• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.176-180
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• 2001

There are several factors causing re-work in CMP process such as improper polish time calculation by operator, removal rate decline of the polisher, unstable in-suit pad conditioning, slurry supply module problem and wafer carrier rotation inconsistency. And conclusively those fundimental reason for the re-work rate increasement is mainly from the cycle time delay between wafer polish and post measurement. Therefore, Wafer thickness measurement in wet condition could be able to remove those improper process conditions which may happen during the process in comparison with the conventional dried wafer measurement system and it can be able to reduce the CMP process cycle time. CMP scrap reduction by overpolish, re-work rate reduction, thickness control efficiency also can be easily achieved. CMP Equipment manufacturer also trying to develop integrated system which has multi-head & platen, cleaner, pre & post thickness measure and even control the polish time from the calculated removal rate of each polishing head by software. CMP re-work problem such as over & under polish by target thickness may result in the cycle time delay. By reducing those inefficient factors during the process and establish of the automatic process control, CLC system need to be adopted to maximize the process performance. Wafer to Wafer Polish Time Feed Back Control by measuring the wafer right after the polish shorten the polish time calculation for the next wafer and it lead to the perfect Post CMP target thickness control capability. By Monitoring all of the processed the wafer, CMP process will also be stabilize itself.

• Proceedings of the KIEE Conference
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• 2000.07d
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• pp.2535-2537
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• 2000

In order to detect and monitor the broken cords of steel-cord belt from being damaged by impact of large lump of materials and the corrosion of steel cord, we developed a non-contact magnetic coil detection system. This measures the deterioration of reinforcing cables in steel cord conveyor belt which transport the ores in raw material plant. In this research, magnetic coil sensor of broken-cord detection system has exciting part and sensing part. The broken-cord detection system is operated by supplying a transmitter coil with electric power to generate magnetic field, and then the change of induced voltage is detected in each receiver coils due to resultant magnetic flux effected by the broken steel cords at the inside of the conveyor belt. By the informations such as the position and size of the broken steel cords obtained by SCBMS(Steel Cord Belt Monitoring System), it is expected that not only the span of belt life will be lengthened, but also this system can enable operators to plan scheduled maintenance and prevent the enlargement of damaged parts in steel cord belt at an early stage

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2002.05a
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• pp.205-208
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• 2002

When establishing the submarine optical fiber table between international and domestic, marine survey in advance it grasps the submarine geological features which is accurate and a depth of water condition. And the route which is safe for selecting and submarine optical fiber cable laying it is a work which secures an ease one location. If also, the PLGR the submarine of optical fiber table root the sea contamination material (rope, wire and net) it removes in advance and if the submarine of the optical fiber cable ease it does to arrive safely. And it is a work the Plough and ROV laying work hour laying work efficiency improvement and laying equipment it will be able to protect. So, This paper presents the monitoring system of ship information management and operation for marine survey and PLGR work in submarine optical fiber table construction enterprise. In order to achieve these purpose, overall serial multi-port communication modulo of configuration, realtime processing for management and operation of receiving data, realtime graph and a printout are described.

• Journal of the Korean Society for Nondestructive Testing
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• v.24 no.1
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• pp.45-51
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• 2004

Boiler tubes in power plants are often leaked due to various material degradations including creep and thermal fatigue damage under severe operating conditions such as high temperature and high pressure over an extended period of time. To monitor and diagnose the tubes on site and in real time, the acoustic emission (AE) technology was applied. We developed an AE leak detection system, and used it to study the variation of AE signal from the on-site tubes in response to the changes in the boiler operation condition and to detect the locations of leakage based on it. Detection of leak was performed by acquiring and evaluating the signals in separate regimes of high and low frequency signal. As a result of these studies, we found that on-line monitoring and detection of leak location for boiler tubes is possible using the developed system. Thus, the system is expected to contribute to the safe operation of power plants, and prevent economic losses due to potential leak.

• Journal of the Korean Society for Railway
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• v.19 no.4
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• pp.468-479
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• 2016

In order to supply power to online monitoring systems that are attached to high voltage catenary or overhead wires, a wireless power transfer system is required that is able to transmit power over the insulation gap. Such wireless power transfer systems have transmitter and receiver coils that have diameters of over 10cm. This paper focused on an investigation of the sources of loss in the coils when the coils are fabricated using printed circuit board technology. Using finite element simulation results, it has been shown that the dielectric loss in the substrate was the dominant source of the total loss. It has been demonstrated that the selection of a proper dielectric material was the most critical factor in reducing the loss. For further reduction of the loss, the distributed tuning capacitor method and the slotting of the inter-turn spaces have been proposed. For the evaluation of the proposed methods, four coils have been fabricated and their equivalent series resistances and quality factors were measured. Measured quality factors were greater than 300, which means that these devices will be helpful in achieving high coil-to-coil efficiency.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.24 no.2
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• pp.192-197
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• 2020

Multivariate processes, such as large scale power plants or chemical processes are operated in very hazardous environment, which can lead to significant human and material losses if a fault occurs. On-line monitoring technology, therefore, is essential to detect system faults. In this paper, the ICA-based fault detection method is conducted using three different multivariate process data. Fault detection procedure based on ICA is divided into off-line and on-line processes. The off-line process determines a threshold for fault detection by using the obtained dataset when the system is normal. And the on-line process computes statistics of query vectors measured in real-time. The fault is detected by comparing computed statistics and previously defined threshold. For comparison, the PCA-based fault detection method is also implemented in this paper. Experimental results show that the ICA-based fault detection method detects the system faults earlier and better than the PCA-based method.

• Journal of Power System Engineering
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• v.15 no.2
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• pp.13-18
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• 2011

This thesis is about the result of conducting a specific experiment for the development of noncontact vibration displacement sensor for measuring the spindle vibration that is used for conditional monitoring of machinery. One should be careful when using the eddy current type displacement sensor because the sensitivity of it is different according to the quality of the material. While the probe used for nondestructive inspection adopts the effect of transmitting the material by using the high frequency domain, the eddy current type displacement sensor uses the lower frequency of around 1MHz. Also, while the nondestructive probe uses the method of enhancing output by using the resonance zone, the vibration displacement sensor utilizes the stable zone by avoiding the resonance zone. Since the oscillator of the converter uses the "L" element as Probe, its characteristic changes with the variation of a relevant impedance. In other words, if the length of Probe's Cable gets extended (Impedance increase), the sensitivity declines accordingly. The effect of surrounding temperature was small, but the influence of the quality of Sensor Coil used was high. Moreover, following an experimental demonstration of the phenomenon where the sensitivity decreases as the frequency of the tested material increases from a frequency response test, the maximum frequency that could be measured was approximately 1KHz. It was noted that the degree of precision could be maintained by using the gap of the probe in the linear zone at the installation site.

• Journal of Environmental Impact Assessment
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• v.21 no.1
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• pp.93-104
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• 2012

In this research LCA methodology was adapted and analyzed in quantifying estimation of estuarine environment. The analysed objects of estuarine environment were construction methods, facility, and input material into water, and estuarine ecosystem. In this research the function of LCA of estuarine environment was river with the view of controling water, utilizing water, and hydrophilic function. According to the result of research, environmental damage indicator of facility was decreased 346 Pt from 453 Pt at pre-maintenance to 107 pt at post-maintenance. Among raw and subsidiary materials, remicon, stone-netting bag, and pebbles were showing heavy environmental load in the order. Evironmental impact of input material into water system was analyzed from 1,827 Pt environmental load before construction to 1,080 Pt of post-maintenance, and damage indicator was improved at 747 Pt. Water quality was improved from 1,827 Pt (before construction) to 1,080 Pt(after construction), and ecosystem was improved after maintenance. Environmental indicator in ecosystem was analyzed 427 Pt(before construction) to 348 Pt(after construction), and damage indicator of Sumnjingang riverine system was improved as much as 79 Pt. In the conclusion, estuarine environmental monitoring through LCA in the area of facility, input material into water and ecosystem showed that close-to-nature stream was 1,172 Pt better than artificial stream in environmental aspects.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.9 no.3
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• pp.149-159
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• 2011

Nuclear power utilities should establish a site-specific groundwater monitoring program for early detection of unplanned radioactive material's releases which can occur due to degradation of systems, structures and components of the nuclear power plants in order to keep the impact of the unplanned releases on the environment and the residents as low as reasonably achievable. For this end, groundwater flow on site should be evaluated based on characterization of the hydrogeology of a site of concern. This paper aims to provide data necessary for establishing groundwater monitoring program which is currently considered at Kori nuclear power plant 1 by characterizing groundwater flow system on the site based on the existing hydrogeological studies and related documents, and by modeling tritium transport. The results showed that the major groundwater flow direction was south-west and that most of groundwater entered a southern and eastern seas. Although the tritium plume also released into the sea, its rate was delayed by dewatering sump.

• Korean journal of applied entomology
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• v.58 no.4
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• pp.319-320
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• 2019

We have developed simple and reliable new habitat plants system with natural enemies names as "Natural Enemy in First (NEF)" method. As a result, NEF without monitoring and release of just natural enemy with monitoring showed higher bio-control effects, i.e., 83% and 70%, respectively than environmental friendly agricultural material (EFAM) treatment. In addition, the average population density of predatory mites on NEF method was higher (three times) than other treatment.