양상인 분해층 질이를 관찰할 수 있었다. 5. 마모는 Compoglass F에서 가장 많이 일어났으며, PrimaFlow, Charmfil, Charmfil flow 순이었고 각 제품간에는 유의한 차이를 보였다(p<0.05). 6. 각 제품의 Si 용출량과 분해층 깊이 사이(r=0.602, p<0.05), 마모 최대 깊이와 비커스 경도 사이(r=0.501, p<0.05)에는 유의한 상관관계를 보였으나 Si 용출량과 마모 최대 깊이 등 다른 항목간에는 유의한 상관관계를 보이지 않았다(r=-0.052, p>0.05). 본 연구에서 Compoglass F는 불소함량은 가장 높았으나 화학적 분해층과 마모질이가 가장 깊은 것으로 나타났으며 flowable type의 복합레진과 컴포머는 표면 경도와 마모도에서 양호한 결과를 보였다. 이상의 결과 복합레진과 컴포머의 평가요소로서 마모도와 함께 가수분해도 고려되어야 할 것으로 사료된다.

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ANALYSIS OF SrTiO$_3$STEP-FLOW GROWTH BY RHEED

  • Shin, Dong-Suk;Lee, Ho-Nyung;Kim,Yong-Tae;Chol, In-Hoon;Kim, Chang-Jung;Kim, T.Y.;Lee, J.K.;Chung, Il-Sub
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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    • pp.65.2-65
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    • 1998
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해수중의 물질 분리 및 분석을 위한 Fl-FFF의 안정화 기법 (Stabilization Methods to Separate and Analyze Materials in Seawaters using Fl-FFF)

  • 최수훈;이상엽;홍승관;문지희
    • 한국물환경학회지
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    • 제25권2호
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    • pp.288-294
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    • 2009
  • Flow field-flow fractionation (Fl-FFF) device has been widely used to verify the size and molecular weight of various colloids and organics. The Fl-FFF, however, generally uses carrier solutions with only low to moderate ionic strengths to exclude the high affinity of materials to the membrane under high ionic strength conditions. Thus, materials existing in seawaters have not been accurately analysed based on the hydrodynamic size and molecular weight using current Fl-FFF techniques. The highest ionic strength tested was up to 0.1 M, while seawater ionic strength is about 0.6 M. The aim of this study is to accurately measure the hydrodynamic size of particles under carrier solutions close to seawater conditions with the Fl-FFF. By employing various operating conditions during the Fl-FFF analyses, it was demonstrated that the flow conditions, the concentration of surfactants, and stabilization times were key factors in acquiring compatible data. Results have shown that the cross flow was more influential factor than the channel flow. The concentration of the surfactant was to be at least 0.05% and the minimum 15 hr of stabilization was needed for accurate and reproducible data acquisition under seawater condition.

성토층에 매설된 사력질층의 침투특성에 대한 실험적 연구 (An Experimental Study on Seepage Characteristics of Embedded Gravel and Rock Layer in the Embankment)

  • 이행우;장병욱;장웅희;원정윤
    • 한국지반공학회:학술대회논문집
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    • 한국지반공학회 2005년도 춘계 학술발표회 논문집
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    • pp.545-552
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    • 2005
  • For the purpose of studying on the seepage characteristics of embedded gravel layer in embankment, laboratory model tests were carried out. The embedded layer under embankment was $19{\sim}26mm$ diameter of gravel and those embankment materials were Saemangum dredged sand, river sand and mixed(1:1) sand with dredged and river one. Those permeability coefficients of three different sands are $5.00{\times}10^{-5}$, $3.00{\times}10^{-4}$, $7.50{\times}10^{-5}m/s$, respectively. Seepage characteristics of these results are as follows; 1) The Reynolds number of water flow through embedded gravel layer in three different permeable soils is less then 10, it is laminar flow. 2) These flow velocities through embedded gravel layer in soils are in proportion to these hydraulic gradients, it is Darcy flow. 3) These Darcian permeability coefficients of water flow through embedded gravel layer in soils show as $2.95{\times}10^{-3}$, $1.38{\times}10^{-2}$, $3.33{\times}10^{-3}$m/s, respectively, by varying permeability of embankment soils and embankment lengths. It is approximately 100 times of those permeability coefficients of embankment materials.

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Role of CH2F2 and N-2 Flow Rates on the Etch Characteristics of Dielectric Hard-mask Layer to Extreme Ultra-violet Resist Pattern in CH2F2/N2/Ar Capacitively Coupled Plasmas

  • Kwon, B.S.;Lee, J.H.;Lee, N.E.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.210-210
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    • 2011
  • The effects of CH2F2 and N2 gas flow rates on the etch selectivity of silicon nitride (Si3N4) layers to extreme ultra-violet (EUV) resist and the variation of the line edge roughness (LER) of the EUV resist and Si3N4 pattern were investigated during etching of a Si3N4/EUV resist structure in dual-frequency superimposed CH2F2/N2/Ar capacitive coupled plasmas (DFS-CCP). The flow rates of CH2F2 and N2 gases played a critical role in determining the process window for ultra-high etch selectivity of Si3N4/EUV resist due to disproportionate changes in the degree of polymerization on the Si3N4 and EUV resist surfaces. Increasing the CH2F2 flow rate resulted in a smaller steady state CHxFy thickness on the Si3N4 and, in turn, enhanced the Si3N4 etch rate due to enhanced SiF4 formation, while a CHxFy layer was deposited on the EUV resist surface protecting the resist under certain N2 flow conditions. The LER values of the etched resist tended to increase at higher CH2F2 flow rates compared to the lower CH2F2 flow rates that resulted from the increased degree of polymerization.

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An electrochemical study of the sealing ability of three retrofilling materials

  • Park, Dong-Sung;Sohn, Suh-Jin;Oh, Tae-Seok;Yoo, Hyun-Mi;Park, Chan-Je;Yim, Soon-Ho;Lee, Young-Kyoo;Kye, Seung-Bum
    • Restorative Dentistry and Endodontics
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    • 제29권4호
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    • pp.365-369
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    • 2004
  • The purpose of this study was to evaluate the apical sealing ability of Super-EBA, MTA and Dyract-flow as retrofilling materials. Forty-eight extracted human teeth with straight and single root canal were used in this study. The root canals were prepared to a #40 apical canal size and obturated with gutter-percha. Apicoectomies were performed and root end cavities were prepared to a depth of 3mm using an ultrasonic device. The root end cavities were filled with Super-EBA, MTA or Dyract-flow. Leakage was measured using an electrochemical technique for 4 weeks. According to this study, the results were as follows. 1. Increasing leakage with time was observed in all groups. 2. No significant difference was noted among the 3 groups with time (p =0.216). 3. No significant difference was noted among the 3 groups when measured within the same time interval (p =0.814). The results of this study suggest that the sealing ability of Dyract-flow is equal to that of Super-EBA and MTA, and Dyract-flow may be an alternative to other materials for root-end filling.

메탄/수소 혼합 가스의 예혼합 선회 연소특성 (Combustion Characteristics of Hydrogen/Methane gas in Pre-mixed Swirl Flame)

  • 김한석;이영덕;최원석;안국영
    • 한국수소및신에너지학회논문집
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    • 제19권4호
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    • pp.276-282
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    • 2008
  • The effects of hydrogen enrichment to methane have been investigated with swirl-stabilized premixed hydrogen-enriched methane flame in a laboratory-scale pre-mixed combustor. The hydrogen-enriched methane fuel and air were mixed in a pre-mixer and introduced to the combustor through different degrees of swirl vanes. The flame characteristics were examined for different amount of hydrogen addition to the methane fuel and different swirl strengths. The hydrogen addition effects and swirl intensity on the combustion characteristics of pre-mixed methane flames were examined using micro-thermocouple, particle image velocity meter (PIV) and chemiluminescence techniques to provide information about flow field. The results show that the flame area increases at upstream of reaction zone because of increase in ignition energy from recirculation flow for increase in swirl intensity. The flame area is also increased at the downstream zone by recirculation flow because of increase in swirl intensity which results in higher centrifugal force. The higher combustibility of hydrogen makes reaction faster, raises the temperature of reaction zone and expands the reaction zone, consequently recirculation flow to reaction zone is reduced. The temperature of reaction zone increases with hydrogen addition even though the adiabatic flame temperature of the mixture gas decreases with increase in the amount of hydrogen addition in this experiment condition because the higher combustibility of hydrogen reduces the cooler recirculation flow to the reaction zone.

비정질합금 박판 제조용 노즐 재료의 내구성평가 (Durability of Nozzle Materials for Strip Casting of Amorphous Alloys)

  • 강복현;김기영
    • 한국주조공학회지
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    • 제31권5호
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    • pp.267-273
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    • 2011
  • Erosion and thermal shock resistance of several refractory materials have been investigated, which are expected to be used as nozzles in a planar flow casting equipment for amorphous alloys. The test was conducted on five materials; graphite, boron nitride, fused silica, alumina and zirconia. Test specimens were preheated and dipped into the melt of carbon steel and amorphous alloys. Some test specimens were rotated to develop high erosion and to shorten the test periods. Fused silica and boron nitride specimens showed the excellent erosion and thermal shock resistance irrespective of the kind of melt and melting atmosphere.